Prof. Dr. Dr. h.c. Bernd Rauschenbach

Leibniz-Institut für Oberflächmodifizierung e. V.
Permoserstr. 15 / D-04318 / Leipzig /


Telefon: +49 (0)341 235 - 4039
Fax: +49 (0)341 235 - 2313

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Liste der Publikationen >>

  1. P.A. Atanasov, N.N. Nedyalkov, R. Nikov, N. Fukata, W. Jevasuwan, T.Subramani, D. Hirsch, B. Rauschenbach,
    SERS of insecticides and fungicides assisted by Au and Ag nanostructures produced by laser techniques
    Intern. J. of Environmental & Agriculture Research 3 (2017) 61-69

  2. Ru. G. Nikov, A. Og. Dikovska, N. N. Nedyalkov, P. A. Atanasov, G. Atanasova, D. Hirsch, B. Rauschenbach,
    ZnO nanostructures produced by pulsed laser deposition in open air
    Appl. Phys. A 123 (2017) 657

  3. A. Lotnyk, U. Ross, T. Dankwort, I. Hilmi, L. Kienle, B. Rauschenbach,
    Atomic structure and dynmamic reconfiguration of layered defects in van der Waals layered Ge-Sb-Te based materials
    Acta Materialia 141 (2017) 92-96

  4. A. Lotnyk, I. Hilmi, U. Ross, B. Rauschenbach,
    Van der Waals interfacial bonding and intermixning in GeTe-Sb2Te3-based superlattices
    Nano Research 10 (2017)

  5. N. Nedyalkov, A. Dikovska, R. Nikov, P. Atanasov, G. Sliwinski, D. Hirsch, B. Rauschenbach,
    Laser-induced nanoparticle fabrication on paper
    Appl. Phys. A 125 (2017) 570-577

  6. S. Liedtke, Ch. Grüner, A. Lotnyk, B. Rauschenbach,
    Glancing angle deposition of sculptured thinmetal films at room temperature
    Nanotechnology 28 (2017) 1-7

  7. B. Rauschenbach, A. Lotnyk, L. Neumann, D. Poppitz, J.W. Gerlach,
    Ion beam assisted deposition of thin epitaxial GaN films
    Materials 10 (2017) 690-702

  8. J.W. Gerlach, P. Schumacher, M. Mensing, S. Rauschenbach, I. Cermak, B. Rauschenbach,
    Ion mass and energy selective hyperthermal ion-beam assisted deposition setup
    Rev. Sci. Instrum. 88 (2017) 063306

  9. J. Lehnert, D. Spemann, M. Hamza Hatahet, St. Mändl, M. Mensing, A. Finzel, A. Varga, B. Rauschenbach,
    Graphene on silicon dioxide synthesized using carbon ion implantation in copper foils with PMMA-free transfer
    Appl. Phys. Lett. 110 (2017) 233114

  10. I. Hilmi, A. Lotnyk, J.W. Gerlach, P. Schumacher, B. Rauschenbach,
    Van-der-Waals epitaxy of layered chalcogenide Sb2Te3 thin films grown by pulsed laser deposition
    APL Materials 5 (2017) 050701

  11. X. Sun, A. Lotnyk, M. Ehrhardt, J. W. Gerlach, B. Rauschenbach,
    Realization of Multi-level States in Phase-Change Thin Films by Fast Laser Pulse Irradiation
    Adv. Opt. Mater. 1700169 (2017) 1-9

  12. P. Schumacher*, S. G. Mayr, B. Rauschenbach,
    Topography evolution of germanium thin films synthesized by pulsed laser deposition
    AIP Advances 7 (2017) 045115

  13. S. K. Srivastava, C. Grüner, D. Hirsch, B. Rauschenbach, I. Abdulhalim,
    Enhanced intrinsic fluorescence from carboxidized nano-sculptured thin films of silver and their application for label free dual detection of glycated hemoglobin
    Opt. Express 25 (2017) 4761-4772

  14. D. Manova, S. Mändl, H. Neumann, B. Rauschenbach,
    Formation of Metastable Diffusion Layers in Cr-containing Iron, Cobalt and Nickel Alloys after Nitrogen Insertion
    Surf. Coat. Tech. 312 (2017) 81-90

  15. I. Hilmi, A. Lotnyk, J. W. Gerlach, P. Schumacher, B. Rauschenbach,
    Epitaxial formation of cubic and trigonal Ge-Sb-Te thin films with heterogeneous vacancy structures
    Mater. Design 115 (2017) 138-146

  16. A. Lotnyk, U. Ross, I. Hilmi, X. Sun, B. Rauschenbach,
    Formation and direct imaging of heterogeneous vacancy structures in cubic Ge2Sb2Te5 crystal lattices
    Paper Nr. 4.5, European Phase Change and Ovonic Symposium, Cambridge, UK, 04.-06.09. (2016) 86-87

  17. A. Lotnyk, U. Ross, S. Bernütz, E. Thelander, B. Rauschenbach ,
    Evaluation of local atomic arrangements and lattice distortions in layered Ge-Sb-Te crystal structures
    Paper Nr. 6108, The 16th European Microscopy Congress, Lyon, France, 28.08.-02.09. (2016)

  18. A. Lotnyk, S. Bernütz, X. Sun, U. Ross, M. Ehrhardt, B. Rauschenbach,
    Electron beam induced in situ writing and recovering of vacancy layers in Ge2Sb2Te5 crystal lattice
    Paper Nr. 6242, The 16th European Microscopy Congress, Lyon, France, 28.08-02.09 (2016)

  19. U. Ross, A. Lotnyk, E. Thelander, B. Rauschenbach,
    Real structure of highly oriented Ge-Sb-Te thin films investigated by Cs-corrected STEM
    Paper Nr. 6711, The 16th European Microscopy Congress, Lyon, France, 228.08-02.09 (2016)

  20. I. Hilmi, E. Thelander, P. Schumacher, J. W. Gerlach, B. Rauschenbach ,
    Epitaxial Ge2Sb2Te5 Films on Si(111) prepared by pulsed laser deposition
    Thin Solid Films 619 (2016) 81-85,10.1016/j.tsf.2016.

  21. S. Liedtke*, Ch. Grüner, M. Mensing, J.W. Gerlach, B. Rauschenbach,
    Metallic Nanostructures Prepared by Glancing Angle Deposition
    EUROPEAN CONFERENCE ON NANOFILMS, Bilbao, Spain, 19.-21.10. (2016) 116-117

  22. B. Rauschenbach, F. Frost,
    Constructive and destructive routes to prepare nanostructures on surfaces by low-energy ion beam sputtering
    Proceed. SPIE (Eds. A. Lakhtakia, T.G. Mackay, M. Suzuki) 9929 (2016)

  23. A. Lotnyk, U. Ross, S. bernütz, E. Thelander, B. Rauschenbach,
    Local atomic arrangements and lattice distortions in layered G-Sb-Te crystal structures
    Scientific Reports 6 (2016) 26724-26736

  24. X. Sun, M. Ehrhardt, A. Lotnyk, P. Lorenz, E. Thelander, J. W. Gerlach, T. Smausz, U. Decker, B. Rauschenbach,
    Crystallization of Ge2Sb2Te5 thin films by nano- and femtosecond single laser pulse irradiation
    Sci. Rep. 6 (2016) 28246

  25. D. Manova, A. Lotnyk, S. Mändl, H. Neumann, B. Rauschenbach,
    CrN Precipitation and Elemental Segregation During the Decay of Expanded Austenite
    Mater. Res. Express 3 (2016) 066502

  26. R.G. Nikov, N.N. Nedyalkov, P.A. Atanasov, D. Hirsch, B. Rauschenbach, K. Grochowska, G. Sliwinski,
    Characterization of Ag nanostructures fabricated by laser-induced dewetting of thin films
    Appl. Surf. Sci. 374 (2016) 36-41

  27. A. Lotnyk, U. Ross, S. Bernütz, E. Thelander, B. Rauschenbach,
    Local atomic arrangements and lattice distortions in layered Ge-Sb-Te crystal structures
    Sci. Rep. 6 (2016) 26724

  28. P. A. Atanasov, N. E. Stankova, N. N. Nedyalkov, N. Fukata, D. Hirsch, B. Rauschenbach, S. Amoruso, X. Wang, K. N. Kolev, E. I. Valova, J. S Georgieva, S. A. Armyanov,
    Fs-laser processing of medical grade polydimethylsiloxane (PDMS)
    Appl. Surf. Sci. 374 (2016) 229-234

  29. U. Ross, A. Lotnyk, E. Thelander, B. Rauschenbach,
    Microstructure evolution in pulsed laser deposited epitaxial Ge-Sb-Te chalcogenide thin films
    Journal of Alloys and Compounds 676 (2016) 582-590

  30. P.A. Atanasov, N.E. Stankova, N.N. Nedyalkov, T.R. Stoyanchov, Ru G. Nikov, N. Fukata, J.W. Gerlach, D. Hirsch, B. Rauschenbach,
    Properties of ns-laser processed polydimethylsiloxane (PDMS)
    J. Phys. Conf. Ser. 700 (2016) 012023

  31. A. Lotnyk, S. Bernütz, X. Sun, U. Ross, M. Ehrhardt, B. Rauschenbach,
    Real-space imaging of atomic arrangement and vacancy layersordering in laser crystallised Ge2Sb2Te5 phase change thin films
    Acta Materialia 105 (2016) 1-8

  32. M.E. Koleva, N.N. Nedyalkov, P.A. Atanasov, J.W. Gerlach, D. Hirsch, A. Prager, B. Rauschenbach, N. Fukata, W. Jevasuwan,
    Porous plasmonic nanocomposites for SERS substrates fabricated bytwo-step laser method
    J. Alloy. Compd. 665 (2016) 282-287

  33. A. Lotnyk, S. Bernütz, U. Ross, X. Sun, E. Thelander, M. Ehrhardt, B. Rauschenbach,
    Atomic structure of Ge-Sb-Te thin films studied by high-resolution Cs-corrected STEM
    International Workshop on Advanced and In-situ Microscopies of Functional Nanomaterials and Devices, Hamburg/Germany, 8.-10.07. (2015) 44-45

  34. U. Roß, A. Lotnyk, E. Thelander, B. Rauschenbach ,
    High-resolution STEM investigation of textured and epitaxial Ge-Sb-Te thin films
    E\PCOS 2015, Amsterdam/Netherlands, 6.-8.09. (2015) 161-162

  35. D. Poppitz, A. Lotnyk, J. Gerlach, B. Rauschenbach ,
    Aberration-corrected STEM study of polar and non-polar epitaxial GaN thin films produced by ion-beam nitridation of Ga droplets on different substrate materials
    Paper Nr. MS2.P040, Microscopy Conference 2015, Göttingen/Germany, 6-11.09. (2015) 83-84

  36. A. Lotnyk, S. Bernütz, X. Sun, M. Ehrhardt, B. Rauschenbach,
    Atomic-resolution Cs-corrected STEM investigation of metastable Ge2Sb2Te5 phase change thin films
    Paper Nr. MS3.P057, Microscopy Conference 2015, Göttingen/Germany, 6.-11.09. (2015) 111-112

  37. U. Roß, A. Lotnyk, E. Thelander, B. Rauschenbach,
    Cs-corrected STEM characterisation of textured and epitaxial Ge-Sb-Te thin films
    Paper Nr. MS3.P066, Microscopy Conference 2015, Göttingen/Germany, 6-11.09. (2015) 127-128

  38. A. Lotnyk, D. Poppitz, U. Ross, J.W. Gerlach, F. Frost, S. Bernütz, E. Thelander, B. Rauschenbach,
    Focused high- and low-energy ion milling for TEM specimen preparation
    Microelectron. Reliab. 55 (2015) 2119-2125

  39. V. Baranwal, J.W. Gerlach, A. Lotnyk, B. Rauschenbach, H. Karl, S. Ojha, D.K.Avasthi, D. Kanjilal, A.C. Pandey,
    Embedded Ge nanocrystals in SiO2 synthesized by ion implantation
    J. Appl. Phys. 118 (2015) 134303

  40. X. Sun, E. Thelander, J.W. Gerlach, U. Decker, B. Rauschenbach,
    Crystallization kintics of GeTe phase-change thin films grown by pulsed laser deposition
    J. Phys. D Appl. Phys. 48 (2015) 295304

  41. S.K. Srivastava, H.B. Hamo, A. Kushmaro, R.S. Marks, Ch. Grüner, B. Rauschenbach, I. Abdulhalim,
    Highly sensitive and specific detection of E. coli by a SERS nanobiosensor chip utilizing metallic nanosculptured thin films
    Analyst 140 (2015) 3201-3209

  42. D. Poppitz, A. Lotnyk, J.W. Gerlach, J. Lenzner, M. Grundmann, B. Rauschenbach,
    An aberration-corrected STEM study of structural defects in epitaxial GaN thin films grown by ion beam assisted MBE
    MICRON 73 (2015) 1-8

  43. M.F. Sarmanova, H. Karl, S. Mändl, D. Hirsch, S.G. Mayr, B. Rauschenbach,
    Elastic properties of sub-stoichiometric nitrogen ion implanted silicon
    Nucl. Instrum. Meth. B 349 (2015) 169-172

  44. S. Srivastava, A. Shalabney, I. Khalaila, C. Grüner, B. Rauschenbach, and I. Abdulhalim,
    Highly sensitive SERS based nano-sculptured thin film biosensor for the detection of vitellogenin: an endocrine disruption biomarker
    Paper Nr. SeM3C.3, Optical Sensors 2014, Barcelona Spain, 27.-31. 7. (2014)

  45. E. Thelander, J. W. Gerlach, U. Ross, A. Lotnyk, B. Rauschenbach,
    Low temperature epitaxy of Ge-Sb-Te films on BaF2(111) by pulsed laser deposition
    Appl. Phys. Lett. 105 (2014) 221908

  46. E. Thelander, J.W. Gerlach, U. Ross, A. Lotnyk, B. Rauschenbach,
    Low-temperature epitaxy of Ge-Sb-Te films on BaF2 (111) by pulsed laser deposition
    Appl. Phys. Lett. 105 (2014) 221904

  47. U. Roß. A.Lotnyk, E. Thelander, B. Rauschenbach,
    Direct imaging of crystal structure and defects in metastable Ge2Sb2Te5 by quantitative aberration corrected STEM
    Appl. Phys. Lett. 104 (2014) 121904

  48. E. Thelander, J.W. Gerlach, U. Roß. F. Frost, B. Rauschenbach ,
    Epitaxial growth of Ge-Sb-Te films on KCl by high deposition rate pulsed laser deposition
    Journal of Applied Physics 115 (2014) 213504

  49. D. Manova, D. Hirsch, J.W. Gerlach, S. Mändl, H. Neumann, B. Rauschenbach,
    In-situ Investigation of Phase Formation During Low Energy Ion Nitriding of Ni80Cr20 Alloy
    Surf. Coat. Tech. 259 (2014) 434-441

  50. J. Buchwald, M. Sarmanova, B. Rauschenbach, S. G. Mayr,
    Nanometer-resolved mechanical properties around GaN crystal surface steps
    Beilstein J. Nanotechnol. 5 (2014) 2164-2170

  51. U. Ross, A. Lotnyk, E. Thelander, B. Rauschenbach,
    Quantitative structural and chemical investigation of amorphous and metastable crystalline phase-change alloy thin films by Cs-corrected STEM
    Paper Nr. ISBN 978-80-260-6721-4, IMC 18 Proceedings edited by Pavel Hozak, Prague, Czech Republic (2014) MS-3-O-1956

  52. A. Lotnyk, D. Poppitz, J.W. Gerlach, B. Rauschenbach,
    Imaging of light elements by annular dark-field Cs-corrected STEM
    Paper Nr. ISBN 978-80-260-6721-4, IMC 18 Proceedings edited by Pavel Hozak, Prague, Czech Republic (2014) IT-2-O-1555

  53. X. Sun, E. Thelander, P. Lorenz, J.W. Gerlach, U. Decker, B. Rauschenbach,
    Nanosecond laser-induced phase transitions in pulsed laser deposition-deposited GeTe films
    J. Appl. Phys. 116 (2014) 133501

  54. A. Finzel, J.W. Gerlach, J. Lorbeer, F. Frost, B. Rauschenbach,
    High-fluence hyperthermal ion irradiation of gallium nitride surfaces at elevated temperatures
    Appl. Surf. Sci. 317 (2014) 811-817

  55. A. Shalabney, I. Khalaila, Ch. Grüner, B. Rauschenbach, I. Abdulhalim,
    SERS biosensor using metallic nano-sculptured thin films for the detection of endocrine disrupting compound biomarker vitellogenin
    Small 10 (2014) 3579-3514

  56. D. Manova, S. Mändl, H. Neumann, B. Rauschenbach,
    Analysis of In Situ XRD Measurements for Low Energy Ion Beam Nitriding of Austenitic Stainless Steels
    Surf. Coat. Tech. 256 (2014) 64-72

  57. M. Teichmann, J. Lorbeer, F. Frost, B. Rauschenbach,
    Ripple coarsening on ion beam-eroded surfaces
    Nanoscale Res. Lett. 9 (2014) 439

  58. D. Manova, S. Mändl, J.W. Gerlach, D. Hirsch, H. Neumann, B. Rauschenbach,
    In situ X-Ray Diffraction Investigations during Low Energy Ion Nitriding of Austenitic Stainless Steel Grade 1.4571
    J. Phys. D Appl. Phys. 47 (2014) 365301

  59. A.M. Jakob, J. Buchwald, B. Rauschenbach, S.G. Mayr,
    Nanoscale-resolved elasticity: contact mechanics for quantitative contact resonance atomic force microscopy
    Nanoscale 6 (2014) 6898-6910

  60. R. Feder, C. Bundesmann, H. Neumann, B. Rauschenbach,
    Ion beam sputtering of germanium - Energy and angular distribution of sputtered and scattered particles
    Nucl. Instrum. Meth. B 334 (2014) 88-95

  61. E. Thelander, J.W. Gerlach, U. Ross, F. Frost, B. Rauschenbach,
    Epitaxial growth of Ge-Sb-Te films on KCl by high deposition rate pulsed laser deposition
    J. Appl. Phys. 115 (2014) 213504

  62. U. Ross, A. Lotnyk, E. Thelander, B. Rauschenbach,
    Direct imaging of crystal structure and defects in metastable Ge2Sb2Te5 by quantitative aberration-corrected scanning transmission electron microscopy
    Appl. Phys. Lett. 104 (2014) 121904

  63. A. Lotnyk, D. Poppitz, J.W. Gerlach, B. Rauschenbach,
    Direct imaging of light elements by annular dark-field aberration-corrected scanning transmission electron microscopy
    Appl. Phys. Lett. 104 (2014) 071908

  64. D. Poppitz, A. Lotnyk, J.W. Gerlach, B. Rauschenbach,
    Microstructure of porous gallium nitride nanowall networks
    ACTA MATER 65 (2014) 98-105

  65. R. Feder, F. Frost, H. Neumann, C. Bundesmann, B. Rauschenbach,
    Systematic investigations of low energy Ar ion beam sputtering of Si and Ag
    Nucl. Instrum. Meth. B 317 (2013) 137-142

  66. M. Teichmann, J. Lorbeer, B. Ziberi, F. Frost, B. Rauschenbach,
    Pattern formation on Ge by low energy ion beam erosion
    New J. Phys 15 (2013) 103029

  67. D. Poppitz, A. Lotnyk, J. Gerlach, B. Rauschenbach,
    Microstructure investigation of porous gallium-nitride thin films
    MC 2013 Proceedings (URN number: urn:nbn:de:bvb:355-epub-287343) ed. R. Rachel, Regensburg, Germany, 25.-30.8 (2013) 617-618

  68. U. Roß, A. Lotnyk, E. Thelander, B. Rauschenbach,
    Characterization of laser-deposited Ge-Sb-Te thin films by Cs corrected STEM
    MC 2013 Proceedings (URN number: urn:nbn:de:bvb:355-epub-287343) ed. R. Rachel, Regensburg, Germany, 25.-30.8 (2013) 435-436

  69. A. Lotnyk, D. Poppitz, J. Gerlach, B. Rauschenbach,
    Low-energy Ar+-polishing of FIB prepared GaN-SiC interfaces forCs-corrected STEM
    MC 2013 Proceedings (URN number: urn:nbn:de:bvb:355-epub-287343) ed. R. Rachel, Regensburg, Germany, 25.-30.8 (2013) 305-306

  70. R. Feder, C. Bundesmann, H. Neumann, B. Rauschenbach,
    Ion beam sputtering of Ag Angular and energetic distributions of sputtered and scattered particles
    Nucl. Instrum. Meth. B 316 (2013) 198 204

  71. B. Rauschenbach,
    Preparation of ion beam induced nanostructures on surface
    3rd Intern. Conference Nanomaterials: Applications and Properties, Alushta, 16.-21.09 (2013) Vol. 2, no. 1, pp. 01001-

  72. B. Rauschenbach,
    Entwicklungstrends für neuartige funktionelle Oberflächen
    Technik in Bayern 5 (2013)

  73. A. Shalabney, Ch. Khare, B. Rauschenbach, I. Abdulhalim,
    Metallic Nanosculptured thin films for biosensing applications using surface plasmon resonance and enhanced spectroscopies
    Proceed. IEEE 2013 (2013)

  74. B. Rauschenbach, Ch. Grüner, Ch. Khare,
    Ion beam sputtering induced nano-scluptured thin films
    Proceed. XXI. Intern. Conference'Ion-Surfce Interaction' , Jaroslavel, 22.-26.08. (2013) 233-238

  75. H. Lu, E. Thelander, J.W. Gerlach, U. Decker, B. Zhu, B. Rauschenbach,
    Single pulse laser-induced phase transitions of PLD-deposited Ge2Sb2Te5 films
    Adv. Funct. Mater. 23 (2013)

  76. S. Perlt, Th. Höche, J. Dadda, E. Müller, B. Rauschenbach,
    Compositional sensitivity of microstructures and thermoelectric properties of Ag1-xPb18Sb1-yTe20 compounds
    J. Electronic Mat. 42 (2013)

  77. B. Rauschenbach, Ch. Grüner,
    Glanzwinkeldeposition ein materialunabhängiges Verfahren zur Herstellung von Nanostrukturen
    Nanotechnologie aktuell 6 (2013) 68-73

  78. D. Manova, C. Günther, A. Bergmann, S. Mändl, H. Neumann, B. Rauschenbach,
    Influence of Temperature on Layer Growth as Measured by in-situ XRD Observation of Nitriding Austenitic Stainless Steel
    Nucl. Instrum. Meth. B 307 (2013) 310-314

  79. A. Jenichen, C. Engler, B. Rauschenbach,
    Comparison of wurzite and zinc-blende GaAs surfaces as possible nanowire side walls: DFT stability calculations
    Surf. Sci. 613 (2013) 74-79

  80. M. Mäder, Th. Höche, B. Rauschenbach,
    Non-periodic nanoscale templates by diffration mask projection laser ablation
    Phys. Status Solidi A 209 (2012) 2208-2211

  81. D. Manova, A. Bergmann, S. Mändl, H. Neumann, B. Rauschenbach,
    Integration of a broad beam ion source with a high-temperature x-ray diffraction vacuum chamber
    Rev. Sci. Instrum. 83 (2012) 113901

  82. J. Bauer, J. Weise, M. Khare, B. Rauschenbach,
    Ordered Si-Ge nanostructures by glancing angle deposition via ion beam sputtering
    Proceed. MRS Symp. 1329 (2012) 81-87

  83. E. Thelander, B. Rauschenbach,
    Influence of burst pulses on the film topography in picosecond pulsed laser deposition of LaALO3
    J. of Physics: Conference Series 356 (2012) 012015

  84. A. Shalabney, C. Khare, B. Rauschenbach, I. Abdulhalim,
    Detailed study of surface enhanced Raman scattering from metallic nano sculptured thin films and their potential for biosensing
    J. of Nanophotonics 6 (2012) 48-55

  85. C. Khare, J.W. Gerlach, C. Patzig, B. Rauschenbach,
    Ion beam sputter deposition of epitaxial Ag films on native oxide covered Si(100) substrates
    Appl. Surf. Sci. 258 (2012) 9617-9622

  86. C. Khare, J.W. Gerlach, T. Höche, B. Fuhrmann, H.S. Leipner, B. Rauschenbach,
    Effects of annealing on arrays of Ge nanocolumns formed by glancing angle deposition
    Appl. Surf. Sci. 258 (2012) 9762-9769

  87. H. Lu, E. Thelander, J.W. Gerlach, D. Hirsch, U. Decker, B. Rauschenbach ,
    Ge2Sb2Te5 phase-change films on polyimide substrates by laser deposition
    Appl. Phys. Lett. 101 (2012) 031905

  88. A. Karabchevsky, C. Khare, B. Rauschenbach, I. Abdulhalim,
    Microspot sensing based on surface enhanced fluorescence from nanosclptured thin films
    J. Nanophotonics 6 (2012) 061508

  89. J.W. Gerlach, T. Ivanov, L. Neumann, Th. Höche, D. Hirsch, B. Rauschenbach,
    Epitaxial GaN films by hyperthermal ion-beam nitridation of Ga droplets
    J. Appl. Phys. 111 (2012) 113521

  90. J. Bauer, M. Weise, B. Rauschenbach, N. Geyer B. Fuhrmann,
    Shape evolution in glancing angle deposition of arranged Germanium nonocolumns
    Journal of Applied Physics 111 (2012) 104309

  91. A.M. Jakob, M. Müller, B. Rauschenbach, S.G. Mayr,
    Nanoscale mechanical surface properties of single crystalline martensitic Ni-Mn-Ga ferromagnetic shape memory alloys
    New J. Phys 14 (2012) 033029

  92. L. Neumann, J.W. Gerlach, B. Rauschenbach,
    Initial stages of the ion-beam assisted epitaxial GaN film growth on 6H-SiC(0001)
    Thin Solid Films 520 (2012) 3936-3945

  93. C. Khare, R. Fechner J. Bauer, M. Weise, B. Rauschenbach,
    Glancing angle deposition of Ge nanorod arrays on Si patterend substrates
    J. Vac. Sci. Technol. A 29 (2011) 041503

  94. C. Khare, B. Fuhrmann, H.S. Leipner, J. bauer, B. Rauschenbach,
    Optimized growth of Ge nanorod arrays on Si patterns
    J. Vac. Sci. Technol. A 29 (2011) 051501

  95. C. Khare, B. Fuhrmann, H.S. Leipner, J. Bauer and B. Rauschenbach,
    Optimized growth of Ge nanorod arrays on Si patterns
    J. Vac. Sci. Technol. A 29(5) (2011) 051501

  96. C. Khare, R. Fechner, J. Bauer, M. Weise and B. Rauschenbach,
    Glancing angle deposition of Ge nanorod arrays on Si patterned substrates
    J. Vac. Sci. Technol. A 29(4) (2011) 041503

  97. A. Shalabney, C. Khare, B. Rauschenbach, I. Abdulhalim,
    Sensitivity of surface plasmon resonancesensors based on metallic columnar thin films in the spectral and angular interrogations
    Sensors and Actuators B: Chemical 159 (2011) 201-212

  98. O. Albercht, R. Zierold, S. Allende, J. Escrig, C. Patzig, B. Rauschenbach, K. Nielsch, D. Görlitz,
    Experimental evidence for an angular dependent transition of magnetization reversal modes in magnetic nanotubes
    J. of Applied Physics 109 (2011) 093910

  99. M. Cornejo, J. Völlner, B. Ziberi, F. Frost, B. Rauschenbach,
    Ion beam sputtering: A route for fabrication of highly ordered nanopattern
    in 'Fabrication and Characterization in the Micro-Nano Range', Eds. A. Fernando Lasagni und A. F. Lasagni (Springer Berlin Heidelberg, 2011) 10 (2011) 69-94

  100. C. Khare, J.W. Gerlach, M. Weise, J. Bauer, T. Höche, B. Rauschenbach ,
    Growth temperature altered morphology of Ge nanocolumns
    Phys. Status Solidi A 208 (2011) 851 - 856

  101. M. Cornejo, B. Ziberi, Ch. Meinecke, D. Hirsch, J. W. Gerlach, Th. Höche, F. Frost, B. Rauschenbach,
    Self-organized patterning on Si(001) by ion sputtering with simultaneous metal incorporation
    Appl. Phys. A 102 (2011) 593-599

  102. J. Völlner, B. Ziberi, F. Frost, B. Rauschenbach,
    Topography evolution mechanism on fused silica during low-energy ion beam sputtering
    J. Appl. Phys. 109 (2011) 043501

  103. J. Bauer, M. Weise, Ch. Grüner, Ch. Khare, B. Rauschenbach, N. Geyer, B. Fuhrmann,
    Glanzwinkeldeposition von geordneten Si/Ge-Nanostrukturen
    Jahresbericht IZM/MLU Halle (2010) 31

  104. C. Khare, C. Patzig, J.W. Gerlach, B. Rauschenbach, B. Fuhrmann,
    Influence of substrate temperature on glancing angle depositedAg nanorods
    J. Vac. Sci. Technol. A 28(4) (2010) 1002-1009

  105. R. Nagar, B.R. Metha,J.P. Singh, C. Patzig, B. Rauschenbach, D. Kanjilal,
    Enhancement of stiffness of vertically standing Si nanosprings by energetic ions
    J. Appl. Phys. 107 (2010) 094315

  106. O. Albrecht, R. Zierold, C. Patzig, J. Bachmann, C. Sturm, B. Rheinländer, M. Grundmann, D. Görlitz, B. Rauschenbach, K. Nielsch,
    Tubular magnetic nanostructures based on glancing angle deposited templates and atomic layer deposition
    Phys. Status Solidi B 247 (2010) 1365-1371

  107. M. Mäder, Th. Höche, J.W. Gerlach, R. Böhme, B. Rauschenbach,
    Nanostructures by diffraction mask projection laser ablation
    Phys. Status Solidi B 247 (2010) 1372-1383

  108. C. Patzig, C. Khare, B. Fuhrmann, B. Rauschenbach,
    periodically arranged Si nanostructures by glancing angle deposition on patterend substrates
    Phys. Status Solidi B 247 (2010) 1322-1334

  109. C. Patzig, A. Miessler, T. Karabacak, B. Rauschenbach,
    Arbitrarily shaped Si nanostructures by glancing angle ion beam deposition
    Phys. Status Solidi B 247 (2010) 1310-1321

  110. B. Rauschenbach, C. Patzig,
    Dünne Schichten durch Deposition unter streifenden Einfall
    Vakuum in Forschung und Praxis 22 (2010) 14-19

  111. M. Mäder, S. Perlt, Th. Höche, H. Hilmer, M. Grundmann, B. Rauschenbach,
    Gold nanostructure matrices by diffraction mask-projection laser ablation: extension to previously inaccessible substrates
    Nanotechnology 21 (2010) 175304

  112. R. Nagar, C. Patzig, B. Rauschenbach, B.R. Metha, J.P. Singh,
    Mechanical characteristics of Silicon nanostructures using force distance spectroscopy
    J. Nanosci. Nanotechnol. 10 (2010) 2994-3000

  113. M. Mäder; Th. Höche; J.W. Gerlach; S. Perlt; J. Dorfmüller; R. Vogelgesang; K. Kern; B. Rauschenbach,
    Plasmonic Activity of Large-Area Gold-Nanodot Arrays on Arbitrary Substrates
    Nano Letters 10 (2010) 47-51

  114. I. Gurrappa, D. Manova, J.W. Gerlach, S. Mändl, B. Rauschenbach,
    Effect of the Nitrogen Plasma Immersion Ion Implantation on High Temperature Oxidation of Titanium Alloy IMI 834
    J. Adv. Mater. 41 (2009) 40-51

  115. J. Völlner, B. Ziberi, F. Frost, B. Rauschenbach,
    Low-energy ion beam sputtering of pre-patterned fused silica surfaces
    Paper Nr. 1181-DD13-15, MRS Spring Meeting, San Francisco, USA, 13.-17.04. (2009)

  116. M. Cornejo, B. Ziberi, M. Tartz, H. Neumann, F. Frost, B. Rauschenbach,
    Importance of internal ion beam parameters on the self-organized pattern formation with low-energy broad beam ion sources
    Paper Nr. 1181-DD13-13, MRS Spring Meeting, San Francisco, USA, 13.-17.04. (2009)

  117. J.W. Gerlach, C. Patzig, W. Assmann, A. Bergmaier, Th. Höche, J. Zajadacz, R. Fechner, B. Rauschenbach,
    Swift heavy ion irradiation induced effects in Si/SiOx multi-layered films and nanostructures
    Paper Nr. 1181-DD04-01, MRS Spring Meeting, San Francisco, 13.-17.04. (2009)

  118. A. Shalabney, A. Lakhtakia, I. Abdulhalim, A. Lahav, C. Patzig, I. Hazek, A. Karabchevsky, B. Rauschenbach, F. Zhang, J. Xu,
    Surface plasmon resonance from metallic columnar thin films
    Photonics and Nanostructures Fundamentals and Applications 7 (2009) 176-185

  119. S. Rauschenbach, R. Vogelgesang, N. Malinowski, J.W. Gerlach, M. Benyoucef, G. Constantini, Z. Deng, N. Thontasen, K. Kern,
    Electrospray ion beam deposition: soft-landing and fragmentation of functional molecules at solid surfaces
    ACS NANO 3 (2009) 2901-2910

  120. C. Patzig, J. Zajadacz, K. Zimmer, R. Fechner, C. Khare, B. Rauschenbach,
    Patterning concept for sculptured nanostructures with arbitrary periods
    Appl. Phys. Lett. 95 (2009) 103107

  121. R. Nagar, C. Patzig, B. Rauschenbach, V. Sathe, D. Kanjilal, B.R. Metha, J.P. Singh,
    Ion beam induced anisotropic deformation of Si nanosprings
    J. Phys. D Appl. Phys. 42 (2009) 145404

  122. J.W. Gerlach, Th. Höche, L. Neumann, B. Rauschenbach,
    Ultra-thin titanium nitride film epitaxy with hyperthermal titanium ions
    Paper Nr. 406, 9th IEEE International Conference on Nanotechnology, Genua, 26.-30.07. (2009)

  123. R. Nagar, C. Patzig, B. Rauschenbach, V. Sathe, D. Kanjilal, B. R. Mehta, J. P. Singh ,
    Ion beam induced anisotropic deformation of Si nanosprings
    J. Phys. D Appl. Phys. 42 (2009) 145404

  124. J. Lutz, J.W. Gerlach, S. Mändl, B. Rauschenbach, J.K.N. Lindner, W. Assmann,
    Radiation Modified Oxide Growth in the System Ni-Ti-O
    Annual Report Maier-Leibnitz-Laboratorium für Kern- und Teilchenphysik der Ludwig-Maximilians-Universität München und der Technischen Universität München (MLL) 2008 (2009) 80

  125. B. Ziberi, M. Cornejo, F. Frost, B. Rauschenbach,
    Highly ordered nanopatterns on Ge and Si surfaces by ion beam sputtering
    J. Phys.: Condens. Matter 21 (2009) 224003

  126. W. Möller, B. Rauschenbach,
    Proceed. 16th International Conference on Ion Beam Modification of Materials, Dresden, 31 August - 5 September 2008
    Nucl. Instrum. Meth. B 267 (2009) 1217-1760

  127. I. Abdulhalim, A. Karabchevsky, C. Patzig, B. Rauschenbach, B. Fuhrmann, E. Eltzov, R. Marks, J. Xu, F. Zhang, A. Lakhtakia,
    Surface-enhanced flourescence from metal sculptured thin films with application to biosensing in water
    Appl. Phys. Lett. 94 (2009) 063106

  128. C. Patzig, B. Fuhrmann, H.S. Leipner, B. Rauschenbach,
    Si nanocolumns on nanosphere lithography templated substrates: effect of sphere size and substrate temperature
    J. Nanosci. Nanotechnol. 9 (2009) 1985-1991

  129. E. Schubert, F. Frost, H. Neumann, B. Rauschenbach, B. Fuhrmann, F. Heyroth, J. Rivory, B. Gallas, M. Schubert,
    Ion beam assisted growth of sculptured thin films: Structure alignment and optical fingerprints
    Advances in Solid State Physics 46 (2008) 297-308

  130. M. Mäder, J.W. Gerlach, Th. Höche, Ch. Czekalla, M. Lorenz, M. Grundmann, B. Rauschenbach,
    ZnO nanowall networks grown on DiMPLA pre-patterend thin gold films
    Phys. Stat. Sol. RRL 2 (2008) 200-202

  131. C. Patzig, T. Karabacak, B. Fuhrmann, B. Rauschenbach,
    Glancing angle sputter deposited nanostructures on rotating substrates: Experiments and simulations
    J. Appl. Phys. 104 (2008) 094318

  132. I. Abdulhalim, A. Karabchevsky, C. Patzig, B. Rauschenbach, B. Fuhrmann,
    Sensitivity enhancement of guided wave surface plasmon resonance sensors
    SPIE Proceed. 7041 (2008) 70410G

  133. X. Ou, R. Kögler, A. Mücklich, W. Skorupa, W. Möller, X. Wang, J.W. Gerlach, B. Rauschenbach,
    Efficient oxygen gettering in Si by coimplantation of hydrogen and helium
    Appl. Phys. Lett. 93 (2008) 161907

  134. K. Zimmer, R. Böhme, B. Rauschenbach,
    Local growth of aligned carbon nanotubes at surface sites irradiated by pulsed laser
    Physica E 40 (2008) 2223-2226

  135. F. Mei, K.M. Wu, Y. Pan, T. Han, C. Liu, J.W. Gerlach, B. Rauschenbach,
    Structural and optical properties of Cr-doped semi-insulating GaN epilayers
    Appl. Phys. Lett. 93 (2008) 113507

  136. C. Patzig, B. Rauschenbach,
    Temperature effect on the glancing angle deposition of Si sculptured thin films
    J. Vac. Sci. Technol. A 26 (2008) 881-886

  137. Yu.V. Trushin, D.V. Kulikov, K.L. Safonov, B. Rauschenbach,
    Kinetic equations and nanocrystal growth in molecular beam epitaxy methods
    Bulletin Russ. Academy Sci.: Physics 72 (2008) 937-940

  138. K. Zimmer, R. Böhme, B. Rauschenbach,
    Local growth of aligned carbon nanotubes at surface sites irradiated by pulsed laser
    Phys. E 40 (2008) 2223-2226

  139. V. Baranwal, A.C. Pandey, J.W. Gerlach, B. Rauschenbach, H. Karl, D. Kanjilal, D.K. Avasthi,
    Rapid thermal and swift heavy ion induced annealing of Co ion implanted GaN films
    J. Appl. Phys. 103 (2008) 124904

  140. Yu. V. Trushin, D. V. Kulikov, K. L. Safonov, J. W. Gerlach, Th. Höche, B. Rauschenbach,
    Atomic assembly during ion-beam assisted growth: Kinetic modeling
    J. Appl. Phys. 103 (2008) 114904

  141. F. Frost, B. Ziberi, A. Schindler, B. Rauschenbach ,
    Surface engineering with ion beams: from self-organized nanostructures to ultra-smooth surfaces
    Appl. Phys. A 91 (2008) 551-559

  142. B. Ziberi, F. Frost, M. Tartz, H. Neumann, B. Rauschenbach,
    Ripple rotation, pattern transitions, and long range ordered dots on silicon by ion beam erosion
    Appl. Phys. Lett. 92 (2008) 063102

  143. Th. Höche, F. Ulmer and B. Rauschenbach,
    Pulsed Laser Deposition using Femtosecond Laser Radiation
    J Laser Micro/Nanoengineering 3 (2008) 41-45

  144. M. Mäder, K. Zimmer, R. Böhme, Th. Höche, J.W. Gerlach, B. Rauschenbach,
    Nano-Patterning by Diffraction Mask-Projection Laser Ablation
    J Laser Micro/Nanoengineering 3 (2008) 9-13

  145. M. Mäder, T. Höche, J. W. Gerlach, R. Böhme, K. Zimmer, B. Rauschenbach,
    Large area metal dot matrices made by diffraction mask projection laser ablation
    Phys. Stat. Sol. (RRL) 2 No. 1 (2008) 34-36

  146. E. Schubert, F. Frost, H. Neumann, B. Rauschenbach, B. Fuhrmann, F. Heyroth, J. Rivory, E. Charron, B. Gallas, M. Schubert,
    Ion Beam Assisted Growth of Sculptured Thin Films: Structure Alignment and Optical Fingerprints
    Advances in Solid State Physics 46 (2007) 309-320

  147. D. Manova, D. Hirsch, E. Richter, S. Mändl, H. Neumann, B. Rauschenbach,
    Microstructure of Nitrogen Implanted Stainless Steel after Wear Experiments
    Surf. Coat. Tech. 201 (2007) 8329 8333

  148. K. Zimmer, R. Bohme, D. Ruthe, B. Rauschenbach,
    Stimulation of the local growth of aligned carbon nanotubes by pulse laser exposure of the substrate
    Appl. Surf. Sci. 253 (2007) 7707-7710

  149. Y. Bohne, D. Manova, S. Mändl, H. Neumann, B. Rauschenbach ,
    Influence of Microstructure on Nitrogen Diffusion in Fe-Cr-Ni Thin Films
    Plasma Process. Polym. 4 (2007) S660 S663

  150. C. Patzig, B. Rauschenbach, W. Erfurth, A. Milenin,
    Ordered silicon nanostructures by ion beam induced glancing angle deposition
    J. Vac. Sci. Technol. B 25(3) (2007) 833-838

  151. K. Zimmer, R. Böhme, D. Ruthe, Th. Rudolph, B. Rauschenbach,
    Local growth of vertical aligned carbon nanotubes by laser-induced surface modification of coated silicon substrates
    J. Phys. Conference Series 59 (2007) 318-321

  152. K. Zimmer, R. Böhme, D. Ruthe, B. Rauschenbach,
    The influence of laser-induced surface modifications on the backside etching process
    Appl. Surf. Sci. 253 (2007) 6588-6594

  153. N. Razek, A. Schindler and B. Rauschenbach,
    Ultra-high vacuum direct bonding of a pn junction GaAs wafer using low-energy hydrogen ion beam surface cleaning
    Vacuum 81 (2007) 974-978

  154. D. Manova, E. Richter, I.-M. Eichentopf, S. Heinrich, S. Mändl, H. Neumann, B. Rauschenbach,
    Interplay of Cold Working and Nitrogen Diffusion in Austenitic Stainless Steel
    Nucl. Instrum. Meth. B 257 (2007) 442-446

  155. J.W. Gerlach, A. Hofmann, T. Höche, B. Rauschenbach,
    Control of the crystalline quality of wurtzitic GaN films deposited on gamma-LiAlO2 by ion beam assisted molecular beam epitaxy
    Nucl. Instrum. Meth. B 257 (2007) 315-319

  156. D. Manova, S. Mändl, B. Rauschenbach,
    Incident Ion Fluence Gradients on the Frontside and Backside of Flat Samples
    Surf. Coat. Tech. 201 (2007) 6593-6596

  157. D. Manova, S. Mändl, H. Neumann, B. Rauschenbach ,
    Influence of Grain Size on Nitrogen Diffusivity in Austenitic Stainless Steel
    Surf. Coat. Tech. 201 (2007) 6686-6689

  158. K. Zimmer, R. Böhme, B. Rauschenbach,
    Using IR laser radiation for backside etching of fused silica
    Appl. Phys. A 86 (2007) 409-414

  159. K. Zimmer, R. Böhme, B. Rauschenbach,
    Enhancing the etch rate at backside etching of fused silica
    Journal of Laser Micro/Nanoengineering 1 (2006) 292-296

  160. R. Böhme, K. Zimmer, D. Ruthe, B. Rauschenbach,
    Backside etching at the interface to diluted medium with nanometer etch rates
    Journal of Laser Micro/Nanoengineering 1 (2006) 190-194

  161. E. Schubert, J. Fahlteich, B. Rauschenbach, M. Schubert, M. Lorenz, M. Grundmann, G. Wagner,
    Recrystallization behavior in chiral sculptured thin films from silicon
    J. Appl. Phys. 100 (2006) 016107

  162. I. Gurrappa, D. Manova, J.W. Gerlach, S. Mändl, B. Rauschenbach,
    Effect of plasma immersion ion implantation and deposition on high temperature oxidation of titanium alloy IMI 834-aluminizing
    Journal of Alloys and Compounds 426 (2006) 375 - 383

  163. K. Zimmer, R. Bohme, S. Pissadakis, L. Hartwig, G. Reisse, B. Rauschenbach,
    Backside etching of fused silica with Nd:YAG laser
    Appl. Surf. Sci. 253 (2006) 2796-2800

  164. I. Gurrappa, D. Manova, J.W. Gerlach, S. Mändl, B. Rauschenbach,
    Influence of nitrogen implantation on the high temperature oxidation of titanium-base alloys
    Surf. Coat. Tech. 201 (2006) 3536 - 3546

  165. D. Ruthe, K. Zimmer, T. Höche, B. Rauschenbach,
    Strukturierung und Modifizierung dünner Schichten mit ultrakurzen Pulsen für elektronische Anwendungen
    18th International Scientific Conference Mittweida, Mittweida, 09.-11.11. (2006) 108-111

  166. K.Zimmer, R. Böhme, D. Ruthe, B. Rauschenbach,
    Laserätzen an der Rückseite transparenter Materialien - Stand und weitere Entwicklungen
    18th International Scientific Conference Mittweida, Mittweida, 09.-11. Nov. (2006) 35-40

  167. K. Zimmer, R. Böhme, D. Hirsch, B. Rauschenbach,
    Backside etching of fused silica with UV laser pulses using mercury
    J. Phys. D Appl. Phys. 39 (2006) 4651-4655

  168. Th. Höche, R. Böhme, J.W. Gerlach, B. Rauschenbach, F. Syrowatka,
    Excimer-Laser Synthesis of Nanosized Gold-Dot Patterns
    PHIL MAG LETT 86 (2006) 661-667

  169. B. Ziberi, F. Frost, B. Rauschenbach,
    Self-organized dot patterns on Si surfaces during noble gas ion beam erosion
    Surf. Sci. 600 (2006) 3757

  170. D. Manova, I.-M. Eichentopf, D. Hirsch, S. Mändl, H. Neumann, B. Rauschenbach,
    Influence of Microstructure on Nitriding Properties of Stainless Steel
    IEEE Plasma Sci. 34 (2006) 1136-1140

  171. B. Ziberi, F. Frost, T. Höche, B. Rauschenbach,
    Ion-induced self-organized dot and ripple patterns on Si surfaces
    Vacuum 81 (2006) 155-159

  172. S. Mändl, Y. Bohne, J.W. Gerlach, W. Assmann, B. Rauschenbach,
    Complementary Information from RBS, ERDA and SIMS for Analysis of Modern Magnesium Alloys
    Nucl. Instrum. Meth. B 249 (2006) 297-301

  173. K. Zimmer, R. Böhme, D. Ruthe, B. Rauschenbach,
    Backside laser etching of fused silica using liquid gallium
    Appl. Phys. A 84 (2006) 455-458

  174. B. Ziberi, F. Frost, B. Rauschenbach,
    Formation of large-area nanostructures on Si and Ge surfaces during low-energy ionbeam erosion
    J. Vac. Sci. Technol. A 24 (2006) 1344

  175. R. Böhme, K. Zimmer, B. Rauschenbach,
    Direct laser etching of transparent materials: High quality surface patterning and figuring for micro-optical applications
    Seventh International Conference on Correlation Optics, Proc. of SPIE 6254 (2006) 203-211

  176. J. Dienelt, H. Neumann, M. Kramer, F. Scholze, B. Rauschenbach, M. Nestler, A. Tarraf, M. Schulze,
    A new mask blank deposition tool
    Microelectronic Engineering 83 (2006) 718-722

  177. S. Mändl, A. Fleischer, D. Manova, B. Rauschenbach,
    Wear Behaviour of NiTi Shape Memory Alloy after Oxygen-PIII Treatment
    Surf. Coat. Tech. 200 (2006) 6225 - 6229

  178. Y. Bohne, D.M. Seeger, C. Blawert, W. Dietzel, S. Mändl, B. Rauschenbach ,
    Influence of Ion Energy on Properties of Mg Alloy Thin Films Formed by Ion Beam Sputter Deposition
    Surf. Coat. Tech. 200 (2006) 6527 6532

  179. D. Manova, S. Mändl, H. Neumann, B. Rauschenbach,
    Influence of Annealing Conditions on Ion Nitriding of Martensitic Stainless Steel
    Surf. Coat. Tech. 200 (2006) 6563 - 6567

  180. B. Ziberi, F. Frost, B. Rauschenbach,
    Pattern transitions on Ge surfaces during low-energy ion beam erosion
    Appl. Phys. Lett. 88 (2006) 173115

  181. E. Schubert, J. Fahlteich, Th. Höche, G. Wagner, B. Rauschenbach,
    Chiral silicon nanostructures
    Nucl. Instrum. Meth. B 244 (2006) 40-44

  182. J.W. Gerlach, A. Hofmann, T. Höche, F. Frost, B. Rauschenbach, G. Benndorf,
    High quality m-plane GaN films deposited on gamma-LiAlO2 by ion beam assisted molecular beam epitaxy
    Appl. Phys. Lett. 88 (2006) 011902

  183. R. Böhme, K. Zimmer, B. Rauschenbach,
    Laser backside etching of fused silica due to carbon layer ablation
    Appl. Phys. A 82 (2) (2006) 325-328

  184. S. Mändl, B. Rauschenbach,
    Formation of Transparent ZnO Layers by MePIIID
    Nucl. Instrum. Meth. B 242 (2006) 293-295

  185. D. Manova, G. Thorwarth, S. Mändl, H. Neumann, B. Stritzker, B. Rauschenbach,
    Variable Lattice Expansion in Martensitic Stainless Steel after Nitrogen Ion Implantation
    Nucl. Instrum. Meth. B 242 (2006) 285-288

  186. A. Schindler, B. Rauschenbach,
    Ultrapräzisions-Formgebung und Glättung im Nanometerbereich
    Industrie Management 21 (2005) 49-52

  187. B. Ziberi, F. Frost, Th. Höche, B. Rauschenbach,
    Ripple pattern formation on silicon surfaces by low-energy ion-beam erosion: Experiment and theory
    Phys. Rev. B 72 (2005) 235310

  188. J.W. Gerlach, Y. Bohne, S. Mändl, B. Rauschenbach, W. Assmann, F. Grüner, M. Schubert,
    Enrichment Effects During Ion Beam Sputter Deposition of Mg Alloys
    Jahresbericht 2004, Beschleunigerlabor Garching (2005) 65

  189. B. Rauschenbach,
    Low-energy ion bombardment induced nanostructures on surfaces
    Proceed. 17th Intern. Conf. Ion-Surface Interactions, Moskau (2005) 42-47

  190. D. Manova, Y. Bohne, J.W. Gerlach, S. Mändl, H. Neumann, B. Rauschenbach,
    Phase formation after nitrogen implantation into molybdenum
    Nucl. Instrum. Meth. B 240 (2005) 208-213

  191. E. Eiper, A. Hofmann, J.W. Gerlach, B. Rauschenbach, J. Keckes,
    Anisotropic intrinsic and extrinsic stresses in epitaxial wurtzitic GaN thin film on gamma-LiAlO2(100)
    J. Cryst. Growth 284 (2005) 561

  192. A. Schindler, T. Hänsel, F. Frost, G. Böhm, W. Frank, A. Nickel, Th. Arnold, R. Schwabe, S. Gürtler, S. Görsch, B. Rauschenbach,
    Modern Methods of Highly Precise Figuring and Polishing
    Glass Science and Technology 78 (Suppl. C) (2005) 111

  193. B. Ziberi, F. Frost, B. Rauschenbach, T. Höche,
    Highly ordered self-organized dot patterns on Si surfaces by low-energy ion beam erosion
    Appl. Phys. Lett. 87 (2005) 033113

  194. S. Mändl, G. Thorwarth, B. Stritzker, B. Rauschenbach, ,
    Two-dimensional Texture and Sheath Evolution in Metal Plasma Immersion Ion Implantation,
    Surf. Coat. Tech. 200 (2005) 589-593

  195. S. Mändl, J.W. Gerlach, B. Rauschenbach ,
    Nitride Formation in Transition Metals During High Fluence High Temperature Implantation,
    Surf. Coat. Tech. 200 (2005) 584-588

  196. D. Manova, S. Mändl, H. Neumann, B. Rauschenbach, ,
    Wear Behaviour of Martensitic Stainless Steels after PIII Surface Treatment,
    Surf. Coat. Tech. 200 (2005) 137-140

  197. S. Mändl, D. Manova, H. Neumann, M.T. Pham, E. Richter, B. Rauschenbach, ,
    Correlation Between PIII Nitriding Parameters and Corrosion Behaviour of Austenitic Stainless Steels,
    Surf. Coat. Tech. 200 (2005) 104-108

  198. E. Schubert, T. Höche, F. Frost, B. Rauschenbach,
    Nanostructure fabrication by glancing angle ion beam assisted deposition of silicon
    Appl. Phys. A online (2005) 1-6

  199. E. Schubert, F. Frost, B. Ziberi, G. Wagner, H. Neumann, B. Rauschenbach,
    Ion beam sputter deposition of soft x-ray Mo/Si multilayer mirrors
    J. Vac. Sci. Technol. B 23 (2005) 959-965

  200. S. Mändl, J.W. Gerlach, B. Rauschenbach,
    Surface Modification of NiTi for Orthopaedic Braces by Plasma Immersion Ion Implantation
    Surf. Coat. Tech. 196 (2005) 293-297

  201. S. Mändl, W. Attenberger, B. Stritzker, B. Rauschenbach,
    Disorder Formation in Rutile During Ion Assisted Deposition
    Surf. Coat. Tech. 196 (2005) 76-80

  202. D.M. Seeger, C. Blawert, W. Dietzel, Y. Bohne, S. Mändl, B. Rauschenbach,
    Comparison of As-Cast and Plasma Deposited Commercial Magnesium Alloys
    Magnesium Technologie 2005, Edited by Neelameggham, H.I. Kaplan and B.R. Powell, TMS (The Minerals, Metals & Materials Society) (2005) 323-328

  203. S. Mändl, B. Fritzsche, D. Manova, D. Hirsch, H. Neumann, E. Richter, B. Rauschenbach,
    Wear Reduction in AISI 630 Martensitic Stainless Steel after Energetic Nitrogen Ion Implantation
    Surf. Coat. Tech. 195 (2005) 258-263

  204. J. Dienelt, K. Zimmer, J. von Sonntag, B. Rauschenbach, C. Bundesmann,
    Roughness and damage of a GaAs surface after chemically assisted ion beam etching with Cl2/Ar+
    Microelectron Eng 78-79 (2005) 457-463

  205. K. Zimmer, R. Böhme, B. Rauschenbach,
    Adsorbed layer etching of fused silica by excimer laser with nanometer depth precision
    Microelectron. Eng. 78-79 (2005) 324-330

  206. B. Ziberi, F. Frost, B. Rauschenbach,
    Dot pattern formation on Si surfaces by low-energy ion beam erosion
    MRS Proceedings Vol. 849 (2005) KK 6.2

  207. A. Schindler, F. Frost, A. Nickel, T. Hänsel, B. Rauschenbach,
    Ion beam smoothing of surfaces
    1st Vienna Intern. Conf. on Mico- and Nano-Technology , Wien, 9.-11.3. (2005) 367-374

  208. S. Mändl, D. Manova, D. Hirsch, H. Neumann, B. Rauschenbach,
    Comparison of Hardness Enhancement and Wear Mechanisms in Low Temperature Nitrided Austenitic and Martensitic Stainless Steel
    Mater. Res. Soc. Symp. Proc. 843 (2005) T3.9.1-T3.9.5

  209. R. Böhme, J. Zajadacz, K. Zimmer, B. Rauschenbach,
    Topography and roughness evolution of microstructured surfaces at laser-induced backside wet etching
    Appl. Phys. A 80 (2005) 433-438

  210. E. Schubert, N. Razek, F. Frost, A. Schindler, B. Rauschenbach,
    GaAs surface cleaning by low-energy hydrogen ion bombardment at moderate temperatures
    J. Appl. Phys. 97 (2005) 023511-1-8

  211. E. Schubert, S. Mändl, H. Neumann, B. Rauschenbach,
    Real-time in situ spectroscopic ellipsometry investigation of the amorphous to crystalline phase transition in Mo single layers
    Appl. Phys. A 80 (2005) 47-50

  212. A. Schindler, T. Hänsel, F. Frost, A. Nickel, R. Fechner, B. Rauschenbach,
    Recent achievements on ion beam techniques for optic fabrication
    Conference on Optical Fabrication and Testing, Optical Society of America - OSA, Rochester, 10. - 13. 10. (2004) OMD3

  213. Y. Bohne, N. Shevchenko, F. Prokert, J. von Borany, B. Rauschenbach, W. Möller,
    In situ X-ray diffraction investigations during high-energy oxygen ion implantation in tramsition metals
    Vacuum 76 (2004) 281-285

  214. D. Manova, W. Attenberger, S. Mändl, B. Stritzker, B. Rauschenbach,
    Evolution of Local Texture and Grain Morphology in Metal Plasma Immersion Ion Implantation and Deposition
    J. Vac. Sci. Technol. A 22 (2004) 2299-2305

  215. J. Dienelt, J. von Sonntag, K. Zimmer, B. Rauschenbach,
    Structuring of GaAs. I. Chemical dry etching: Temperature und chlorine pressure dependence of etch rates
    J. Vac. Sci. Technol. B 22(4) (2004) 1964-1969

  216. A. Schindler, T. Hänsel, F. Frost, A. Nickel, R. Fechner, B. Rauschenbach, ,
    Recent achievements on ion beam techniques for microoptics fabrication
    10th Microoptics Conference MOC 04, Jena, 1.-3.09. (2004) K-7

  217. K. Zimmer, R. Böhme, B. Rauschenbach,
    Laser etching of fused silica using an adsorbed toluene layer
    Appl. Phys. A 79 (2004) 1883-1885

  218. T. Höche, R. Böhme, J. W. Gerlach, F. Frost, K. Zimmer, B. Rauschenbach,
    Semiconductor Nanowires Prepared by Diffraction-Mask-Projection Excimer-Laser Patterning
    Nano Letters 4 (2004) 895-897

  219. J.W. Gerlach, T. Höche, F. Frost, B. Rauschenbach,
    Ion beam assisted MBE of GaN on epitaxial TiN films
    Thin Solid Films 459 (2004) 13-16

  220. S. Mändl, B. Rauschenbach,
    Comparison of Expanded Austenite and Expanded Martensite Formed After Nitrogen PIII
    Surf. Coat. Tech. 186 (2004) 277-281

  221. S. Mändl, D. Manova, B. Rauschenbach,
    Transparent AlN Layers Formed by Metal Plasma Immersion Ion Implantation
    Surf. Coat. Tech. 186 (2004) 82-87

  222. D. Manova, F. Scholze, S. Mändl, H. Neumann, B. Rauschenbach,
    Absolute Dose Calibration in PIII
    Surf. Coat. Tech. 186 (2004) 29-33

  223. D. Manova, H. Neumann, S. Mändl, B. Rauschenbach,
    Three-Dimensional Effects for Two-Dimensional Samples in Plasma Immersion Ion Implantation
    J. Appl. Phys. 96 (2004) 934-936

  224. S. Sienz, J.W. Gerlach, T. Höche, A. Sidorenko, B. Rauschenbach,
    Ion-beam-assisted molecular-beam epitaxy: a method to deposit gallium nitride films with high crystalline quality
    Thin Solid Films 458(1-2) (2004) 63-66

  225. B. Ziberi, F. Frost, M. Tartz, H. Neumann, B. Rauschenbach,
    Importance of ion beam parameters on self-organized pattern formation on semiconductor surfaces by ion beam erosion
    Thin Solid Films 459 (2004) 106-110

  226. D. Manova, S. Mändl, B. Rauschenbach,
    Evolution of Surface Morphology During Ion Nitriding of Aluminium
    Surf. Coat. Tech. 180/181 (2004) 118-121

  227. S. Mändl, D. Manova, J.W. Gerlach, W. Assmann, H. Neumann, B. Rauschenbach,
    High Temperature Nitrogen PIII into Molybdenum
    Surf. Coat. Tech. 180/181 (2004) 362-366

  228. S. Sienz, J.W. Gerlach, T. Höche, A. Sidorenko, T. G. Mayerhöfer, G. Benndorf, B. Rauschenbach,
    Comparison of ion-beam-assisted molecular beam epitaxy withconventional molecular beam epitaxy of thin hexagonalgallium nitride films
    J. Cryst. Growth 264/1-3 (2004) 184-191

  229. F. Frost, B. Ziberi, T. Höche, B. Rauschenbach,
    The shape and ordering of self-organized nanostructures by ion sputtering
    Nucl. Instrum. Meth. B 216 (2004) 9-19

  230. J. Keckes, S. Six, J.W. Gerlach, B. Rauschenbach,
    Temperature dependence of in-plane stresses in sublayers of Al/AlN/Al2O3(0001) structure
    J. Cryst. Growth 262 (2004) 119-123

  231. S. Mändl, B. Rauschenbach,
    Formation of Wear Resistant Steel Surfaces by Plasma Immersion Ion Implantation
    AIP Conference Proceedings 680: 17th Int. Conf. on Application of Accelerators in Research and Industry 680 (2003) 635-638

  232. S. Mändl, B. Rauschenbach,
    Plasma Stream Homogeneity During Metal Plasma Immersion Ion Implantation & Deposition
    IEEE Trans. Plasma Science 31 (2003) 968-972

  233. J. Keckes, A. Wenzel, J.W. Gerlach, B. Rauschenbach,
    Annealing of the radiation damage in Mg-implanted GaN thin films: Temperature development of lattice parameters and stresses
    Nucl. Instrum. Meth. B 211 (2003) 519-523

  234. B. Rauschenbach, A. Schindler,
    Sandstrahler in der Nanowelt
    Spektrum der Wissenschaft Oktober (2003) 81-82

  235. T. Chassé, H. Neumann, B. Ocker, M. Scherer, W. Frank, F. Frost, D. Hirsch, A. Schindler, G. Wagner, M. Lorenz, G. Otto, M. Zeuner, B. Rauschenbach,
    Mo/Si-Multilayers for EUV-Lithography by Ion Beam Assisted Deposition
    Vacuum 71 (2003) 407

  236. S. Mändl, D. Manova, B. Rauschenbach,
    Interplay of Surface Adsorption and Preferential Sputtering in Metal Plasma Immersion Ion Implantation and Deposition
    Nucl. Instrum. Meth. B 206 (2003) 663-667

  237. P. Huber, D. Manova, S. Mändl, B. Rauschenbach,
    Formation of TiN, TiC and TiCN by MePIIID
    Surf. Coat. Technol. 174/175 (2003) 1243-1247

  238. S. Mändl, J.W. Gerlach, W. Assmann, B. Rauschenbach,
    Phase Formation and Diffusion After Nitrogen PIII in Molybdenum
    Surf. Coat. Technol. 174/175 (2003) 1238-1242

  239. S. Mändl, F. Scholze, H. Neumann, B. Rauschenbach,
    Nitrogen Diffusivity in Expanded Austenite
    Surf. Coat. Technol. 174/175 (2003) 1191-1195

  240. S. Mändl, D. Manova, H. Neumann, B. Rauschenbach,
    Textured Film Deposition Using Metals Ions From a Plasma
    Proc. XXVIth Int. Conf. on Phenomena in Ionized Gases 3 (2003) 185-186

  241. F. Frost, B. Rauschenbach ,
    Nanostructuring of solid surfaces by ion beam erosion
    Appl. Phys. A Mater. 77 (2003) 1-9

  242. T. Chassé, H. Neumann, B. Rauschenbach,
    Ion beam assisted deposition of multi-layer X-ray mirrors for the extreme ultraviolet lithography
    Nucl. Instrum. Meth. B 206 (2003) 377-381

  243. C. Hammerl, Y. Bohne, W. Assmann, K. Helming, B. Rauschenbach,
    Formation of buried oxide layers in titanium by high-fluence oxygen ion implantation
    Nucl. Instrum. Meth. B 206 (2003) 1072-1076

  244. B. Rauschenbach, S. Mändl,
    Plasma-sheath expansion around trenches in plasma immersion ion implantation
    Nucl. Instr. Meth. B 206 (2003) 803-807

  245. S. Mändl, J.W. Gerlach, B. Rauschenbach,
    Thickness of Ion Implanted Layers as Determined by Elastic Recoil Detection Analysis and Spectroscopic Ellipsometry
    Nucl. Instrum. Meth. B 206 (2003) 668-672

  246. S. Mändl, R. Sader, G. Thorwarth, D. Krause, H.-F. Zeilhofer, H.H. Horch, B. Rauschenbach,
    Biocompatibility of Titanium Based Implants Treated with Plasma Immersion Ion Implantation
    Nucl. Instrum. Meth. B 206 (2003) 517-521

  247. A. Köhler, J.W. Gerlach, T. Höche, T. Chassé, H. Neumann, W. Frank, G. Wagner and B. Rauschenbach,
    Mo-Si Interface Formation by Ion Beam Sputter Deposition
    Mat. Res. Soc. Symp. Proc. Vol. 749 (2003) W17.12.1-6

  248. D. Manova, W. Attenberger, S. Mändl, B. Stritzker, B. Rauschenbach,
    Aluminum diffusion and nitrogen sputter yield for nitrogen plasma immersion ion implantation into aluminum
    J. Vac. Sci. Technol. A 21 (2003) 643-648

  249. P. Huber, D. Manova, S. Mändl, B. Rauschenbach,
    Homogeneity of metal plasma immersion ion implantation and deposition
    Vacuum 69 (2003) 133-137

  250. B. Rauschenbach,
    Ion beam assisted deposition - a processing technique for preparing thin films for high-technology applications
    VACUUM 69 (2003) 3-10

  251. N. Razek, K. Otte, T. Chassè, D. Hirsch, A. Schindler, F. Frost, B. Rauschenbach,
    GaAs surface cleaning by low energy hydrogen ion beam treatment
    J. Vac. Sci. Technol. A 20 (2002) 1492-1497

  252. A. Kritschil, A. Kielburg, H. Witte, A. Krost, J. Christen, A. Wenzel, B. Rauschenbach,
    Electrical characterization of deep defect states in gallium nititde coimplanted with magnesium and sulfur ions
    Mater. Sci. Engng. B 93 (2002) 85-89

  253. J.W. Gerlach, S. Sienz, W. Attenberger, B. Rauschenbach,
    Competition of epitaxy and ion beam irradiation-determined texture during ion beam assisted deposition of gallium nitride films on r-plane sapphire
    phys. stat. sol (c) 1 (2002) 161-165

  254. S. Sienz, B. Rauschenbach, A. Wenzel, A. Lell, S. Bader, V. Härle,
    In-situ stress measurement during the ion implantation-induced doping of gallium nitride
    Thin Solid Films 415 (2002) 1-4

  255. S. Mändl, R. Sader, D. Krause, G. Thorwarth, H.-F. Zeilhofer, H.H. Horch, B. Rauschenbach,
    Investigation on Plasma Immersion Ion Implantation Treated Medical Implants
    Genet. Anal. Biomol. Eng. 19 (2002) 131-134

  256. S. Mändl, B. Rauschenbach,
    Plasma Stream Homogeneity During Metal Plasma Immersion Ion Implantation & Deposition
    Proc. XXth Int. Symp. on Discharges and Electrical Insulation in Vaccum, (IEEE Press, Piscataway, NJ, 2002) 1 (2002) 455-458

  257. S. Mändl, B. Rauschenbach,
    Improving the Biocompatibility of Medical Implants with Plasma Immersion Ion Implantation
    Surf. Coat. Technol. 156 (2002) 276-283

  258. S. Sienz, S. Mändl, B. Rauschenbach,
    In-Situ Stress Measurements During Low Energy Nitriding of Stainless Steel
    Surf. Coat. Technol. 156 (2002) 185-189

  259. P. Huber, D. Manova, S. Mändl, B. Rauschenbach,
    Lateral Texture Evolution During Formation of TiN by MePIIID
    Surf. Coat. Technol. 156 (2002) 176-181

  260. S. Mändl, B. Rauschenbach,
    Concentration Dependent Nitrogen Diffusion Coefficient in Expanded Austenite Formed by Ion Implantation
    J. Appl. Phys. 91 (2002) 9737-9742

  261. S. Mändl, D. Manova, B. Rauschenbach,
    Balancing Incident Heat and Ion Flow for Process Optimization in Plasma Based Ion Implantation
    J. Phys. D 35 (2002) 1141-1148

  262. S. Mändl, B. Stritzker, B. Rauschenbach, ,
    In-Situ Diffusion Measurements During RBS Analysis of Polymers Coated with Aluminium
    Nucl. Instrum. Meth. B 190 (2002) 728-731

  263. P. Huber, D. Manova, S. Mändl, B. Rauschenbach,
    Lateral Homogeneity Variation in Metal Plasma Immersion Ion Implantation and Deposition
    Surf. Coat. Technol. 151/152 (2002) 72-75

  264. D. Manova, P. Huber, S. Sienz, J.W. Gerlach, S. Mändl, B. Rauschenbach,
    Dependence of Ion Beam Induced Nitrogen Diffusion in Aluminum on Oxygen Contamination
    J. Vac. Sci. Technol. A 20 (2002) 206-213

  265. J. Keckes, S. Six, W. Tesch, R. Resel, B. Rauschenbach ,
    Evaluation of thermal and growth stresses in heteroepitaxial AIN thin films formed on (0 0 0 1) sapphire by pulsed laser ablation
    Jour. Of Crystal Growth 240 (2002) 80-86

  266. K. Zimmer, R. Böhme, A. Braun, B. Rauschenbach, F. Bigl ,
    Excimer laser-induced etching of sub-micron surface relief gratings in fused silica using phase grating projection
    Appl. Phys. A 74 (2002) 453-456

  267. A. Krtschil, A. Kielburg, H. Witte, J. Christen, A. Krost, A. Wenzel, B. Rauschenbach ,
    Electrical characterization of magnesium implanted gallium nitride
    Journal of App. Phy. 91 (2002) 178-182

  268. P. Huber, D. Manova, S. Mändl, B. Rauschenbach ,
    Lateral homogeneity variation in metal plasma immersion ion implantation and deposition
    Surf. Coat. Tech. 151-152 (2002) 355-358

  269. D. Manova, M. Schreck, B. Stritzker, B. Rauschenbach ,
    Orientation dependent sputter yield of aluminium
    Surf. Coat. Tech. 151-152 (2002) 72-75

  270. J.W. Gerlach. S. Sienz, W. Attenberger, B. Rauschenbach, ,
    Influence of defects in low-energy nitrogen ion beam assisted gallium nitride thin film deposition
    Physica B 308-310 (2002) 81-84

  271. K. Otte, T. Chassé, G. Lippold, B. Rauschenbach, R. Szargan ,
    Chemical defect explantation for the effect of postdeposition treatments on CuInSe2
    J. Appl. Phys. 91 (2002) 1624-1627

  272. K. Otte, T. Chassé, G. Lippold, B. Rauschenbach, R. Szargan ,
    Chemical defect explantation for the effect of postdeposition treatments on CuInSe2
    J. Appl. Phys. 91 (2002) 1624-1627

  273. D. Manova, P. Huber, S. Sienz, J.W. Gerlach, S. Mändl, B. Rauschenbach ,
    Dependence of ion beam induced nitrogen diffusion in aluminum on oxygen impurities
    J. Vac. Sci. Technol. A20 (2002) 206-213

  274. F. Frost, D. Hirsch, A. Schindler, B. Rauschenbach,
    AFM tip calibration using nanometer-sized structures induced by ion beam sputtering
    Proceedings of SPIE 4449 (2001) 225-234

  275. J. Keckes, J. W. Gerlach, R. Averbeck, H. Riechert, S. Bader, B. Hahn, H.-J. Lugauer, A. Lell, V. Härle, A. Wenzel,B. Rauschenbach ,
    Temperature dependence of stresses in GaN thin films grown on (0001) sapphire: Modelling of thermal stresses
    Applied Physics Letters 79 (2001) 4307-4309

  276. J. Dienelt, K. Zimmer, B. Rauschenbach ,
    Etching behaviour of GaAs with chlorine chemically assisted ion beam etching depending on the surface temperature
    GaAs 2001 Conference Proceedings, The 9th European Gallium Arsenide and other semiconductors Application Symposium, London 2001, published by Microwave Engineering Europe, CMP Europe ltd. (2001) 9-12

  277. J. Dienelt, K. Zimmer, B. Rauschenbach ,
    Etching behaviour of GaAs with chlorine chemically assisted ion beam etching depending on the surface temperature
    GaAs 2001 Conference Proceedings, The 9th European Gallium Arsenide and other semiconductors Application Symposium, London 2001, published by Microwave Engineering Europe, CMP Europe ltd. (2001) 9-12

  278. D. Manova, S. Mändl, B. Rauschenbach ,
    Heat balance during plasma immersion ion implantation
    Plasma Sources Sci. Technol. 10 (2001) 423-429

  279. R. Sader, S. Mändl, D. Krause G. Thorwarth F. Zeilhofer H. H. Horch B. Rauschenbach ,
    Surface Modification of Medical Titanium Implants with PIII
    Micro- and Nanostructures of Biological Systems, eds. G. Bischoff and H.-J. Hein (Shaker-Verlag, Aachen 2001) (2001) 121-134

  280. D. Manova, P. Huber, S. Mändl, B. Rauschenbach ,
    Filtered Arc Deposition and Implantation of Aluminium Nitride
    Surface Coatings and Technology 142/144 (2001) 61-66

  281. B. Rauschenbach ,
    Plasma Immersion Implantation
    The Enzyclopedia of Materials, Science and Technology, Elsevier Science Oxford 10 (2001) 1-5

  282. W. Attenberger, G. Thorwarth, D. Manova, S. Mändl, B. Stritzker, B. Rauschenbach ,
    Interface Properties of TiO2 on Si Formed by Simultaneous Implantation and Deposition of Titanium and Oxygen Ions
    Surf. Coat. Tech. 142-144 (2001) 412-417

  283. C. Liu, A. Wenzel, B. Rauschenbach, E. Alves, A. D. Sequeira, N. Franco, M. F. da Silva, J. C, Soares, X. J. Fan ,
    Amorphization of GaN by ion implantation
    Nuclear Instuments an Methods in Physics Research 178 (2001) 200-203

  284. C. Hammerl, B. Rauschenbach ,
    Synthesis ob buried metal oxide films by high fluence oxygen ion implantation into metals
    Nuclear Instuments an Methods in Physics Research 178 (2001) 220-223

  285. T. Pohl, C. Hammerl, B. Rauschenbach, U. Rüde ,
    Computer simulation of Ostwald ripening for ion beam synthesis of buried layers
    Nuclear Instuments an Methods in Physics Research 178 (2001) 135-137

  286. P. Huber, D. Manova, S. Mändl, B. Rauschenbach ,
    Optical Characterisation of TiN Produced by MePIIID
    Surface Coatings and Technology 142/144 (2001) 418-423

  287. S. Mändl, G. Thorwarth, P. Huber, S. Schoser B. Rauschenbach ,
    Comparison of trenches treated in PIII-systems
    Surf. Coat. Tech. 139 (2001) 81-86

  288. D. Manova, S. Mändl, B. Rauschenbach ,
    Oxygen Behaviour During PIII-Nitriding of Aluminium
    Nucl. Instrum. Meth. B 178 (2001) 291-296

  289. S. Mändl, G. Thorwarth, D. Manova, B. Rauschenbach ,
    Influence of Ion Energy on Titanium Oxide Formation by Vacuum Arc Deposition and Implantation
    Nucl. Instrum. Meth. B 178 (2001) 148-153

  290. V. Lavrentiev, C. Hammerl, B. Rauschenbach, A. Pisanenko, O. Kukharenko ,
    alfa-to-beta-phase transformation in titanium induced by power ion-beam irradiation
    Phil.Magazine A 81 (2001) 511-527

  291. V. Lavrentiev, C. Hammerl, B. Rauschenbach, O. Kukharenko ,
    Formation of hardened surface layers in titanium under irradiation with intense ion beams
    Scripta mater. 44 (2001) 625-630

  292. S. Mändl, G. Thorwarth, P. Huber, S. Schoser, B. Rauschenbach ,
    Comparison of trenches treated in PIII-systems
    Surf. Coat. Technol. 139 (2001) 81-86

  293. S. Mändl, D. Krause, G. Thorwarth, R. Sader, F. Zeilhofer H. H. Horch, B. Rauschenbach ,
    PIII Treatment of Medical Implants
    Surface Coatings and Technology 142/144 (2001) 1046-1050

  294. S. Mändl, B. Rauschenbach ,
    Nitrogen diffusion in austenitic stainless steel and formation of expanded austenite
    Defect and Diffusion Forum 188/190 (2001) 125-136

  295. A. Krtschil, A. Kielburg, H. Witte, A. Krost, J. Christen, A. Wenzel, B. Rauschenbach ,
    Electrical Charaterization of Ion Implantation Induced Defect States in Gallium Nitride
    IPAP Conf. Series 1 (2001) 625-628

  296. J. W. Gerlach, R. Schwertberger, D. Schrupp, S. Sienz, W. Attenberger, B. Rauschenbach ,
    Influence of the Ion Irradiation during Low-Energy Nitrogen Ion Assisted Deposition of Wurtzitic Gallium Nitride Films on Sapphire
    IPAP Conf. Series 1 (2001) 202-205

  297. S. Mändl, R. Günzel, C. Hammerl, E. Richter, B. Rauschenbach, W. Möller ,
    PIII-nitriding of boron implantated stainless steel
    Surf. Coat. Tech. 136 (2001) 176-180

  298. G. Thorwarth, S. Mändl, B. Rauschenbach ,
    Rutile formation and oxygen diffusion in oxygen PIII-treated titanium
    Surface and Coatings Technology 136 (2001) 236-240

  299. G. Keller, S. Mändl, U. Rüde, B. Rauschenbach ,
    Ion mass and scaling effects in PIII simulation
    Surf. Coat. Tech. 136 (2001) 117-121

  300. J.W. Gerlach, G. Thorwarth, D. Manova, S. Six, S. Mändl, B. Rauschenbach, W. Assmann, F. Grüner ,
    Element distributions in aluminium nitride thin films
    LMU und TU München - Jahresbericht 2001 (2001)

  301. J.W. Gerlach, G. Thorwarth, S. Mändl, B. Rauschenbach, W. Assmann, F. Grüner, M. Schubert ,
    Diffusion mechanisms in biocompatible titania surface layers
    Beschleunigerlabor Garching - Jahresbericht 2001 (2001)

  302. J.W. Gerlach, G. Thorwarth, S. Mändl, B. Rauschenbach, W. Assmann, F. Grüner, M. Schubert ,
    Diffusion mechanisms in biocompatible titania surface layers
    Beschleunigerlabor Garching - Jahresbericht 2001 (2001)

  303. A. Krtschil, A. Kielburg, H. Witte, A. Krost, J. Christen, A. Wenzel, B. Rauschenbach ,
    Implantation induced defect states in gallium nitride and their annealing behavior
    Phys. Stat. Sol. 228 (2001) 325-329

  304. A. Wenzel, H. Karl, C. Liu, B. Rauschenbach ,
    Distribution of ion implanted dopants in gallium nitride
    Proceed. Intern. Conf. On Ion Implantation, IEEE-Proceed. XXVI (2001) 99-102

  305. P. Huber, D. Manova, S. Mändl, W. Assmann, B. Rauschenbach ,
    Formation of textured TiN-layers on Si by metal plasma immersion ion implantation and deposition
    Proceed. Intern. Conf. on Ion Implantation, IEEE Proceed. XXVI (2001) 508-511

  306. B. Rauschenbach, S. Mändl, J.K. Gregory, R. Sader, D. Krause, W. Assmann, E. Steinhauser ,
    Oberflächenbehandlungen von Titanwerkstoffen
    Biomaterialien 2 (2001) 215-222

  307. S. Mändl, D. Krause, G. Thorwarth, R. Sader, F. Zeilhofer, H.H. Horch, B. Rauschenbach ,
    Plasma immersion ion implantation treatment of medical implants
    Surf. Coat. Tech. 142-144 (2001) 1046-1050

  308. S. Six, J.W. Gerlach, B. Rauschenbach ,
    Ion beam assisted pulsed laser deposition of epitaxial aluminium nitride thin films on sapphire substrates
    Surface and Coatings Technology 142-144 (2001) 397-401

  309. B. Rauschenbach, S. Sienz, S. Six, J.W. Gerlach ,
    Synthesis of metal nitrides by low-energy ion assisted film growth
    Surface and Coatings Technology 142-144 (2001) 371-375

  310. B. Rauschenbach ,
    Ion implantation, isolation and thermal processing of GaN and related materials
    III-Nitride Semiconductors: Electrical, Structural and Deffects Properties (2000) 193-249

  311. S. Mändl, G. Thorwarth, B. Rauschenbach ,
    Textured titanium oxide thin films produced by vacuum arc deposition
    Surf. Coat. Tech. 133-134 (2000) 283-288

  312. B. Rauschenbach, J. W. Gerlach ,
    Texture Development in Titanium Nitride Films Grown by Low-Energy Ion Assisted Deposition
    Cryst. Res. Technol. 35 (2000) 675-688

  313. S. Mändl, B. Rauschenbach ,
    Anisotropic strain in nitrided austenitic stainless steel
    J. Appl. Phys. 88 (2000) 3323-3329

  314. B. Rauschenbach ,
    Ion assisted deposition of thin layers
    Advances in Solid State Physics, Ed. B. Kramer, Vieweg & Sohn Braunschweig 40 (2000) 439

  315. J. Keckes, J. W. Gerlach, B. Rauschenbach ,
    Residual stresses in cubic and hexagonal GaN grown on sapphire using ion beam-assisted deposition
    Journal of Crystal Growth 219 (2000) 1-9

  316. S. Mändl, B. Rauschenbach ,
    Plasma-Immersions-Ionenimplantation: Ein neues Verfahren zur homogenen Oberflächenmodifizierung komplex geformter medizinischer Implantate
    Biomedizinische Technik 45 (2000) 193-216

  317. S. Mändl, B. Rauschenbach ,
    Plasma-Immersions-Ionenimplantation: Ein neues Verfahren zur homogenen Oberflächenmodifizierung komplex geformter medizinischer Implantate
    Biomedizinische Technik 45 (2000) 193-216

  318. S. Mändl, R. Günzel, E. Richter, W. Möller, B. Rauschenbach ,
    Annealing behaviour of nitrogen implanted stainless steel
    Surf. Coat. Tech. 128-129 (2000) 423-428

  319. S. Mändl, R. Günzel, E. Richter, W. Möller, B. Rauschenbach ,
    Annealing behaviour of nitrogen implanted stainless steel
    Surf. Coat. Tech. 128-129 (2000) 423-428

  320. D. Manova, P. Huber, S. Mändl, B. Rauschenbach ,
    Surface modification of aluminium by plasma immersion ion implantation
    Surf. Coat. Tech. 128-129 (2000) 249-255

  321. G. Thorwarth, S. Mändl, B. Rauschenbach ,
    Plasma immersion ion implantation using titanium and oxygen ions
    Surface and Coatings Technology 128-129 (2000) 116-120

  322. G. Thorwarth, S. Mändl, B. Rauschenbach ,
    Plasma immersion ion implantation using titanium and oxygen ions
    Surface and Coatings Technology 128-129 (2000) 116-120

  323. J. W. Gerlach, R. Schwertberger, D. Schrupp, B. Rauschenbach, H. Neumann, M. Zeuner ,
    Texture and epitaxy by ion beam assisted deposition of gallium nitride
    Surf. Coat. Tech. 128-129 (2000) 286-291

  324. J. W. Gerlach, R. Schwertberger, D. Schrupp, B. Rauschenbach, H. Neumann, M. Zeuner ,
    Texture and epitaxy by ion beam assisted deposition of gallium nitride
    Surf. Coat. Tech. 128-129 (2000) 286-291

  325. G. Keller, U. Rüde, L. Stals, S. Mändl, B. Rauschenbach ,
    Simulation of trench homogeneity in plasma immersion ion implantation
    J. Appl. Phys. 88 (2000) 1111-1117

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