Dipl.-Phys. Renate Fechner

Technische Mitarbeiterin / Ionenstrahlgestützte Technologien / Physikalische Abteilung

Leibniz-Institut für Oberflächenmodifizierung e. V.
Permoserstr. 15 / D-04318 / Leipzig /


Telefon: +49 (0)341 235 - 2727
Fax: +49 (0)341 235 - 2313



Liste der Publikationen >>

  1. M. Burkhardt, P. Triebel, T. Diehl, L. Erdmann, A. Kalies, M. Helgert, R. Fechner, F. Frost, A. Gatto,
    Manufacturing of deep blazed gratings based on holography
    Paper Nr. ID234, European Optical Society Bi-Annual Meeting (EOSAM) 2016, Berlin, 26.-30.09. (2016)

  2. F. Koch, M. Burkhardt, D. Lehr, M. Schnabel, M. Helgert, R. Fechner, F. Frost, T. Glaser,
    Variety of gratings manufactured by interference lithography
    Asian J. Phys. 25 (2016) 881 - 894

  3. O. Faehnle, F. Zygalsky, E. Langenbach, F. Frost, R. Fechner, A. Schindler, M. Cumme, H. Biskup, C. Wünsche, R. Rascher,
    Fabrication and qualification of roughness reference samples for industrial testing of surface roughness levels below 0.5 nm Sq
    SPIE Conference on Optical manufacturing and testing XI, San Diego, 09.-11.08. (2015)

  4. J. Zajadacz, P. Lorenz, F. Frost, R. Fechner, C. Steinberg, H.-C. Scheer, K. Zimmer,
    Reactive ion beam etching of fused silica using vertical lamellar patterns of PS-b-PMMA diblock copolymer masks
    Microelectron. Eng. 141 (2015) 289-293

  5. M. Burkhardt, R. Fechner, D. Flamm, F. Frost, A. Gatto, C. Laubis, F. Scholze, S. Sinzinger, V. Soltwisch,
    Streulichtarme holografische Blaze-Gitter für den EUV-Bereich
    Paper Nr. P19, DGaO-Proceedings 2014, Karlsruhe, 10.-14.06. (2014)

  6. F. Szillat, R. Fechner, S.G. Mayr,
    Pattern transfer during deposition and fixation of oligomeric bisphenol A on pre-structured copper surfaces
    Phys. Chem. Chem. Phys. 15(33) (2013) 14017-14025

  7. K. Zimmer, J. Zajadacz, R. Fechner, K. Dhima, H.C. Scheer,
    Fabrication of optimized 3D microstructures with undercuts in fused silica for replication
    Microelectron. Eng. 98 (2012) 163-166

  8. M. Burkhardt, R. Fechner, L. Erdmann, F. Frost, R. Steiner, O. Sandfuchs, A. Schindler, A. Gatto, S. Sinzinger,
    Imaging gratings with modulated blaze - realized by a combination of holography and reactive ion beam etching
    Paper Nr. A003, DGaO-Proceedings 2012, Eindhoven, Niederlande, 29.05.-02.06. (2012)

  9. F. Frost, R. Fechner, J. Lorbeer, M. Teichmann, A. Schindler, R. Steiner, M. Burkhardt, L. Erdmann, T. Gase, T. Glaser, A. Gatto,
    Mikro- und Nanostrukturierung optischer Oberflächen durch Ionenstrahlprozesse
    8. ThGOT Thementage Grenz- und Oberflächentechnik und 3. Optik-Kolloquium »Dünne Schichten in der Optik«, Leipzig, 04.-06.09. (2012) 345 - 349

  10. J. Zajadacz, R. Fechner, K. Zimmer,
    Fabrication of high aspect ratio sub-100 nm patterns in fused silica
    J. Mater. Sci. 2 (5) (2012) (2012) 458-462

  11. Joachim Zajadacz, Renate Fechner, Klaus Zimmer,
    Fabrication of high aspect ratio sub-100 nm patterns in fused silica
    Journal of Materials Science and Engineering A 2 (2012) 458-462

  12. C. Khare, R. Fechner, J. Bauer, M. Weise and B. Rauschenbach,
    Glancing angle deposition of Ge nanorod arrays on Si patterned substrates
    J. Vac. Sci. Technol. A 29(4) (2011) 041503

  13. Th. Arnold, G. Boehm, R. Fechner, J. Meister, A. Nickel, F. Frost, T. Haensel, A. Schindler,
    Ultra-precision surface finishing by ion beam and plasma jet techniques status and outlook
    Nucl. Instrum. Meth. A 616 (2010) 147-156

  14. J.W. Gerlach, C. Patzig, W. Assmann, A. Bergmaier, Th. Höche, J. Zajadacz, R. Fechner, B. Rauschenbach,
    Swift heavy ion irradiation induced effects in Si/SiOx multi-layered films and nanostructures
    Paper Nr. 1181-DD04-01, MRS Spring Meeting, San Francisco, 13.-17.04. (2009)

  15. C. Patzig, J. Zajadacz, K. Zimmer, R. Fechner, C. Khare, B. Rauschenbach,
    Patterning concept for sculptured nanostructures with arbitrary periods
    Appl. Phys. Lett. 95 (2009) 103107

  16. F. Frost, R. Fechner, B. Ziberi, J. Völlner, D. Flamm, A. Schindler,
    Large area smoothing of surfaces by ion bombardment: fundamentals and applications
    J. Phys.: Condens. Matter 21 (2009) 224026

  17. L. Aschke, M. Schweizer, J. Alkemper, A. Schindler, F. Frost, T. Hänsel and R. Fechner,
    Substrate for the micro-lithography and process of manufacturing thereof
    US Patent US 7279252 B2 (2007)

  18. Frederico Canova, Raphael Clady, Jean-Paul Chambaret, Manuel Flury, Svtelen Tonchev, Renate Fechner, and Olivier Parriaux,
    High-efficiency, broad band, high-damage threshold high-index gratings for femtosecond pulse compression
    Optics Express Vol. 15, Issue 23 (2007) 15324-15334

  19. F. Frost, H. Takino, R. Fechner, A. Schindler, N. Ohi, K. Nomura ,
    Smoothing of Diamond-Turned Copper Surfaces Using Ion Beams with Aid of Planarizing Film
    Jap. J. Appl. Phys. 46 (2007) 6071-6073

  20. N. Lyndin, M. Flury, S. Tonchev, R. Fechner, O. Parriaux,
    Design and fabrication of an all-dielectric grating with top-hat high diffraction efficiency over a broad spectral range
    Journal of Europien Society - Rapid Puplicaions 2 (2007) 07019

  21. M. Flury, S. Tonchev, R. Fechner, A. Schindler, O. Parriaux,
    High-efficiency wide-band metal-dielectric resonant grating for 20 fs pulse compression
    Journal of Europien Optical Society - Rapid Puplication 2 (2007) 07024

  22. M. Flury, N. Lyndin, R. Fechner, A. Schindler, S. Tonchev, M. Spajer, Y. Ouerdane, N. Destouches, D. Pietroy, S. Reynaud, O. Parriaux,
    Resonant grating pulse compression element with 99% flat top efficiency for high average power femtosecond laser machining
    Proceeding of SPIE, vol. 6187, pp. 436-442 6187 (2006) 436-442

  23. F. Frost, H. Takino, R. Fechner, A. Schindler, N. Ohi, K. Nomura,
    Sub-Nanometer Smoothing of Diamond-turned Metal Surfaces using Ion Beams
    in: 'Towards Synthesis of Micro-/Nano-systems', Eds. F. Kimura and K. Horio, Springer-Verlag (2006) 239

  24. M. Flury, N. Lyndin, S. Tonchev, R. Fechner, A. Schindler, O. Parriaux,
    High top hat diffraction efficiency grating for femtosecond pulse compression
    11th Microoptics Conference MOC 05, Tokio (2005) Postdeadline Paper PD8, 1

  25. F. Frost, H. Takino, R. Fechner, A. Schindler, N. Ohi, K. Nomura,
    Ion beam polishing of diamond-turned metal surfaces
    Autumn Conference of the Japanese Society for Precision Engineering 2005, Kyoto University, Japan, 15.-17.09. (2005) G05

  26. A. Schindler, T. Hänsel, F. Frost, A. Nickel, R. Fechner, B. Rauschenbach,
    Recent achievements on ion beam techniques for optic fabrication
    Conference on Optical Fabrication and Testing, Optical Society of America - OSA, Rochester, 10. - 13. 10. (2004) OMD3

  27. R. Brunner, R. Steiner, K. Rudolf, H.-J. Dobschal, R. Fechner, A. Schindler,
    Deep-UV microscopy based on a hybrid diffractive/refactive lens system
    Conference Diffractive Optics and Micro-Optics, Optical Society of America - OSA, Rochester, 10. - 13. 10. (2004) DSuC3

  28. A. Schindler, T. Hänsel, F. Frost, A. Nickel, R. Fechner, B. Rauschenbach, ,
    Recent achievements on ion beam techniques for microoptics fabrication
    10th Microoptics Conference MOC 04, Jena, 1.-3.09. (2004) K-7

  29. R. Fechner, A. Schindler, D. Hirsch, T. Gase, R. Weigelt, M. Helgert,
    Fabrication of masters for an embossing Technology of diffractive optics and of sub-wavelength structures by RIBE proportional transfer
    10th Microoptics Conference MOC 04, Jena, 1.-3. 09. (2004) F-16

  30. F. Frost, R. Fechner, B. Ziberi, D. Flamm, A. Schindler,
    Large area smoothing of optical surfaces by low-energy ion beams
    Thin Solid Films 459 (2004) 100-105

  31. F. Frost, R. Fechner, D. Flamm, B. Ziberi, W. Frank, A. Schindler,
    Ion beam assisted smoothing of optical surfaces
    Appl. Phys. A 78 (2004) 651

  32. Axel Schindler, Thomas Hänsel, Frank Frost, Renate Fechner, Nasser Razek,
    Ionenstrahlvorbehandlung für die Nano-Oberflächentechnik
    Tagungsband Workshop Reinigung in der Nano-Oberflächentechnik (2003)

  33. A. Schindler, T. Hänsel, F. Frost, R. Fechner, G. Seidenkranz, A. Nickel, H.-J. Thomas, H. Neumann, D. Hirsch, R. Schwabe,
    Ion beam finishing technology for high precision optics fabrication
    ODF2002, Tokyo, Optics Design Group of The Optical Society of Japan, Technical Digest AP0 (2002) PD05

  34. A. Schindler, T. Hänsel, F. Frost, R. Fechner, A. Nickel, H.-J. Thomas, H. Neumann, D. Hirsch, R. Schwabe, G. Seidenkranz, K. Barucki,
    Ion Beam Finishing Technology for High Precision Optics Production
    OSA Technical Digest (Optical Society of America, Washington DC, 2002) (2002) 64 - 66

  35. A. Schindler, T. Hänsel, D. Flamm, W. Frank, G. Böhm, F. Frost R. Fechner, F. Bigl ,
    Ion beam and plasma jet etching for optical component fabrication
    Proceedings of SPIE Vol. 4440 4440 (2001) 217

  36. R. Fechner, A. Schindler, T. Haensel, F. Bigl ,
    Sub-nanometer polishing of optical surfaces by Ion beam planarization technique
    Precision Science and Technology for Perfect Surfaces, eds. Y.Furukawa, Y. Mori & T. Kataoka , The Japan Society for Precision Engineering, Tokyo (Proc. of the 9th ICPE, Osaka/Japan, 29.08.-01.09.1999) (1999) 249-254

  37. K. Zimmer, A. Schindler, R. Fechner, F. Bigl ,
    Herstellung mikrooptischer Strukturen durch Laserbearbeitung und Ionenstrahlätzen
    Proc. 12. Int. Fachtagung Anwendung der Lasertechnik, Mittweida, Journal Univ. Technol. Econom. Electroanalysis II (1996) 79-85

  38. A. Schindler, T. Hänsel, A. Nickel, R. Fechner, H. Neumann, F. Bigl ,
    Broad ion beam processing of large surface areas with nanometer precision
    in: N. Ikawa etla. (Ed.) International Progress in Precision Engineering, Butherworth & Heinemann, Stoneham (1993) 88


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