Dr. Joachim Zajadacz

Wissenschaftlicher Mitarbeiter / Laserstrahlgestützte Strukturierung / Physikalische Abteilung

Leibniz-Institut für Oberflächenmodifizierung e. V.
Permoserstr. 15 / D-04318 / Leipzig /


Telefon: +49 (0)341 235 - 3291
Fax: +49 (0)341 235 - 2313



Liste der Publikationen >>

  1. P. Lorenz, J. Zajadacz, M. Ehrhardt, L. Bayer, K. Zimmer,
    Pattern transfer, self-organized surface nanostructuring, and nanodrilling of sapphire using nanosecond laser irradiation
    Paper Nr. 97361K, Laser-based Micro- and Nanoprocessing X, SPIE Proceedings, San Fransisco, 04.03. (2017)

  2. P. Lorenz, J. Zajadacz, L. Bayer, M. Ehrhardt, K. Zimmer,
    Nanodrilling of fused silica using nanosecond laser radiation
    Appl. Surf. Sci. 351 (2015) 935-945

  3. C. Steinberg, M. Gubert, M. Papenheim, S. Wang, H.-C. Scheer, J. Zajadacz, K. Zimmer,
    Challenges with soft stamps for guiding of diblock copolymers
    Appl. Phys. A 121 (2015) 489-497

  4. J. Zajadacz, P. Lorenz, F. Frost, R. Fechner, C. Steinberg, H.-C. Scheer, K. Zimmer,
    Reactive ion beam etching of fused silica using vertical lamellar patterns of PS-b-PMMA diblock copolymer masks
    Microelectron. Eng. 141 (2015) 289-293

  5. C. Steinberg, D. Blenskens, K. Dhima, S. Wang, M. Papenheim, H.-C. Scheer, J. Zajadacz, K. Zimmer,
    Guided wrinkling with nanoimprinted SU-8 surfaces
    J Vac. Sci. Techn. B32 (2014) 06FG05

  6. C. Steinberg, K. Dhima, D. Blenskens, A. Mayer, S. Wang, M. Papenheim, H.-C. Scheer, J. Zajadacz, K. Zimmer,
    A scalable anti-sticking layer process via controlled evaporation
    Microelectron. Eng. 123 (2014) 4-8

  7. M. Ehrhardt, P. Lorenz, F. Frost, J. Zajadacz, K. Zimmer,
    Processes at Multi-pulse Laser Embossing of Submicron Surface Structures
    J. Laser Micro/Nanoeng 9 (2013) 252-256

  8. J. Zajadacz, P. Lorenz, M. Ehrhardt, K. Zimmer, S. Möllenbeck, K. Dhima, H.C.K. Scheer,
    Measurement and simulation of the pull-off strength at the separation of miniaturized 3D connectors consisting of silicon masters with undercuts and PDMS replicas
    Microelectron. Eng. 101 (2013) 31-36

  9. J. Zajadacz, et al.,
    Measurement and simulation of the pull-off strength at the separation of miniaturized 3D connectors consisting of silicon masters with undercuts and PDMS replicas
    MICROELECTRON ENG 101 (2012) 31-35

  10. K. Zimmer, J. Zajadacz, R. Fechner, K. Dhima, H.C. Scheer,
    Fabrication of optimized 3D microstructures with undercuts in fused silica for replication
    Microelectron. Eng. 98 (2012) 163-166

  11. J. Zajadacz, R. Fechner, K. Zimmer,
    Fabrication of high aspect ratio sub-100 nm patterns in fused silica
    J. Mater. Sci. 2 (5) (2012) (2012) 458-462

  12. Joachim Zajadacz, Renate Fechner, Klaus Zimmer,
    Fabrication of high aspect ratio sub-100 nm patterns in fused silica
    Journal of Materials Science and Engineering A 2 (2012) 458-462

  13. C. Elsner, J. Zajadacz, K. Zimmer,
    Replication of 3D-microstructures with undercuts by UV-moulding
    Microelectron. Eng. 88(1) (2011) 60-63

  14. Mollenbeck, S. Bogdanski, N. Mayer, A. Scheer, H. C. Zajadacz, J. Zimmer, K.,
    Preparation of diamond-shaped channels in SU-8 for optical control of the filling state
    J. Vac. Sci. Technol. B 27 (2009) 3078-3081

  15. J.W. Gerlach, C. Patzig, W. Assmann, A. Bergmaier, Th. Höche, J. Zajadacz, R. Fechner, B. Rauschenbach,
    Swift heavy ion irradiation induced effects in Si/SiOx multi-layered films and nanostructures
    Paper Nr. 1181-DD04-01, MRS Spring Meeting, San Francisco, 13.-17.04. (2009)

  16. C. Elsner, S. Naumov, J. Zajadacz, M. R. Buchmeiser,
    172 nm excimer VUV-triggered photodegradation and micropatterning of aminosilane films
    Thin Solid Films 517 (2009) 6772-6776

  17. C. Patzig, J. Zajadacz, K. Zimmer, R. Fechner, C. Khare, B. Rauschenbach,
    Patterning concept for sculptured nanostructures with arbitrary periods
    Appl. Phys. Lett. 95 (2009) 103107

  18. S. Mollenbeck, N. Bogdanski, H.C. Scheer, J. Zajadacz, K. Zimmer,
    Moulding of arrowhead structures
    Macromol. Chem. Phys. 86 (2009) 608-610

  19. S. Möllenbeck, N. Bogdanski, H.-C. Scheer, J. Zajadacz, K. Zimmer,
    Replication of 3D-structures with undercuts
    MME 08 , Aachen, 28.-30. 09 (2008)

  20. S. Möllenbeck, N. Bogdanski, H.-C. Scheer, J. Zajadacz, K. Zimmer,
    Moulding of arrowhead structures
    Paper Nr. NIL 1-P-12, MNE 08, Athen, 15.-18. 09 (2008)

  21. J. Kovac, D. Pudis, A. Satka, F. Uherek, V. Gottschalch, B. Rheinlander, H. Herrnberger, J. Zajadacz, K. Zimmer, A. Schindler,
    Properties of InGaAs/GaAs QW coupled edge and surface emitting tilted cavity lasers
    Laser Physics Letters 4 (2007) 200-203

  22. H.-C. Scheer, N. Bogdanski, S. Möllenbeck, M. Wissen, K. Zimmer, J. Zajadacz,
    Fingerprint stamp for evaluation of polymer flow time constants in thermal nanoimprint
    Microelectron. Eng. 84 (2007) 949-952

  23. S. Möllenbeck, N. Bogdanski, M. Wissen, H.-C. Scheer, J. Zajadacz, K. Zimmer,
    Multiple replication of three dimensional structures with undercuts
    J. Vac. Sci. Technol. B 25 (2007) 247-251

  24. J. Zajadacz, K. Zimmer, N. Bogdanski, H.-C. Scheer,
    3D microstructures with undercuts and their replication by hot-embossing
    6. euspen International Conference, Baden bei Wien, 28.05.-01.06. (2006) Volume 2, 469-472

  25. R. Böhme, J. Zajadacz, K. Zimmer, B. Rauschenbach,
    Topography and roughness evolution of microstructured surfaces at laser-induced backside wet etching
    Appl. Phys. A 80 (2005) 433-438

  26. N. Bogdanski, H. Schulz, M. Wissen, H.-C. Scheer, J. Zajadacz, K. Zimmer,
    3D-Hot embossing of undercut structures - an approach to micro-zippers
    Microelectron. Eng. 73-74 (2004) 190-195


<< zurück