Prof. Dr. rer. nat. Thomas Arnold

Gruppenleiter / Nichtkonventionelle Ultrapräzisions-Oberflächenbearbeitung / Physikalische Abteilung

Stiftungsprofessor an der TU Dresden

Leibniz-Institut für Oberflächenmodifizierung e. V.
Permoserstr. 15 / D-04318 / Leipzig /


Telefon: +49 (0)341 235 - 3120
Fax: +49 (0)341 235 - 2313



Liste der Publikationen >>

  1. J. Bauer, F. Frost, T. Arnold,
    Reactive ion beam figuring of optical aluminium surfaces
    J. Phys. D Appl. Phys. 50 (2017) 085101

  2. M. Balkenhol, F. P. Nothdurft, M. Hannig, A. Schindler, A. Lehmann, Th. Arnold, A. Knauber, S. Rupf ,
    Bonding to zirconia ceramic: The effect of cold plasma treatment and 4-META
    Clin. Plasma Med. 5 (2017) 8-13

  3. S. Germer, F. Pietag, J. Polak, and Th. Arnold,
    Quantitative low-energy ion beam characterization by beam profiling and imaging via scintillation screens
    Rev. Sci. Instrum. 87 (2016)

  4. P. Piechulla, J. Bauer, G. Boehm, H. Paetzelt, Th. Arnold,
    Etch Mechanism and Temperature Regimes of an Atmospheric Pressure Chlorine-Based Plasma Jet Process
    Plasma Process. Polym. 13 (2016) 1128-1135

  5. Th. Arnold, J. Bauer,
    Ion beam figuring of RSA aluminium surfaces
    Paper Nr. O3.4, EUSPEN 16th International Conference, Nottingham, UK, 30.05.-03.06. (2016)

  6. Th. Arnold, G. Böhm, H. Paetzelt,
    Non-conventional ultra-precision manufacturing of ULE® mirror surfaces using atmospheric reactive plasma jets
    Paper Nr. 99123N, SPIE Telescopes + Instrumentation, Edinburgh, 26.06.-01.07. (2016)

  7. S. Rupf, Th. Arnold, A. Lehmann, A. Schindler,
    Perspektiven für Prävention und Therapie der Zahnkaries, in: Plasmamedizin - Kaltplasma in der medizinischen Anwendung, H.-R. Metelmann, Th. v. Woedke, K.-D. Weltmann, Hrsg., Springer Verlag Heidelberg
    Plasmamedizin - Kaltplasma in der medizinischen Anwendung (2016) 159-164

  8. F. Siewert, T. Zeschke, T. Arnold, H. Paetzelt, V. V. Yashchuk,
    Linear chirped slope profile for spatial calibration in slope measuring deflectometry
    Rev. Sci. Instrum. 87 (2016) 051907

  9. Th. Arnold, G. Boehm, H. Paetzelt,
    New Freeform Manufacturing Chains based on atmospheric Plasma Jet Machining
    J. Eur. Opt. Soc.-Rapid 11 (2016) 16002

  10. Th. Arnold, Th. Franz, F. Frost, A. Schindler,
    Ultra-precision Surfaces and Structures with Nanometer Accuracy by Ion Beam and Plasma Jet Technologies, in: Encyclopedia of Nanotechnology, Bharat Bhusan (Editor), Springer Netherlands, Dordrecht
    Encyclopedia of Nanotechnology (2015) 1-23

  11. A. Lehmann, S. Rupf, A. Schubert, I.-M. Zylla, H. J. Seifert, A. Schindler, Th. Arnold,
    Plasma deposited silicon oxide films for controlled permeation of copper as antimicrobial agent
    Clinical Plasma Medicine 3 (2015) 3-9

  12. H. Paetzelt, G. Boehm, Th. Arnold,
    Surface error correction with fine focused plasma jets
    Paper Nr. EOSMTOC Poster_16, EOSMTOC 2015, München, 22.-25.06. (2015)

  13. Th. Arnold, G. Boehm, H. Paetzelt,
    Free Form Manufacturing based on Plasma Jet Machining
    Paper Nr. EOSMTOC III_3 , EOSMTOC 2015, München, 22.-27.06. (2015)

  14. Th. Arnold, G. Boehm, H. Paetzelt,
    New Freeform Manufacturing Chain based on atmospheric Plasma Jet Machining
    Paper Nr. FTh1B.3 Freeform Optics, Proceedings Imaging and Applied Optics 2015, Arlington, USA, 07.-11.06. (2015)

  15. F. Pietag, Th. Arnold,
    Ultra-precision surface finishing using pulsed ion beams
    Proceedings of EUSPEN International Conference 2015, Leuven, Belguim, 01.-05.06. (2015) 361

  16. Th. Arnold, F. Pietag,
    Ion beam figuring machine for ultra-precision silicon spheres correction
    Precision Engineering 41 (2015) 119-125

  17. Th. Arnold, G. Boehm, H. Paetzelt, F. Pietag,
    Ion beam and plasma jet based methods in ultra-precision optics manufacturing
    Proc. SPIE, Optics and Measurement Conference 2014 9442 (2015) 944204

  18. H. Paetzelt, G. Böhm, Th. Arnold,
    Etching of silicon surfaces using atmospheric plasma jets
    Plasma Sources Sci. Technol. 24 (2015) 025002

  19. Th. Arnold, H. Baumann, H. Bettin, F. Bielsa, A. Eichenberger, N. Kuramoto, G. Mana, E. Massa, S. Merlet, F. Pereira dos Santos, A. Picard, P. Pinot, F. Piquemal,
    European metrology research programme: Advance on the realization of the kilogram redefinition
    Conference on Precision Electromagnetic Measurements (CPEM 2014), Rio de Janeiro , 24.-29.8. (2014) 426 - 427

  20. Th. Arnold, G. Böhm, H. Paetzelt,
    Comparison of ultra-precision tactile and optical profilometry free form measurement systems
    Paper Nr. P4.35, EUSPEN 14th International Conference, Dubrovnik, 2.-6.6. (2014) 297V1

  21. H. Paetzelt, G. Böhm, Th. Arnold,
    Ultra precision waviness and figure error correction of silicon crystals by local plasma jet machining
    Paper Nr. P6.25, EUSPEN 14th International Conference, Dubrovnik, 2.-6.6. (2014) 140V2

  22. Th. Arnold, F. Pietag,
    eterministic ion beam figuring of Si spheres
    Paper Nr. O6.1, EUSPEN 14th International Conference, Dubrovnik, 2.-6.6. (2014) 23V2

  23. Th. Arnold, G. Boehm, H. Paetzelt,
    Ultra-Precision Surface Machining with Reactive Plasma Jets
    CONTRIB PLASM PHYS 54 (2014) 145-154

  24. Th. Arnold, G. Böhm, H. Paetzelt,
    Plasma jet polishing of rough fused silica surfaces
    Conference proceedings of the 13th International Conference of the EUSPEN V2 (2013) 19-22

  25. H. Paetzelt, Th. Arnold, G. Böhm, F. Pietag, A. Schindler,
    Surface Patterning by Local Plasma Jet Sacrificial Oxidation of Silicon
    Plasma Process. Polym. 10 (2013) 416-421

  26. F. Siewert, J. Buchheim, T. Höft ,T. Zeschke, A. Schindler, Th. Arnold,
    Investigations on the spatial resolution of autocollimator-based slope measuring profilers
    Nucl. Instrum. Meth. A 710 (2013) 42-47

  27. Th. Arnold, G. Boehm,
    Application of atmospheric plasma jet machining (PJM) for effective surface figuring of SiC
    Precision Engineering 36 (2012) 546 -553

  28. Th. Arnold, G. Boehm, H. Paetzelt,
    Plasma jet machining based process chain for the manufacturing of complex shaped synchrotron mirrors
    Paper Nr. P6.05, 12th euspen International Conference, Stockholm, 04.-08.6. (2012) 71V2

  29. Inga-Maria Eichentopf, Georg Böhm, Thomas Arnold,
    Etching mechanisms during plasma jet machining of silicon carbide
    Surf. Coat. Tech. 205 (2011) 430-434

  30. Inga-Maria Eichentopf, Georg Böhm, Thomas Arnold,
    Etching mechanisms during plasma jet machining of silicon carbide
    Surf. Coat. Tech. 205 (2011) 430-434

  31. M. Janietz, T. Arnold,
    Surface figuring of glass substrates by local deposition of silicon oxide with atmospheric pressure plasma jet
    Surf. Coat. Tech. 205 (2011) S351-S354

  32. J. Meister, Th. Arnold,
    New Process Simulation Procedure for High-Rate Plasma Jet Machining
    Plasma Chem Plasma Process 31 (2011) 91-107

  33. M. Janietz, T. Arnold,
    Surface figuring of glass substrates by local deposition of silicon oxide with atmospheric pressure plasma jet
    Surf. Coat. Tech. 205 (2011) S351-S354

  34. Th. Arnold, G. Boehm, I.-M. Eichentopf, M. Janietz, J. Meister, A. Schindler,
    Plasma Jet Machining- A novel technology for precision machining of optical elements
    Vakuum in Forschung und Praxis 22 (2010) 10

  35. G.P.H. Gubbels, C. van Drunen, G. Böhm, Th. Arnold, F. Kamphues, W.L.M. Gielesen,
    Fabrication of strongly curved aspheric silicon carbide mirrors
    Paper Nr. O5B.1, euspen 10th International Conference, Delft, 31.05.-04.06. (2010)

  36. Th. Arnold, G. Böhm,
    Plasma Jet Machining - Fertigung von off-axis Parabolspiegeln aus Siliziumkarbid
    Paper Nr. A4, 111. Jahrestagung der DGaO, Wetzlar, 25.-29.05 (2010)

  37. Th. Arnold, G. Boehm, R. Fechner, J. Meister, A. Nickel, F. Frost, T. Haensel, A. Schindler,
    Ultra-precision surface finishing by ion beam and plasma jet techniques status and outlook
    Nucl. Instrum. Meth. A 616 (2010) 147-156

  38. I.-M. Eichentopf, G. Böhm, J. Meister, Th. Arnold,
    Reactive Plasma Jet High-Rate Etching of SiC
    Plasma Process. Polym. 6 (2009) 204-208

  39. J. Meister, G. Böhm, I.-M. Eichentopf, Th. Arnold,
    Simulation of the Substrate Temperature Field for Plasma Assisted Chemical Etching
    Plasma Process. Polym. 6 (2009) 209-213

  40. Th. Arnold, G. Böhm,
    Reactive plasma jet machining for free form surface correction
    Paper Nr. P6.16, euspen 9th International Conference, San Sebastian, Spanien, 02.-05.06 (2009) Vol. 2,p. 70

  41. G. Böhm, I.-M. Eichentopf, Th. Arnold,
    Atmospheric Plasma Jet Machining of Optical Surfaces
    Frontiers in Optics 2008/ Laser ScienceXXIV/Plasmonics and Metamaterials/ Optical Fabrication and Testing on CD-ROM (Optical Society of America, Washington, DC, 2008), OThD4, ISBN 978-1-55752-861-2 (2008)

  42. Th. Arnold, J. Meister, G. Böhm,
    Atmospheric Plasma Jet Machining: Simulation of Spatio- Temporal Substrate Surface Temperature Distributions
    Frontiers in Optics/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing on CD ROM (Optical Society of America, Washington, DC, 2008), OThD2, ISBN 978-1-55752-861-2 (2008)

  43. A. Schindler, T. Hänsel, F. Frost, G. Böhm, W. Frank, A. Nickel, Th. Arnold, R. Schwabe, S. Gürtler, S. Görsch, B. Rauschenbach,
    Modern Methods of Highly Precise Figuring and Polishing
    Glass Science and Technology 78 (Suppl. C) (2005) 111

  44. Th. Arnold, S. Grabovski, A. Schindler, H.-E. Wagner,
    Spatially resolved mass spectrometry of reactive Ar/SF6/N2 plasma jets
    Surf. Coat. Tech. 200/1-4 (2005) 818-821

  45. Th. Arnold, S. Grabovsky, A. Schindler, H.-E. Wagner,
    Spatially resolved emission spectroscopic investigation of microwave-induced reactive low-power plasma jets
    Plasma Sources Sci. Technol. 13 (2004) 309-314

  46. Th. Arnold, S. Grabovski, A. Schindler, H.-E. Wagner,
    Spatially resolved spectroscopic investigations and numerical simulation of the chemical kinetics in reactive microwave driven plasma jets
    Proc. XXVI ICPIG, Greifswald 3 (2003) 179-180

  47. Th. Arnold, G. Böhm, A. Schindler ,
    Ultra-high rate plasma jet chemical etching of silicon
    J. Vac. Sci. Technol. A 19 (2001) 2586-2589


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