Prof. Dr. Dr. h.c. Bernd Rauschenbach

Leibniz-Institut für Oberflächmodifizierung e. V.
Permoserstr. 15 / D-04318 / Leipzig /


Telefon: +49 (0)341 235 - 4039
Fax: +49 (0)341 235 - 2313



Liste der Publikationen >>

  1. S. K. Srivastava, C. Grüner, D. Hirsch, B. Rauschenbach, I. Abdulhalim,
    Enhanced intrinsic fluorescence from carboxidized nano-sculptured thin films of silver and their application for label free dual detection of glycated hemoglobin
    Opt. Express 25 (2017) 4761-4772

  2. D. Manova, S. Mändl, H. Neumann, B. Rauschenbach,
    Formation of Metastable Diffusion Layers in Cr-containing Iron, Cobalt and Nickel Alloys after Nitrogen Insertion
    Surf. Coat. Tech. 312 (2017) 81-90

  3. I. Hilmi, A. Lotnyk, J. W. Gerlach, P. Schumacher, B. Rauschenbach,
    Epitaxial formation of cubic and trigonal Ge-Sb-Te thin films with heterogeneous vacancy structures
    Mater. Design 115 (2017) 138-146

  4. A. Lotnyk, U. Ross, I. Hilmi, X. Sun, B. Rauschenbach,
    Formation and direct imaging of heterogeneous vacancy structures in cubic Ge2Sb2Te5 crystal lattices
    Paper Nr. 4.5, European Phase Change and Ovonic Symposium, Cambridge, UK, 04.-06.09. (2016) 86-87

  5. A. Lotnyk, U. Ross, S. Bernütz, E. Thelander, B. Rauschenbach ,
    Evaluation of local atomic arrangements and lattice distortions in layered Ge-Sb-Te crystal structures
    Paper Nr. 6108, The 16th European Microscopy Congress, Lyon, France, 28.08.-02.09. (2016)

  6. A. Lotnyk, S. Bernütz, X. Sun, U. Ross, M. Ehrhardt, B. Rauschenbach,
    Electron beam induced in situ writing and recovering of vacancy layers in Ge2Sb2Te5 crystal lattice
    Paper Nr. 6242, The 16th European Microscopy Congress, Lyon, France, 28.08-02.09 (2016)

  7. U. Ross, A. Lotnyk, E. Thelander, B. Rauschenbach,
    Real structure of highly oriented Ge-Sb-Te thin films investigated by Cs-corrected STEM
    Paper Nr. 6711, The 16th European Microscopy Congress, Lyon, France, 228.08-02.09 (2016)

  8. I. Hilmi, E. Thelander, P. Schumacher, J. W. Gerlach, B. Rauschenbach ,
    Epitaxial Ge2Sb2Te5 Films on Si(111) prepared by pulsed laser deposition
    Thin Solid Films 619 (2016) 81-85,10.1016/j.tsf.2016.

  9. S. Liedtke*, Ch. Grüner, M. Mensing, J.W. Gerlach, B. Rauschenbach,
    Metallic Nanostructures Prepared by Glancing Angle Deposition
    EUROPEAN CONFERENCE ON NANOFILMS, Bilbao, Spain, 19.-21.10. (2016) 116-117

  10. B. Rauschenbach, F. Frost,
    Constructive and destructive routes to prepare nanostructures on surfaces by low-energy ion beam sputtering
    Proceed. SPIE (Eds. A. Lakhtakia, T.G. Mackay, M. Suzuki) 9929 (2016)

  11. A. Lotnyk, U. Ross, S. bernütz, E. Thelander, B. Rauschenbach,
    Local atomic arrangements and lattice distortions in layered G-Sb-Te crystal structures
    Scientific Reports 6 (2016) 26724-26736

  12. X. Sun, M. Ehrhardt, A. Lotnyk, P. Lorenz, E. Thelander, J. W. Gerlach, T. Smausz, U. Decker, B. Rauschenbach,
    Crystallization of Ge2Sb2Te5 thin films by nano- and femtosecond single laser pulse irradiation
    Sci. Rep. 6 (2016) 28246

  13. D. Manova, A. Lotnyk, S. Mändl, H. Neumann, B. Rauschenbach,
    CrN Precipitation and Elemental Segregation During the Decay of Expanded Austenite
    Mater. Res. Express 3 (2016) 066502

  14. R.G. Nikov, N.N. Nedyalkov, P.A. Atanasov, D. Hirsch, B. Rauschenbach, K. Grochowska, G. Sliwinski,
    Characterization of Ag nanostructures fabricated by laser-induced dewetting of thin films
    Appl. Surf. Sci. 374 (2016) 36-41

  15. A. Lotnyk, U. Ross, S. Bernütz, E. Thelander, B. Rauschenbach,
    Local atomic arrangements and lattice distortions in layered Ge-Sb-Te crystal structures
    Sci. Rep. 6 (2016) 26724

  16. P. A. Atanasov, N. E. Stankova, N. N. Nedyalkov, N. Fukata, D. Hirsch, B. Rauschenbach, S. Amoruso, X. Wang, K. N. Kolev, E. I. Valova, J. S Georgieva, S. A. Armyanov,
    Fs-laser processing of medical grade polydimethylsiloxane (PDMS)
    Appl. Surf. Sci. 374 (2016) 229-234

  17. U. Ross, A. Lotnyk, E. Thelander, B. Rauschenbach,
    Microstructure evolution in pulsed laser deposited epitaxial Ge-Sb-Te chalcogenide thin films
    Journal of Alloys and Compounds 676 (2016) 582-590

  18. P.A. Atanasov, N.E. Stankova, N.N. Nedyalkov, T.R. Stoyanchov, Ru G. Nikov, N. Fukata, J.W. Gerlach, D. Hirsch, B. Rauschenbach,
    Properties of ns-laser processed polydimethylsiloxane (PDMS)
    J. Phys. Conf. Ser. 700 (2016) 012023

  19. A. Lotnyk, S. Bernütz, X. Sun, U. Ross, M. Ehrhardt, B. Rauschenbach,
    Real-space imaging of atomic arrangement and vacancy layers ordering in laser crystallised Ge2Sb2Te5 phase change thin films
    Acta Materialia 105 (2016) 1-8

  20. M.E. Koleva, N.N. Nedyalkov, P.A. Atanasov, J.W. Gerlach, D. Hirsch, A. Prager, B. Rauschenbach, N. Fukata, W. Jevasuwan,
    Porous plasmonic nanocomposites for SERS substrates fabricated by two-step laser method
    J. Alloy. Compd. 665 (2016) 282-287

  21. A. Lotnyk, S. Bernütz, U. Ross, X. Sun, E. Thelander, M. Ehrhardt, B. Rauschenbach,
    Atomic structure of Ge-Sb-Te thin films studied by high-resolution Cs-corrected STEM
    International Workshop on Advanced and In-situ Microscopies of Functional Nanomaterials and Devices, Hamburg/Germany, 8.-10.07. (2015) 44-45

  22. U. Roß, A. Lotnyk, E. Thelander, B. Rauschenbach ,
    High-resolution STEM investigation of textured and epitaxial Ge-Sb-Te thin films
    E\PCOS 2015, Amsterdam/Netherlands, 6.-8.09. (2015) 161-162

  23. D. Poppitz, A. Lotnyk, J. Gerlach, B. Rauschenbach ,
    Aberration-corrected STEM study of polar and non-polar epitaxial GaN thin films produced by ion-beam nitridation of Ga droplets on different substrate materials
    Paper Nr. MS2.P040, Microscopy Conference 2015, Göttingen/Germany, 6-11.09. (2015) 83-84

  24. A. Lotnyk, S. Bernütz, X. Sun, M. Ehrhardt, B. Rauschenbach,
    Atomic-resolution Cs-corrected STEM investigation of metastable Ge2Sb2Te5 phase change thin films
    Paper Nr. MS3.P057, Microscopy Conference 2015, Göttingen/Germany, 6.-11.09. (2015) 111-112

  25. U. Roß, A. Lotnyk, E. Thelander, B. Rauschenbach,
    Cs-corrected STEM characterisation of textured and epitaxial Ge-Sb-Te thin films
    Paper Nr. MS3.P066, Microscopy Conference 2015, Göttingen/Germany, 6-11.09. (2015) 127-128

  26. A. Lotnyk, D. Poppitz, U. Ross, J.W. Gerlach, F. Frost, S. Bernütz, E. Thelander, B. Rauschenbach,
    Focused high- and low-energy ion milling for TEM specimen preparation
    Microelectron. Reliab. 55 (2015) 2119-2125

  27. V. Baranwal, J.W. Gerlach, A. Lotnyk, B. Rauschenbach, H. Karl, S. Ojha, D.K.Avasthi, D. Kanjilal, A.C. Pandey,
    Embedded Ge nanocrystals in SiO2 synthesized by ion implantation
    J. Appl. Phys. 118 (2015) 134303

  28. X. Sun, E. Thelander, J.W. Gerlach, U. Decker, B. Rauschenbach,
    Crystallization kintics of GeTe phase-change thin films grown by pulsed laser deposition
    J. Phys. D Appl. Phys. 48 (2015) 295304

  29. S.K. Srivastava, H.B. Hamo, A. Kushmaro, R.S. Marks, Ch. Grüner, B. Rauschenbach, I. Abdulhalim,
    Highly sensitive and specific detection of E. coli by a SERS nanobiosensor chip utilizing metallic nanosculptured thin films
    Analyst 140 (2015) 3201-3209

  30. D. Poppitz, A. Lotnyk, J.W. Gerlach, J. Lenzner, M. Grundmann, B. Rauschenbach,
    An aberration-corrected STEM study of structural defects in epitaxial GaN thin films grown by ion beam assisted MBE
    MICRON 73 (2015) 1-8

  31. M.F. Sarmanova, H. Karl, S. Mändl, D. Hirsch, S.G. Mayr, B. Rauschenbach,
    Elastic properties of sub-stoichiometric nitrogen ion implanted silicon
    Nucl. Instrum. Meth. B 349 (2015) 169-172

  32. S. Srivastava, A. Shalabney, I. Khalaila, C. Grüner, B. Rauschenbach, and I. Abdulhalim,
    Highly sensitive SERS based nano-sculptured thin film biosensor for the detection of vitellogenin: an endocrine disruption biomarker
    Paper Nr. SeM3C.3, Optical Sensors 2014, Barcelona Spain, 27.-31. 7. (2014)

  33. E. Thelander, J. W. Gerlach, U. Ross, A. Lotnyk, B. Rauschenbach,
    Low temperature epitaxy of Ge-Sb-Te films on BaF2(111) by pulsed laser deposition
    Appl. Phys. Lett. 105 (2014) 221908

  34. E. Thelander, J.W. Gerlach, U. Ross, A. Lotnyk, B. Rauschenbach,
    Low-temperature epitaxy of Ge-Sb-Te films on BaF2 (111) by pulsed laser deposition
    Appl. Phys. Lett. 105 (2014) 221904

  35. U. Roß. A.Lotnyk, E. Thelander, B. Rauschenbach,
    Direct imaging of crystal structure and defects in metastable Ge2Sb2Te5 by quantitative aberration corrected STEM
    Appl. Phys. Lett. 104 (2014) 121904

  36. E. Thelander, J.W. Gerlach, U. Roß. F. Frost, B. Rauschenbach ,
    Epitaxial growth of Ge-Sb-Te films on KCl by high deposition rate pulsed laser deposition
    Journal of Applied Physics 115 (2014) 213504

  37. D. Manova, D. Hirsch, J.W. Gerlach, S. Mändl, H. Neumann, B. Rauschenbach,
    In-situ Investigation of Phase Formation During Low Energy Ion Nitriding of Ni80Cr20 Alloy
    Surf. Coat. Tech. 259 (2014) 434-441

  38. J. Buchwald, M. Sarmanova, B. Rauschenbach, S. G. Mayr,
    Nanometer-resolved mechanical properties around GaN crystal surface steps
    Beilstein J. Nanotechnol. 5 (2014) 2164-2170

  39. U. Ross, A. Lotnyk, E. Thelander, B. Rauschenbach,
    Quantitative structural and chemical investigation of amorphous and metastable crystalline phase-change alloy thin films by Cs-corrected STEM
    Paper Nr. ISBN 978-80-260-6721-4, IMC 18 Proceedings edited by Pavel Hozak, Prague, Czech Republic (2014) MS-3-O-1956

  40. A. Lotnyk, D. Poppitz, J.W. Gerlach, B. Rauschenbach,
    Imaging of light elements by annular dark-field Cs-corrected STEM
    Paper Nr. ISBN 978-80-260-6721-4, IMC 18 Proceedings edited by Pavel Hozak, Prague, Czech Republic (2014) IT-2-O-1555

  41. X. Sun, E. Thelander, P. Lorenz, J.W. Gerlach, U. Decker, B. Rauschenbach,
    Nanosecond laser-induced phase transitions in pulsed laser deposition-deposited GeTe films
    J. Appl. Phys. 116 (2014) 133501

  42. A. Finzel, J.W. Gerlach, J. Lorbeer, F. Frost, B. Rauschenbach,
    High-fluence hyperthermal ion irradiation of gallium nitride surfaces at elevated temperatures
    Appl. Surf. Sci. 317 (2014) 811-817

  43. A. Shalabney, I. Khalaila, Ch. Grüner, B. Rauschenbach, I. Abdulhalim,
    SERS biosensor using metallic nano-sculptured thin films for the detection of endocrine disrupting compound biomarker vitellogenin
    Small 10 (2014) 3579-3514

  44. D. Manova, S. Mändl, H. Neumann, B. Rauschenbach,
    Analysis of In Situ XRD Measurements for Low Energy Ion Beam Nitriding of Austenitic Stainless Steels
    Surf. Coat. Tech. 256 (2014) 64-72

  45. M. Teichmann, J. Lorbeer, F. Frost, B. Rauschenbach ,
    Ripple coarsening on ion beam-eroded surfaces
    Nanoscale Res. Lett. 9 (2014) 439

  46. D. Manova, S. Mändl, J.W. Gerlach, D. Hirsch, H. Neumann, B. Rauschenbach,
    In situ X-Ray Diffraction Investigations during Low Energy Ion Nitriding of Austenitic Stainless Steel Grade 1.4571
    J. Phys. D Appl. Phys. 47 (2014) 365301

  47. A.M. Jakob, J. Buchwald, B. Rauschenbach, S.G. Mayr,
    Nanoscale-resolved elasticity: contact mechanics for quantitative contact resonance atomic force microscopy
    Nanoscale 6 (2014) 6898-6910

  48. R. Feder, C. Bundesmann, H. Neumann, B. Rauschenbach,
    Ion beam sputtering of germanium - Energy and angular distribution of sputtered and scattered particles
    Nucl. Instrum. Meth. B 334 (2014) 88-95

  49. E. Thelander, J.W. Gerlach, U. Ross, F. Frost, B. Rauschenbach,
    Epitaxial growth of Ge-Sb-Te films on KCl by high deposition rate pulsed laser deposition
    J. Appl. Phys. 115 (2014) 213504

  50. U. Ross, A. Lotnyk, E. Thelander, B. Rauschenbach,
    Direct imaging of crystal structure and defects in metastable Ge2Sb2Te5 by quantitative aberration-corrected scanning transmission electron microscopy
    Appl. Phys. Lett. 104 (2014) 121904

  51. A. Lotnyk, D. Poppitz, J.W. Gerlach, B. Rauschenbach,
    Direct imaging of light elements by annular dark-field aberration-corrected scanning transmission electron microscopy
    Appl. Phys. Lett. 104 (2014) 071908

  52. D. Poppitz, A. Lotnyk, J.W. Gerlach, B. Rauschenbach,
    Microstructure of porous gallium nitride nanowall networks
    ACTA MATER 65 (2014) 98-105

  53. R. Feder, F. Frost, H. Neumann, C. Bundesmann, B. Rauschenbach,
    Systematic investigations of low energy Ar ion beam sputtering of Si and Ag
    Nucl. Instrum. Meth. B 317 (2013) 137-142

  54. M. Teichmann, J. Lorbeer, B. Ziberi, F. Frost, B. Rauschenbach,
    Pattern formation on Ge by low energy ion beam erosion
    New J. Phys 15 (2013) 103029

  55. D. Poppitz, A. Lotnyk, J. Gerlach, B. Rauschenbach,
    Microstructure investigation of porous gallium-nitride thin films
    MC 2013 Proceedings (URN number: urn:nbn:de:bvb:355-epub-287343) ed. R. Rachel, Regensburg, Germany, 25.-30.8 (2013) 617-618

  56. U. Roß, A. Lotnyk, E. Thelander, B. Rauschenbach,
    Characterization of laser-deposited Ge-Sb-Te thin films by Cs corrected STEM
    MC 2013 Proceedings (URN number: urn:nbn:de:bvb:355-epub-287343) ed. R. Rachel, Regensburg, Germany, 25.-30.8 (2013) 435-436

  57. A. Lotnyk, D. Poppitz, J. Gerlach, B. Rauschenbach,
    Low-energy Ar+-polishing of FIB prepared GaN-SiC interfaces for Cs-corrected STEM
    MC 2013 Proceedings (URN number: urn:nbn:de:bvb:355-epub-287343) ed. R. Rachel, Regensburg, Germany, 25.-30.8 (2013) 305-306

  58. R. Feder, C. Bundesmann, H. Neumann, B. Rauschenbach,
    Ion beam sputtering of Ag Angular and energetic distributions of sputtered and scattered particles
    Nucl. Instrum. Meth. B 316 (2013) 198 204

  59. B. Rauschenbach,
    Preparation of ion beam induced nanostructures on surface
    3rd Intern. Conference Nanomaterials: Applications and Properties, Alushta, 16.-21.09 (2013) Vol. 2, no. 1, pp. 01001-

  60. B. Rauschenbach,
    Entwicklungstrends für neuartige funktionelle Oberflächen
    Technik in Bayern 5 (2013)

  61. A. Shalabney, Ch. Khare, B. Rauschenbach, I. Abdulhalim,
    Metallic Nanosculptured thin films for biosensing applications using surface plasmon resonance and enhanced spectroscopies
    Proceed. IEEE 2013 (2013)

  62. B. Rauschenbach, Ch. Grüner, Ch. Khare,
    Ion beam sputtering induced nano-scluptured thin films
    Proceed. XXI. Intern. Conference'Ion-Surfce Interaction' , Jaroslavel, 22.-26.08. (2013) 233-238

  63. H. Lu, E. Thelander, J.W. Gerlach, U. Decker, B. Zhu, B. Rauschenbach,
    Single pulse laser-induced phase transitions of PLD-deposited Ge2Sb2Te5 films
    Adv. Funct. Mater. 23 (2013)

  64. S. Perlt, Th. Höche, J. Dadda, E. Müller, B. Rauschenbach,
    Compositional sensitivity of microstructures and thermoelectric properties of Ag1-xPb18Sb1-yTe20 compounds
    J. Electronic Mat. 42 (2013)

  65. B. Rauschenbach, Ch. Grüner,
    Glanzwinkeldeposition ein materialunabhängiges Verfahren zur Herstellung von Nanostrukturen
    Nanotechnologie aktuell 6 (2013) 68-73

  66. D. Manova, C. Günther, A. Bergmann, S. Mändl, H. Neumann, B. Rauschenbach,
    Influence of Temperature on Layer Growth as Measured by in-situ XRD Observation of Nitriding Austenitic Stainless Steel
    Nucl. Instrum. Meth. B 307 (2013) 310-314

  67. A. Jenichen, C. Engler, B. Rauschenbach,
    Comparison of wurzite and zinc-blende GaAs surfaces as possible nanowire side walls: DFT stability calculations
    Surf. Sci. 613 (2013) 74-79

  68. M. Mäder, Th. Höche, B. Rauschenbach,
    Non-periodic nanoscale templates by diffration mask projection laser ablation
    Phys. Status Solidi A 209 (2012) 2208-2211

  69. D. Manova, A. Bergmann, S. Mändl, H. Neumann, B. Rauschenbach,
    Integration of a broad beam ion source with a high-temperature x-ray diffraction vacuum chamber
    Rev. Sci. Instrum. 83 (2012) 113901

  70. J. Bauer, J. Weise, M. Khare, B. Rauschenbach,
    Ordered Si-Ge nanostructures by glancing angle deposition via ion beam sputtering
    Proceed. MRS Symp. 1329 (2012) 81-87

  71. E. Thelander, B. Rauschenbach,
    Influence of burst pulses on the film topography in picosecond pulsed laser deposition of LaALO3
    J. of Physics: Conference Series 356 (2012) 012015

  72. A. Shalabney, C. Khare, B. Rauschenbach, I. Abdulhalim,
    Detailed study of surface enhanced Raman scattering from metallic nano sculptured thin films and their potential for biosensing
    J. of Nanophotonics 6 (2012) 48-55

  73. C. Khare, J.W. Gerlach, C. Patzig, B. Rauschenbach,
    Ion beam sputter deposition of epitaxial Ag films on native oxide covered Si(100) substrates
    Appl. Surf. Sci. 258 (2012) 9617-9622

  74. C. Khare, J.W. Gerlach, T. Höche, B. Fuhrmann, H.S. Leipner, B. Rauschenbach,
    Effects of annealing on arrays of Ge nanocolumns formed by glancing angle deposition
    Appl. Surf. Sci. 258 (2012) 9762-9769

  75. H. Lu, E. Thelander, J.W. Gerlach, D. Hirsch, U. Decker, B. Rauschenbach ,
    Ge2Sb2Te5 phase-change films on polyimide substrates by laser deposition
    Appl. Phys. Lett. 101 (2012) 031905

  76. A. Karabchevsky, C. Khare, B. Rauschenbach, I. Abdulhalim,
    Microspot sensing based on surface enhanced fluorescence from nanosclptured thin films
    J. Nanophotonics 6 (2012) 061508

  77. J.W. Gerlach, T. Ivanov, L. Neumann, Th. Höche, D. Hirsch, B. Rauschenbach,
    Epitaxial GaN films by hyperthermal ion-beam nitridation of Ga droplets
    J. Appl. Phys. 111 (2012) 113521

  78. J. Bauer, M. Weise, B. Rauschenbach, N. Geyer B. Fuhrmann,
    Shape evolution in glancing angle deposition of arranged Germanium nonocolumns
    Journal of Applied Physics 111 (2012) 104309

  79. A.M. Jakob, M. Müller, B. Rauschenbach, S.G. Mayr,
    Nanoscale mechanical surface properties of single crystalline martensitic Ni-Mn-Ga ferromagnetic shape memory alloys
    New J. Phys 14 (2012) 033029

  80. L. Neumann, J.W. Gerlach, B. Rauschenbach,
    Initial stages of the ion-beam assisted epitaxial GaN film growth on 6H-SiC(0001)
    Thin Solid Films 520 (2012) 3936-3945

  81. C. Khare, R. Fechner J. Bauer, M. Weise, B. Rauschenbach,
    Glancing angle deposition of Ge nanorod arrays on Si patterend substrates
    J. Vac. Sci. Technol. A 29 (2011) 041503

  82. C. Khare, B. Fuhrmann, H.S. Leipner, J. bauer, B. Rauschenbach,
    Optimized growth of Ge nanorod arrays on Si patterns
    J. Vac. Sci. Technol. A 29 (2011) 051501

  83. C. Khare, B. Fuhrmann, H.S. Leipner, J. Bauer and B. Rauschenbach,
    Optimized growth of Ge nanorod arrays on Si patterns
    J. Vac. Sci. Technol. A 29(5) (2011) 051501

  84. C. Khare, R. Fechner, J. Bauer, M. Weise and B. Rauschenbach,
    Glancing angle deposition of Ge nanorod arrays on Si patterned substrates
    J. Vac. Sci. Technol. A 29(4) (2011) 041503

  85. A. Shalabney, C. Khare, B. Rauschenbach, I. Abdulhalim,
    Sensitivity of surface plasmon resonancesensors based on metallic columnar thin films in the spectral and angular interrogations
    Sensors and Actuators B: Chemical 159 (2011) 201-212

  86. O. Albercht, R. Zierold, S. Allende, J. Escrig, C. Patzig, B. Rauschenbach, K. Nielsch, D. Görlitz,
    Experimental evidence for an angular dependent transition of magnetization reversal modes in magnetic nanotubes
    J. of Applied Physics 109 (2011) 093910

  87. M. Cornejo, J. Völlner, B. Ziberi, F. Frost, B. Rauschenbach,
    Ion beam sputtering: A route for fabrication of highly ordered nanopattern
    in 'Fabrication and Characterization in the Micro-Nano Range', Eds. A. Fernando Lasagni und A. F. Lasagni (Springer Berlin Heidelberg, 2011) 10 (2011) 69-94

  88. C. Khare, J.W. Gerlach, M. Weise, J. Bauer, T. Höche, B. Rauschenbach ,
    Growth temperature altered morphology of Ge nanocolumns
    Phys. Status Solidi A 208 (2011) 851 - 856

  89. M. Cornejo, B. Ziberi, Ch. Meinecke, D. Hirsch, J. W. Gerlach, Th. Höche, F. Frost, B. Rauschenbach,
    Self-organized patterning on Si(001) by ion sputtering with simultaneous metal incorporation
    Appl. Phys. A 102 (2011) 593-599

  90. J. Völlner, B. Ziberi, F. Frost, B. Rauschenbach,
    Topography evolution mechanism on fused silica during low-energy ion beam sputtering
    J. Appl. Phys. 109 (2011) 043501

  91. J. Bauer, M. Weise, Ch. Grüner, Ch. Khare, B. Rauschenbach, N. Geyer, B. Fuhrmann,
    Glanzwinkeldeposition von geordneten Si/Ge-Nanostrukturen
    Jahresbericht IZM/MLU Halle (2010) 31

  92. C. Khare, C. Patzig, J.W. Gerlach, B. Rauschenbach, B. Fuhrmann,
    Influence of substrate temperature on glancing angle deposited Ag nanorods
    J. Vac. Sci. Technol. A 28(4) (2010) 1002-1009

  93. R. Nagar, B.R. Metha,J.P. Singh, C. Patzig, B. Rauschenbach, D. Kanjilal,
    Enhancement of stiffness of vertically standing Si nanosprings by energetic ions
    J. Appl. Phys. 107 (2010) 094315

  94. O. Albrecht, R. Zierold, C. Patzig, J. Bachmann, C. Sturm, B. Rheinländer, M. Grundmann, D. Görlitz, B. Rauschenbach, K. Nielsch,
    Tubular magnetic nanostructures based on glancing angle deposited templates and atomic layer deposition
    Phys. Status Solidi B 247 (2010) 1365-1371

  95. M. Mäder, Th. Höche, J.W. Gerlach, R. Böhme, B. Rauschenbach,
    Nanostructures by diffraction mask projection laser ablation
    Phys. Status Solidi B 247 (2010) 1372-1383

  96. C. Patzig, C. Khare, B. Fuhrmann, B. Rauschenbach,
    periodically arranged Si nanostructures by glancing angle deposition on patterend substrates
    Phys. Status Solidi B 247 (2010) 1322-1334

  97. C. Patzig, A. Miessler, T. Karabacak, B. Rauschenbach,
    Arbitrarily shaped Si nanostructures by glancing angle ion beam deposition
    Phys. Status Solidi B 247 (2010) 1310-1321

  98. B. Rauschenbach, C. Patzig,
    Dünne Schichten durch Deposition unter streifenden Einfall
    Vakuum in Forschung und Praxis 22 (2010) 14-19

  99. M. Mäder, S. Perlt, Th. Höche, H. Hilmer, M. Grundmann, B. Rauschenbach,
    Gold nanostructure matrices by diffraction mask-projection laser ablation: extension to previously inaccessible substrates
    Nanotechnology 21 (2010) 175304

  100. R. Nagar, C. Patzig, B. Rauschenbach, B.R. Metha, J.P. Singh,
    Mechanical characteristics of Silicon nanostructures using force distance spectroscopy
    J. Nanosci. Nanotechnol. 10 (2010) 2994-3000

  101. M. Mäder; Th. Höche; J.W. Gerlach; S. Perlt; J. Dorfmüller; R. Vogelgesang; K. Kern; B. Rauschenbach,
    Plasmonic Activity of Large-Area Gold-Nanodot Arrays on Arbitrary Substrates
    Nano Letters 10 (2010) 47-51

  102. I. Gurrappa, D. Manova, J.W. Gerlach, S. Mändl, B. Rauschenbach,
    Effect of the Nitrogen Plasma Immersion Ion Implantation on High Temperature Oxidation of Titanium Alloy IMI 834
    J. Adv. Mater. 41 (2009) 40-51

  103. J. Völlner, B. Ziberi, F. Frost, B. Rauschenbach,
    Low-energy ion beam sputtering of pre-patterned fused silica surfaces
    Paper Nr. 1181-DD13-15, MRS Spring Meeting, San Francisco, USA, 13.-17.04. (2009)

  104. M. Cornejo, B. Ziberi, M. Tartz, H. Neumann, F. Frost, B. Rauschenbach,
    Importance of internal ion beam parameters on the self-organized pattern formation with low-energy broad beam ion sources
    Paper Nr. 1181-DD13-13, MRS Spring Meeting, San Francisco, USA, 13.-17.04. (2009)

  105. J.W. Gerlach, C. Patzig, W. Assmann, A. Bergmaier, Th. Höche, J. Zajadacz, R. Fechner, B. Rauschenbach,
    Swift heavy ion irradiation induced effects in Si/SiOx multi-layered films and nanostructures
    Paper Nr. 1181-DD04-01, MRS Spring Meeting, San Francisco, 13.-17.04. (2009)

  106. A. Shalabney, A. Lakhtakia, I. Abdulhalim, A. Lahav, C. Patzig, I. Hazek, A. Karabchevsky, B. Rauschenbach, F. Zhang, J. Xu,
    Surface plasmon resonance from metallic columnar thin films
    Photonics and Nanostructures Fundamentals and Applications 7 (2009) 176-185

  107. S. Rauschenbach, R. Vogelgesang, N. Malinowski, J.W. Gerlach, M. Benyoucef, G. Constantini, Z. Deng, N. Thontasen, K. Kern,
    Electrospray ion beam deposition: soft-landing and fragmentation of functional molecules at solid surfaces
    ACS NANO 3 (2009) 2901-2910

  108. C. Patzig, J. Zajadacz, K. Zimmer, R. Fechner, C. Khare, B. Rauschenbach,
    Patterning concept for sculptured nanostructures with arbitrary periods
    Appl. Phys. Lett. 95 (2009) 103107

  109. R. Nagar, C. Patzig, B. Rauschenbach, V. Sathe, D. Kanjilal, B.R. Metha, J.P. Singh,
    Ion beam induced anisotropic deformation of Si nanosprings
    J. Phys. D Appl. Phys. 42 (2009) 145404

  110. J.W. Gerlach, Th. Höche, L. Neumann, B. Rauschenbach,
    Ultra-thin titanium nitride film epitaxy with hyperthermal titanium ions
    Paper Nr. 406, 9th IEEE International Conference on Nanotechnology, Genua, 26.-30.07. (2009)

  111. R. Nagar, C. Patzig, B. Rauschenbach, V. Sathe, D. Kanjilal, B. R. Mehta, J. P. Singh ,
    Ion beam induced anisotropic deformation of Si nanosprings
    J. Phys. D Appl. Phys. 42 (2009) 145404

  112. J. Lutz, J.W. Gerlach, S. Mändl, B. Rauschenbach, J.K.N. Lindner, W. Assmann,
    Radiation Modified Oxide Growth in the System Ni-Ti-O
    Annual Report Maier-Leibnitz-Laboratorium für Kern- und Teilchenphysik der Ludwig-Maximilians-Universität München und der Technischen Universität München (MLL) 2008 (2009) 80

  113. B. Ziberi, M. Cornejo, F. Frost, B. Rauschenbach,
    Highly ordered nanopatterns on Ge and Si surfaces by ion beam sputtering
    J. Phys.: Condens. Matter 21 (2009) 224003

  114. W. Möller, B. Rauschenbach,
    Proceed. 16th International Conference on Ion Beam Modification of Materials, Dresden, 31 August - 5 September 2008
    Nucl. Instrum. Meth. B 267 (2009) 1217-1760

  115. I. Abdulhalim, A. Karabchevsky, C. Patzig, B. Rauschenbach, B. Fuhrmann, E. Eltzov, R. Marks, J. Xu, F. Zhang, A. Lakhtakia,
    Surface-enhanced flourescence from metal sculptured thin films with application to biosensing in water
    Appl. Phys. Lett. 94 (2009) 063106

  116. C. Patzig, B. Fuhrmann, H.S. Leipner, B. Rauschenbach,
    Si nanocolumns on nanosphere lithography templated substrates: effect of sphere size and substrate temperature
    J. Nanosci. Nanotechnol. 9 (2009) 1985-1991

  117. E. Schubert, F. Frost, H. Neumann, B. Rauschenbach, B. Fuhrmann, F. Heyroth, J. Rivory, B. Gallas, M. Schubert,
    Ion beam assisted growth of sculptured thin films: Structure alignment and optical fingerprints
    Advances in Solid State Physics 46 (2008) 297-308

  118. M. Mäder, J.W. Gerlach, Th. Höche, Ch. Czekalla, M. Lorenz, M. Grundmann, B. Rauschenbach,
    ZnO nanowall networks grown on DiMPLA pre-patterend thin gold films
    Phys. Stat. Sol. RRL 2 (2008) 200-202

  119. C. Patzig, T. Karabacak, B. Fuhrmann, B. Rauschenbach,
    Glancing angle sputter deposited nanostructures on rotating substrates: Experiments and simulations
    J. Appl. Phys. 104 (2008) 094318

  120. I. Abdulhalim, A. Karabchevsky, C. Patzig, B. Rauschenbach, B. Fuhrmann,
    Sensitivity enhancement of guided wave surface plasmon resonance sensors
    SPIE Proceed. 7041 (2008) 70410G

  121. X. Ou, R. Kögler, A. Mücklich, W. Skorupa, W. Möller, X. Wang, J.W. Gerlach, B. Rauschenbach,
    Efficient oxygen gettering in Si by coimplantation of hydrogen and helium
    Appl. Phys. Lett. 93 (2008) 161907

  122. K. Zimmer, R. Böhme, B. Rauschenbach,
    Local growth of aligned carbon nanotubes at surface sites irradiated by pulsed laser
    Physica E 40 (2008) 2223-2226

  123. F. Mei, K.M. Wu, Y. Pan, T. Han, C. Liu, J.W. Gerlach, B. Rauschenbach,
    Structural and optical properties of Cr-doped semi-insulating GaN epilayers
    Appl. Phys. Lett. 93 (2008) 113507

  124. C. Patzig, B. Rauschenbach,
    Temperature effect on the glancing angle deposition of Si sculptured thin films
    J. Vac. Sci. Technol. A 26 (2008) 881-886

  125. Yu.V. Trushin, D.V. Kulikov, K.L. Safonov, B. Rauschenbach,
    Kinetic equations and nanocrystal growth in molecular beam epitaxy methods
    Bulletin Russ. Academy Sci.: Physics 72 (2008) 937-940

  126. K. Zimmer, R. Böhme, B. Rauschenbach,
    Local growth of aligned carbon nanotubes at surface sites irradiated by pulsed laser
    Phys. E 40 (2008) 2223-2226

  127. V. Baranwal, A.C. Pandey, J.W. Gerlach, B. Rauschenbach, H. Karl, D. Kanjilal, D.K. Avasthi,
    Rapid thermal and swift heavy ion induced annealing of Co ion implanted GaN films
    J. Appl. Phys. 103 (2008) 124904

  128. Yu. V. Trushin, D. V. Kulikov, K. L. Safonov, J. W. Gerlach, Th. Höche, B. Rauschenbach,
    Atomic assembly during ion-beam assisted growth: Kinetic modeling
    J. Appl. Phys. 103 (2008) 114904

  129. F. Frost, B. Ziberi, A. Schindler, B. Rauschenbach ,
    Surface engineering with ion beams: from self-organized nanostructures to ultra-smooth surfaces
    Appl. Phys. A 91 (2008) 551-559

  130. B. Ziberi, F. Frost, M. Tartz, H. Neumann, B. Rauschenbach,
    Ripple rotation, pattern transitions, and long range ordered dots on silicon by ion beam erosion
    Appl. Phys. Lett. 92 (2008) 063102

  131. Th. Höche, F. Ulmer and B. Rauschenbach,
    Pulsed Laser Deposition using Femtosecond Laser Radiation
    J Laser Micro/Nanoengineering 3 (2008) 41-45

  132. M. Mäder, K. Zimmer, R. Böhme, Th. Höche, J.W. Gerlach, B. Rauschenbach,
    Nano-Patterning by Diffraction Mask-Projection Laser Ablation
    J Laser Micro/Nanoengineering 3 (2008) 9-13

  133. M. Mäder, T. Höche, J. W. Gerlach, R. Böhme, K. Zimmer, B. Rauschenbach,
    Large area metal dot matrices made by diffraction mask projection laser ablation
    Phys. Stat. Sol. (RRL) 2 No. 1 (2008) 34-36

  134. E. Schubert, F. Frost, H. Neumann, B. Rauschenbach, B. Fuhrmann, F. Heyroth, J. Rivory, E. Charron, B. Gallas, M. Schubert,
    Ion Beam Assisted Growth of Sculptured Thin Films: Structure Alignment and Optical Fingerprints
    Advances in Solid State Physics 46 (2007) 309-320

  135. D. Manova, D. Hirsch, E. Richter, S. Mändl, H. Neumann, B. Rauschenbach,
    Microstructure of Nitrogen Implanted Stainless Steel after Wear Experiments
    Surf. Coat. Tech. 201 (2007) 8329 8333

  136. K. Zimmer, R. Bohme, D. Ruthe, B. Rauschenbach,
    Stimulation of the local growth of aligned carbon nanotubes by pulse laser exposure of the substrate
    Appl. Surf. Sci. 253 (2007) 7707-7710

  137. Y. Bohne, D. Manova, S. Mändl, H. Neumann, B. Rauschenbach ,
    Influence of Microstructure on Nitrogen Diffusion in Fe-Cr-Ni Thin Films
    Plasma Process. Polym. 4 (2007) S660 S663

  138. C. Patzig, B. Rauschenbach, W. Erfurth, A. Milenin,
    Ordered silicon nanostructures by ion beam induced glancing angle deposition
    J. Vac. Sci. Technol. B 25(3) (2007) 833-838

  139. K. Zimmer, R. Böhme, D. Ruthe, Th. Rudolph, B. Rauschenbach,
    Local growth of vertical aligned carbon nanotubes by laser-induced surface modification of coated silicon substrates
    J. Phys. Conference Series 59 (2007) 318-321

  140. K. Zimmer, R. Böhme, D. Ruthe, B. Rauschenbach,
    The influence of laser-induced surface modifications on the backside etching process
    Appl. Surf. Sci. 253 (2007) 6588-6594

  141. N. Razek, A. Schindler and B. Rauschenbach,
    Ultra-high vacuum direct bonding of a pn junction GaAs wafer using low-energy hydrogen ion beam surface cleaning
    Vacuum 81 (2007) 974-978

  142. D. Manova, E. Richter, I.-M. Eichentopf, S. Heinrich, S. Mändl, H. Neumann, B. Rauschenbach,
    Interplay of Cold Working and Nitrogen Diffusion in Austenitic Stainless Steel
    Nucl. Instrum. Meth. B 257 (2007) 442-446

  143. J.W. Gerlach, A. Hofmann, T. Höche, B. Rauschenbach,
    Control of the crystalline quality of wurtzitic GaN films deposited on gamma-LiAlO2 by ion beam assisted molecular beam epitaxy
    Nucl. Instrum. Meth. B 257 (2007) 315-319

  144. D. Manova, S. Mändl, B. Rauschenbach,
    Incident Ion Fluence Gradients on the Frontside and Backside of Flat Samples
    Surf. Coat. Tech. 201 (2007) 6593-6596

  145. D. Manova, S. Mändl, H. Neumann, B. Rauschenbach ,
    Influence of Grain Size on Nitrogen Diffusivity in Austenitic Stainless Steel
    Surf. Coat. Tech. 201 (2007) 6686-6689

  146. K. Zimmer, R. Böhme, B. Rauschenbach,
    Using IR laser radiation for backside etching of fused silica
    Appl. Phys. A 86 (2007) 409-414

  147. K. Zimmer, R. Böhme, B. Rauschenbach,
    Enhancing the etch rate at backside etching of fused silica
    Journal of Laser Micro/Nanoengineering 1 (2006) 292-296

  148. R. Böhme, K. Zimmer, D. Ruthe, B. Rauschenbach,
    Backside etching at the interface to diluted medium with nanometer etch rates
    Journal of Laser Micro/Nanoengineering 1 (2006) 190-194

  149. E. Schubert, J. Fahlteich, B. Rauschenbach, M. Schubert, M. Lorenz, M. Grundmann, G. Wagner,
    Recrystallization behavior in chiral sculptured thin films from silicon
    J. Appl. Phys. 100 (2006) 016107

  150. I. Gurrappa, D. Manova, J.W. Gerlach, S. Mändl, B. Rauschenbach,
    Effect of plasma immersion ion implantation and deposition on high temperature oxidation of titanium alloy IMI 834-aluminizing
    Journal of Alloys and Compounds 426 (2006) 375 - 383

  151. K. Zimmer, R. Bohme, S. Pissadakis, L. Hartwig, G. Reisse, B. Rauschenbach,
    Backside etching of fused silica with Nd:YAG laser
    Appl. Surf. Sci. 253 (2006) 2796-2800

  152. I. Gurrappa, D. Manova, J.W. Gerlach, S. Mändl, B. Rauschenbach,
    Influence of nitrogen implantation on the high temperature oxidation of titanium-base alloys
    Surf. Coat. Tech. 201 (2006) 3536 - 3546

  153. D. Ruthe, K. Zimmer, T. Höche, B. Rauschenbach,
    Strukturierung und Modifizierung dünner Schichten mit ultrakurzen Pulsen für elektronische Anwendungen
    18th International Scientific Conference Mittweida, Mittweida, 09.-11.11. (2006) 108-111

  154. K.Zimmer, R. Böhme, D. Ruthe, B. Rauschenbach,
    Laserätzen an der Rückseite transparenter Materialien - Stand und weitere Entwicklungen
    18th International Scientific Conference Mittweida, Mittweida, 09.-11. Nov. (2006) 35-40

  155. K. Zimmer, R. Böhme, D. Hirsch, B. Rauschenbach,
    Backside etching of fused silica with UV laser pulses using mercury
    J. Phys. D Appl. Phys. 39 (2006) 4651-4655

  156. Th. Höche, R. Böhme, J.W. Gerlach, B. Rauschenbach, F. Syrowatka,
    Excimer-Laser Synthesis of Nanosized Gold-Dot Patterns
    PHIL MAG LETT 86 (2006) 661-667

  157. B. Ziberi, F. Frost, B. Rauschenbach,
    Self-organized dot patterns on Si surfaces during noble gas ion beam erosion
    Surf. Sci. 600 (2006) 3757

  158. D. Manova, I.-M. Eichentopf, D. Hirsch, S. Mändl, H. Neumann, B. Rauschenbach,
    Influence of Microstructure on Nitriding Properties of Stainless Steel
    IEEE Plasma Sci. 34 (2006) 1136-1140

  159. B. Ziberi, F. Frost, T. Höche, B. Rauschenbach,
    Ion-induced self-organized dot and ripple patterns on Si surfaces
    Vacuum 81 (2006) 155-159

  160. S. Mändl, Y. Bohne, J.W. Gerlach, W. Assmann, B. Rauschenbach,
    Complementary Information from RBS, ERDA and SIMS for Analysis of Modern Magnesium Alloys
    Nucl. Instrum. Meth. B 249 (2006) 297-301

  161. K. Zimmer, R. Böhme, D. Ruthe, B. Rauschenbach,
    Backside laser etching of fused silica using liquid gallium
    Appl. Phys. A 84 (2006) 455-458

  162. B. Ziberi, F. Frost, B. Rauschenbach,
    Formation of large-area nanostructures on Si and Ge surfaces during low-energy ionbeam erosion
    J. Vac. Sci. Technol. A 24 (2006) 1344

  163. R. Böhme, K. Zimmer, B. Rauschenbach,
    Direct laser etching of transparent materials: High quality surface patterning and figuring for micro-optical applications
    Seventh International Conference on Correlation Optics, Proc. of SPIE 6254 (2006) 203-211

  164. J. Dienelt, H. Neumann, M. Kramer, F. Scholze, B. Rauschenbach, M. Nestler, A. Tarraf, M. Schulze,
    A new mask blank deposition tool
    Microelectronic Engineering 83 (2006) 718-722

  165. S. Mändl, A. Fleischer, D. Manova, B. Rauschenbach,
    Wear Behaviour of NiTi Shape Memory Alloy after Oxygen-PIII Treatment
    Surf. Coat. Tech. 200 (2006) 6225 - 6229

  166. Y. Bohne, D.M. Seeger, C. Blawert, W. Dietzel, S. Mändl, B. Rauschenbach ,
    Influence of Ion Energy on Properties of Mg Alloy Thin Films Formed by Ion Beam Sputter Deposition
    Surf. Coat. Tech. 200 (2006) 6527 6532

  167. D. Manova, S. Mändl, H. Neumann, B. Rauschenbach,
    Influence of Annealing Conditions on Ion Nitriding of Martensitic Stainless Steel
    Surf. Coat. Tech. 200 (2006) 6563 - 6567

  168. B. Ziberi, F. Frost, B. Rauschenbach,
    Pattern transitions on Ge surfaces during low-energy ion beam erosion
    Appl. Phys. Lett. 88 (2006) 173115

  169. E. Schubert, J. Fahlteich, Th. Höche, G. Wagner, B. Rauschenbach,
    Chiral silicon nanostructures
    Nucl. Instrum. Meth. B 244 (2006) 40-44

  170. J.W. Gerlach, A. Hofmann, T. Höche, F. Frost, B. Rauschenbach, G. Benndorf,
    High quality m-plane GaN films deposited on gamma-LiAlO2 by ion beam assisted molecular beam epitaxy
    Appl. Phys. Lett. 88 (2006) 011902

  171. R. Böhme, K. Zimmer, B. Rauschenbach,
    Laser backside etching of fused silica due to carbon layer ablation
    Appl. Phys. A 82 (2) (2006) 325-328

  172. S. Mändl, B. Rauschenbach,
    Formation of Transparent ZnO Layers by MePIIID
    Nucl. Instrum. Meth. B 242 (2006) 293-295

  173. D. Manova, G. Thorwarth, S. Mändl, H. Neumann, B. Stritzker, B. Rauschenbach,
    Variable Lattice Expansion in Martensitic Stainless Steel after Nitrogen Ion Implantation
    Nucl. Instrum. Meth. B 242 (2006) 285-288

  174. A. Schindler, B. Rauschenbach,
    Ultrapräzisions-Formgebung und Glättung im Nanometerbereich
    Industrie Management 21 (2005) 49-52

  175. B. Ziberi, F. Frost, Th. Höche, B. Rauschenbach,
    Ripple pattern formation on silicon surfaces by low-energy ion-beam erosion: Experiment and theory
    Phys. Rev. B 72 (2005) 235310

  176. J.W. Gerlach, Y. Bohne, S. Mändl, B. Rauschenbach, W. Assmann, F. Grüner, M. Schubert,
    Enrichment Effects During Ion Beam Sputter Deposition of Mg Alloys
    Jahresbericht 2004, Beschleunigerlabor Garching (2005) 65

  177. B. Rauschenbach,
    Low-energy ion bombardment induced nanostructures on surfaces
    Proceed. 17th Intern. Conf. Ion-Surface Interactions, Moskau (2005) 42-47

  178. D. Manova, Y. Bohne, J.W. Gerlach, S. Mändl, H. Neumann, B. Rauschenbach,
    Phase formation after nitrogen implantation into molybdenum
    Nucl. Instrum. Meth. B 240 (2005) 208-213

  179. E. Eiper, A. Hofmann, J.W. Gerlach, B. Rauschenbach, J. Keckes,
    Anisotropic intrinsic and extrinsic stresses in epitaxial wurtzitic GaN thin film on gamma-LiAlO2(100)
    J. Cryst. Growth 284 (2005) 561

  180. A. Schindler, T. Hänsel, F. Frost, G. Böhm, W. Frank, A. Nickel, Th. Arnold, R. Schwabe, S. Gürtler, S. Görsch, B. Rauschenbach,
    Modern Methods of Highly Precise Figuring and Polishing
    Glass Science and Technology 78 (Suppl. C) (2005) 111

  181. B. Ziberi, F. Frost, B. Rauschenbach, T. Höche,
    Highly ordered self-organized dot patterns on Si surfaces by low-energy ion beam erosion
    Appl. Phys. Lett. 87 (2005) 033113

  182. S. Mändl, G. Thorwarth, B. Stritzker, B. Rauschenbach, ,
    Two-dimensional Texture and Sheath Evolution in Metal Plasma Immersion Ion Implantation,
    Surf. Coat. Tech. 200 (2005) 589-593

  183. S. Mändl, J.W. Gerlach, B. Rauschenbach ,
    Nitride Formation in Transition Metals During High Fluence High Temperature Implantation,
    Surf. Coat. Tech. 200 (2005) 584-588

  184. D. Manova, S. Mändl, H. Neumann, B. Rauschenbach, ,
    Wear Behaviour of Martensitic Stainless Steels after PIII Surface Treatment,
    Surf. Coat. Tech. 200 (2005) 137-140

  185. S. Mändl, D. Manova, H. Neumann, M.T. Pham, E. Richter, B. Rauschenbach, ,
    Correlation Between PIII Nitriding Parameters and Corrosion Behaviour of Austenitic Stainless Steels,
    Surf. Coat. Tech. 200 (2005) 104-108

  186. E. Schubert, T. Höche, F. Frost, B. Rauschenbach,
    Nanostructure fabrication by glancing angle ion beam assisted deposition of silicon
    Appl. Phys. A online (2005) 1-6

  187. E. Schubert, F. Frost, B. Ziberi, G. Wagner, H. Neumann, B. Rauschenbach,
    Ion beam sputter deposition of soft x-ray Mo/Si multilayer mirrors
    J. Vac. Sci. Technol. B 23 (2005) 959-965

  188. S. Mändl, J.W. Gerlach, B. Rauschenbach,
    Surface Modification of NiTi for Orthopaedic Braces by Plasma Immersion Ion Implantation
    Surf. Coat. Tech. 196 (2005) 293-297

  189. S. Mändl, W. Attenberger, B. Stritzker, B. Rauschenbach,
    Disorder Formation in Rutile During Ion Assisted Deposition
    Surf. Coat. Tech. 196 (2005) 76-80

  190. D.M. Seeger, C. Blawert, W. Dietzel, Y. Bohne, S. Mändl, B. Rauschenbach,
    Comparison of As-Cast and Plasma Deposited Commercial Magnesium Alloys
    Magnesium Technologie 2005, Edited by Neelameggham, H.I. Kaplan and B.R. Powell, TMS (The Minerals, Metals & Materials Society) (2005) 323-328

  191. S. Mändl, B. Fritzsche, D. Manova, D. Hirsch, H. Neumann, E. Richter, B. Rauschenbach,
    Wear Reduction in AISI 630 Martensitic Stainless Steel after Energetic Nitrogen Ion Implantation
    Surf. Coat. Tech. 195 (2005) 258-263

  192. J. Dienelt, K. Zimmer, J. von Sonntag, B. Rauschenbach, C. Bundesmann,
    Roughness and damage of a GaAs surface after chemically assisted ion beam etching with Cl2/Ar+
    Microelectron Eng 78-79 (2005) 457-463

  193. K. Zimmer, R. Böhme, B. Rauschenbach,
    Adsorbed layer etching of fused silica by excimer laser with nanometer depth precision
    Microelectron. Eng. 78-79 (2005) 324-330

  194. B. Ziberi, F. Frost, B. Rauschenbach,
    Dot pattern formation on Si surfaces by low-energy ion beam erosion
    MRS Proceedings Vol. 849 (2005) KK 6.2

  195. A. Schindler, F. Frost, A. Nickel, T. Hänsel, B. Rauschenbach,
    Ion beam smoothing of surfaces
    1st Vienna Intern. Conf. on Mico- and Nano-Technology , Wien, 9.-11.3. (2005) 367-374

  196. S. Mändl, D. Manova, D. Hirsch, H. Neumann, B. Rauschenbach,
    Comparison of Hardness Enhancement and Wear Mechanisms in Low Temperature Nitrided Austenitic and Martensitic Stainless Steel
    Mater. Res. Soc. Symp. Proc. 843 (2005) T3.9.1-T3.9.5

  197. R. Böhme, J. Zajadacz, K. Zimmer, B. Rauschenbach,
    Topography and roughness evolution of microstructured surfaces at laser-induced backside wet etching
    Appl. Phys. A 80 (2005) 433-438

  198. E. Schubert, N. Razek, F. Frost, A. Schindler, B. Rauschenbach,
    GaAs surface cleaning by low-energy hydrogen ion bombardment at moderate temperatures
    J. Appl. Phys. 97 (2005) 023511-1-8

  199. E. Schubert, S. Mändl, H. Neumann, B. Rauschenbach,
    Real-time in situ spectroscopic ellipsometry investigation of the amorphous to crystalline phase transition in Mo single layers
    Appl. Phys. A 80 (2005) 47-50

  200. A. Schindler, T. Hänsel, F. Frost, A. Nickel, R. Fechner, B. Rauschenbach,
    Recent achievements on ion beam techniques for optic fabrication
    Conference on Optical Fabrication and Testing, Optical Society of America - OSA, Rochester, 10. - 13. 10. (2004) OMD3

  201. Y. Bohne, N. Shevchenko, F. Prokert, J. von Borany, B. Rauschenbach, W. Möller,
    In situ X-ray diffraction investigations during high-energy oxygen ion implantation in tramsition metals
    Vacuum 76 (2004) 281-285

  202. D. Manova, W. Attenberger, S. Mändl, B. Stritzker, B. Rauschenbach,
    Evolution of Local Texture and Grain Morphology in Metal Plasma Immersion Ion Implantation and Deposition
    J. Vac. Sci. Technol. A 22 (2004) 2299-2305

  203. J. Dienelt, J. von Sonntag, K. Zimmer, B. Rauschenbach,
    Structuring of GaAs. I. Chemical dry etching: Temperature und chlorine pressure dependence of etch rates
    J. Vac. Sci. Technol. B 22(4) (2004) 1964-1969

  204. A. Schindler, T. Hänsel, F. Frost, A. Nickel, R. Fechner, B. Rauschenbach, ,
    Recent achievements on ion beam techniques for microoptics fabrication
    10th Microoptics Conference MOC 04, Jena, 1.-3.09. (2004) K-7

  205. K. Zimmer, R. Böhme, B. Rauschenbach,
    Laser etching of fused silica using an adsorbed toluene layer
    Appl. Phys. A 79 (2004) 1883-1885

  206. T. Höche, R. Böhme, J. W. Gerlach, F. Frost, K. Zimmer, B. Rauschenbach,
    Semiconductor Nanowires Prepared by Diffraction-Mask-Projection Excimer-Laser Patterning
    Nano Letters 4 (2004) 895-897

  207. J.W. Gerlach, T. Höche, F. Frost, B. Rauschenbach,
    Ion beam assisted MBE of GaN on epitaxial TiN films
    Thin Solid Films 459 (2004) 13-16

  208. S. Mändl, B. Rauschenbach,
    Comparison of Expanded Austenite and Expanded Martensite Formed After Nitrogen PIII
    Surf. Coat. Tech. 186 (2004) 277-281

  209. S. Mändl, D. Manova, B. Rauschenbach,
    Transparent AlN Layers Formed by Metal Plasma Immersion Ion Implantation
    Surf. Coat. Tech. 186 (2004) 82-87

  210. D. Manova, F. Scholze, S. Mändl, H. Neumann, B. Rauschenbach,
    Absolute Dose Calibration in PIII
    Surf. Coat. Tech. 186 (2004) 29-33

  211. D. Manova, H. Neumann, S. Mändl, B. Rauschenbach,
    Three-Dimensional Effects for Two-Dimensional Samples in Plasma Immersion Ion Implantation
    J. Appl. Phys. 96 (2004) 934-936

  212. S. Sienz, J.W. Gerlach, T. Höche, A. Sidorenko, B. Rauschenbach,
    Ion-beam-assisted molecular-beam epitaxy: a method to deposit gallium nitride films with high crystalline quality
    Thin Solid Films 458(1-2) (2004) 63-66

  213. B. Ziberi, F. Frost, M. Tartz, H. Neumann, B. Rauschenbach,
    Importance of ion beam parameters on self-organized pattern formation on semiconductor surfaces by ion beam erosion
    Thin Solid Films 459 (2004) 106-110

  214. D. Manova, S. Mändl, B. Rauschenbach,
    Evolution of Surface Morphology During Ion Nitriding of Aluminium
    Surf. Coat. Tech. 180/181 (2004) 118-121

  215. S. Mändl, D. Manova, J.W. Gerlach, W. Assmann, H. Neumann, B. Rauschenbach,
    High Temperature Nitrogen PIII into Molybdenum
    Surf. Coat. Tech. 180/181 (2004) 362-366

  216. S. Sienz, J.W. Gerlach, T. Höche, A. Sidorenko, T. G. Mayerhöfer, G. Benndorf, B. Rauschenbach,
    Comparison of ion-beam-assisted molecular beam epitaxy with conventional molecular beam epitaxy of thin hexagonal gallium nitride films
    J. Cryst. Growth 264/1-3 (2004) 184-191

  217. F. Frost, B. Ziberi, T. Höche, B. Rauschenbach,
    The shape and ordering of self-organized nanostructures by ion sputtering
    Nucl. Instrum. Meth. B 216 (2004) 9-19

  218. J. Keckes, S. Six, J.W. Gerlach, B. Rauschenbach,
    Temperature dependence of in-plane stresses in sublayers of Al/AlN/Al2O3(0001) structure
    J. Cryst. Growth 262 (2004) 119-123

  219. S. Mändl, B. Rauschenbach,
    Formation of Wear Resistant Steel Surfaces by Plasma Immersion Ion Implantation
    AIP Conference Proceedings 680: 17th Int. Conf. on Application of Accelerators in Research and Industry 680 (2003) 635-638

  220. S. Mändl, B. Rauschenbach,
    Plasma Stream Homogeneity During Metal Plasma Immersion Ion Implantation & Deposition
    IEEE Trans. Plasma Science 31 (2003) 968-972

  221. J. Keckes, A. Wenzel, J.W. Gerlach, B. Rauschenbach,
    Annealing of the radiation damage in Mg-implanted GaN thin films: Temperature development of lattice parameters and stresses
    Nucl. Instrum. Meth. B 211 (2003) 519-523

  222. B. Rauschenbach, A. Schindler,
    Sandstrahler in der Nanowelt
    Spektrum der Wissenschaft Oktober (2003) 81-82

  223. T. Chassé, H. Neumann, B. Ocker, M. Scherer, W. Frank, F. Frost, D. Hirsch, A. Schindler, G. Wagner, M. Lorenz, G. Otto, M. Zeuner, B. Rauschenbach,
    Mo/Si-Multilayers for EUV-Lithography by Ion Beam Assisted Deposition
    Vacuum 71 (2003) 407

  224. S. Mändl, D. Manova, B. Rauschenbach,
    Interplay of Surface Adsorption and Preferential Sputtering in Metal Plasma Immersion Ion Implantation and Deposition
    Nucl. Instrum. Meth. B 206 (2003) 663-667

  225. P. Huber, D. Manova, S. Mändl, B. Rauschenbach,
    Formation of TiN, TiC and TiCN by MePIIID
    Surf. Coat. Technol. 174/175 (2003) 1243-1247

  226. S. Mändl, J.W. Gerlach, W. Assmann, B. Rauschenbach,
    Phase Formation and Diffusion After Nitrogen PIII in Molybdenum
    Surf. Coat. Technol. 174/175 (2003) 1238-1242

  227. S. Mändl, F. Scholze, H. Neumann, B. Rauschenbach,
    Nitrogen Diffusivity in Expanded Austenite
    Surf. Coat. Technol. 174/175 (2003) 1191-1195

  228. S. Mändl, D. Manova, H. Neumann, B. Rauschenbach,
    Textured Film Deposition Using Metals Ions From a Plasma
    Proc. XXVIth Int. Conf. on Phenomena in Ionized Gases 3 (2003) 185-186

  229. F. Frost, B. Rauschenbach ,
    Nanostructuring of solid surfaces by ion beam erosion
    Appl. Phys. A Mater. 77 (2003) 1-9

  230. T. Chassé, H. Neumann, B. Rauschenbach,
    Ion beam assisted deposition of multi-layer X-ray mirrors for the extreme ultraviolet lithography
    Nucl. Instrum. Meth. B 206 (2003) 377-381

  231. C. Hammerl, Y. Bohne, W. Assmann, K. Helming, B. Rauschenbach,
    Formation of buried oxide layers in titanium by high-fluence oxygen ion implantation
    Nucl. Instrum. Meth. B 206 (2003) 1072-1076

  232. B. Rauschenbach, S. Mändl,
    Plasma-sheath expansion around trenches in plasma immersion ion implantation
    Nucl. Instr. Meth. B 206 (2003) 803-807

  233. S. Mändl, J.W. Gerlach, B. Rauschenbach,
    Thickness of Ion Implanted Layers as Determined by Elastic Recoil Detection Analysis and Spectroscopic Ellipsometry
    Nucl. Instrum. Meth. B 206 (2003) 668-672

  234. S. Mändl, R. Sader, G. Thorwarth, D. Krause, H.-F. Zeilhofer, H.H. Horch, B. Rauschenbach,
    Biocompatibility of Titanium Based Implants Treated with Plasma Immersion Ion Implantation
    Nucl. Instrum. Meth. B 206 (2003) 517-521

  235. A. Köhler, J.W. Gerlach, T. Höche, T. Chassé, H. Neumann, W. Frank, G. Wagner and B. Rauschenbach,
    Mo-Si Interface Formation by Ion Beam Sputter Deposition
    Mat. Res. Soc. Symp. Proc. Vol. 749 (2003) W17.12.1-6

  236. D. Manova, W. Attenberger, S. Mändl, B. Stritzker, B. Rauschenbach,
    Aluminum diffusion and nitrogen sputter yield for nitrogen plasma immersion ion implantation into aluminum
    J. Vac. Sci. Technol. A 21 (2003) 643-648

  237. P. Huber, D. Manova, S. Mändl, B. Rauschenbach,
    Homogeneity of metal plasma immersion ion implantation and deposition
    Vacuum 69 (2003) 133-137

  238. B. Rauschenbach,
    Ion beam assisted deposition - a processing technique for preparing thin films for high-technology applications
    VACUUM 69 (2003) 3-10

  239. N. Razek, K. Otte, T. Chassè, D. Hirsch, A. Schindler, F. Frost, B. Rauschenbach,
    GaAs surface cleaning by low energy hydrogen ion beam treatment
    J. Vac. Sci. Technol. A 20 (2002) 1492-1497

  240. A. Kritschil, A. Kielburg, H. Witte, A. Krost, J. Christen, A. Wenzel, B. Rauschenbach,
    Electrical characterization of deep defect states in gallium nititde coimplanted with magnesium and sulfur ions
    Mater. Sci. Engng. B 93 (2002) 85-89

  241. J.W. Gerlach, S. Sienz, W. Attenberger, B. Rauschenbach,
    Competition of epitaxy and ion beam irradiation-determined texture during ion beam assisted deposition of gallium nitride films on r-plane sapphire
    phys. stat. sol (c) 1 (2002) 161-165

  242. S. Sienz, B. Rauschenbach, A. Wenzel, A. Lell, S. Bader, V. Härle,
    In-situ stress measurement during the ion implantation-induced doping of gallium nitride
    Thin Solid Films 415 (2002) 1-4

  243. S. Mändl, R. Sader, D. Krause, G. Thorwarth, H.-F. Zeilhofer, H.H. Horch, B. Rauschenbach,
    Investigation on Plasma Immersion Ion Implantation Treated Medical Implants
    Genet. Anal. Biomol. Eng. 19 (2002) 131-134

  244. S. Mändl, B. Rauschenbach,
    Plasma Stream Homogeneity During Metal Plasma Immersion Ion Implantation & Deposition
    Proc. XXth Int. Symp. on Discharges and Electrical Insulation in Vaccum, (IEEE Press, Piscataway, NJ, 2002) 1 (2002) 455-458

  245. S. Mändl, B. Rauschenbach,
    Improving the Biocompatibility of Medical Implants with Plasma Immersion Ion Implantation
    Surf. Coat. Technol. 156 (2002) 276-283

  246. S. Sienz, S. Mändl, B. Rauschenbach,
    In-Situ Stress Measurements During Low Energy Nitriding of Stainless Steel
    Surf. Coat. Technol. 156 (2002) 185-189

  247. P. Huber, D. Manova, S. Mändl, B. Rauschenbach,
    Lateral Texture Evolution During Formation of TiN by MePIIID
    Surf. Coat. Technol. 156 (2002) 176-181

  248. S. Mändl, B. Rauschenbach,
    Concentration Dependent Nitrogen Diffusion Coefficient in Expanded Austenite Formed by Ion Implantation
    J. Appl. Phys. 91 (2002) 9737-9742

  249. S. Mändl, D. Manova, B. Rauschenbach,
    Balancing Incident Heat and Ion Flow for Process Optimization in Plasma Based Ion Implantation
    J. Phys. D 35 (2002) 1141-1148

  250. S. Mändl, B. Stritzker, B. Rauschenbach, ,
    In-Situ Diffusion Measurements During RBS Analysis of Polymers Coated with Aluminium
    Nucl. Instrum. Meth. B 190 (2002) 728-731

  251. P. Huber, D. Manova, S. Mändl, B. Rauschenbach,
    Lateral Homogeneity Variation in Metal Plasma Immersion Ion Implantation and Deposition
    Surf. Coat. Technol. 151/152 (2002) 72-75

  252. D. Manova, P. Huber, S. Sienz, J.W. Gerlach, S. Mändl, B. Rauschenbach,
    Dependence of Ion Beam Induced Nitrogen Diffusion in Aluminum on Oxygen Contamination
    J. Vac. Sci. Technol. A 20 (2002) 206-213

  253. J. Keckes, S. Six, W. Tesch, R. Resel, B. Rauschenbach ,
    Evaluation of thermal and growth stresses in heteroepitaxial AIN thin films formed on (0 0 0 1) sapphire by pulsed laser ablation
    Jour. Of Crystal Growth 240 (2002) 80-86

  254. K. Zimmer, R. Böhme, A. Braun, B. Rauschenbach, F. Bigl ,
    Excimer laser-induced etching of sub-micron surface relief gratings in fused silica using phase grating projection
    Appl. Phys. A 74 (2002) 453-456

  255. A. Krtschil, A. Kielburg, H. Witte, J. Christen, A. Krost, A. Wenzel, B. Rauschenbach ,
    Electrical characterization of magnesium implanted gallium nitride
    Journal of App. Phy. 91 (2002) 178-182

  256. P. Huber, D. Manova, S. Mändl, B. Rauschenbach ,
    Lateral homogeneity variation in metal plasma immersion ion implantation and deposition
    Surf. Coat. Tech. 151-152 (2002) 355-358

  257. D. Manova, M. Schreck, B. Stritzker, B. Rauschenbach ,
    Orientation dependent sputter yield of aluminium
    Surf. Coat. Tech. 151-152 (2002) 72-75

  258. J.W. Gerlach. S. Sienz, W. Attenberger, B. Rauschenbach, ,
    Influence of defects in low-energy nitrogen ion beam assisted gallium nitride thin film deposition
    Physica B 308-310 (2002) 81-84

  259. K. Otte, T. Chassé, G. Lippold, B. Rauschenbach, R. Szargan ,
    Chemical defect explantation for the effect of postdeposition treatments on CuInSe2
    J. Appl. Phys. 91 (2002) 1624-1627

  260. K. Otte, T. Chassé, G. Lippold, B. Rauschenbach, R. Szargan ,
    Chemical defect explantation for the effect of postdeposition treatments on CuInSe2
    J. Appl. Phys. 91 (2002) 1624-1627

  261. D. Manova, P. Huber, S. Sienz, J.W. Gerlach, S. Mändl, B. Rauschenbach ,
    Dependence of ion beam induced nitrogen diffusion in aluminum on oxygen impurities
    J. Vac. Sci. Technol. A20 (2002) 206-213

  262. F. Frost, D. Hirsch, A. Schindler, B. Rauschenbach,
    AFM tip calibration using nanometer-sized structures induced by ion beam sputtering
    Proceedings of SPIE 4449 (2001) 225-234

  263. J. Keckes, J. W. Gerlach, R. Averbeck, H. Riechert, S. Bader, B. Hahn, H.-J. Lugauer, A. Lell, V. Härle, A. Wenzel,B. Rauschenbach ,
    Temperature dependence of stresses in GaN thin films grown on (0001) sapphire: Modelling of thermal stresses
    Applied Physics Letters 79 (2001) 4307-4309

  264. J. Dienelt, K. Zimmer, B. Rauschenbach ,
    Etching behaviour of GaAs with chlorine chemically assisted ion beam etching depending on the surface temperature
    GaAs 2001 Conference Proceedings, The 9th European Gallium Arsenide and other semiconductors Application Symposium, London 2001, published by Microwave Engineering Europe, CMP Europe ltd. (2001) 9-12

  265. J. Dienelt, K. Zimmer, B. Rauschenbach ,
    Etching behaviour of GaAs with chlorine chemically assisted ion beam etching depending on the surface temperature
    GaAs 2001 Conference Proceedings, The 9th European Gallium Arsenide and other semiconductors Application Symposium, London 2001, published by Microwave Engineering Europe, CMP Europe ltd. (2001) 9-12

  266. D. Manova, S. Mändl, B. Rauschenbach ,
    Heat balance during plasma immersion ion implantation
    Plasma Sources Sci. Technol. 10 (2001) 423-429

  267. R. Sader, S. Mändl, D. Krause G. Thorwarth F. Zeilhofer H. H. Horch B. Rauschenbach ,
    Surface Modification of Medical Titanium Implants with PIII
    Micro- and Nanostructures of Biological Systems, eds. G. Bischoff and H.-J. Hein (Shaker-Verlag, Aachen 2001) (2001) 121-134

  268. D. Manova, P. Huber, S. Mändl, B. Rauschenbach ,
    Filtered Arc Deposition and Implantation of Aluminium Nitride
    Surface Coatings and Technology 142/144 (2001) 61-66

  269. B. Rauschenbach ,
    Plasma Immersion Implantation
    The Enzyclopedia of Materials, Science and Technology, Elsevier Science Oxford 10 (2001) 1-5

  270. W. Attenberger, G. Thorwarth, D. Manova, S. Mändl, B. Stritzker, B. Rauschenbach ,
    Interface Properties of TiO2 on Si Formed by Simultaneous Implantation and Deposition of Titanium and Oxygen Ions
    Surf. Coat. Tech. 142-144 (2001) 412-417

  271. C. Liu, A. Wenzel, B. Rauschenbach, E. Alves, A. D. Sequeira, N. Franco, M. F. da Silva, J. C, Soares, X. J. Fan ,
    Amorphization of GaN by ion implantation
    Nuclear Instuments an Methods in Physics Research 178 (2001) 200-203

  272. C. Hammerl, B. Rauschenbach ,
    Synthesis ob buried metal oxide films by high fluence oxygen ion implantation into metals
    Nuclear Instuments an Methods in Physics Research 178 (2001) 220-223

  273. T. Pohl, C. Hammerl, B. Rauschenbach, U. Rüde ,
    Computer simulation of Ostwald ripening for ion beam synthesis of buried layers
    Nuclear Instuments an Methods in Physics Research 178 (2001) 135-137

  274. P. Huber, D. Manova, S. Mändl, B. Rauschenbach ,
    Optical Characterisation of TiN Produced by MePIIID
    Surface Coatings and Technology 142/144 (2001) 418-423

  275. S. Mändl, G. Thorwarth, P. Huber, S. Schoser B. Rauschenbach ,
    Comparison of trenches treated in PIII-systems
    Surf. Coat. Tech. 139 (2001) 81-86

  276. D. Manova, S. Mändl, B. Rauschenbach ,
    Oxygen Behaviour During PIII-Nitriding of Aluminium
    Nucl. Instrum. Meth. B 178 (2001) 291-296

  277. S. Mändl, G. Thorwarth, D. Manova, B. Rauschenbach ,
    Influence of Ion Energy on Titanium Oxide Formation by Vacuum Arc Deposition and Implantation
    Nucl. Instrum. Meth. B 178 (2001) 148-153

  278. V. Lavrentiev, C. Hammerl, B. Rauschenbach, A. Pisanenko, O. Kukharenko ,
    alfa-to-beta-phase transformation in titanium induced by power ion-beam irradiation
    Phil.Magazine A 81 (2001) 511-527

  279. V. Lavrentiev, C. Hammerl, B. Rauschenbach, O. Kukharenko ,
    Formation of hardened surface layers in titanium under irradiation with intense ion beams
    Scripta mater. 44 (2001) 625-630

  280. S. Mändl, G. Thorwarth, P. Huber, S. Schoser, B. Rauschenbach ,
    Comparison of trenches treated in PIII-systems
    Surf. Coat. Technol. 139 (2001) 81-86

  281. S. Mändl, D. Krause, G. Thorwarth, R. Sader, F. Zeilhofer H. H. Horch, B. Rauschenbach ,
    PIII Treatment of Medical Implants
    Surface Coatings and Technology 142/144 (2001) 1046-1050

  282. S. Mändl, B. Rauschenbach ,
    Nitrogen diffusion in austenitic stainless steel and formation of expanded austenite
    Defect and Diffusion Forum 188/190 (2001) 125-136

  283. A. Krtschil, A. Kielburg, H. Witte, A. Krost, J. Christen, A. Wenzel, B. Rauschenbach ,
    Electrical Charaterization of Ion Implantation Induced Defect States in Gallium Nitride
    IPAP Conf. Series 1 (2001) 625-628

  284. J. W. Gerlach, R. Schwertberger, D. Schrupp, S. Sienz, W. Attenberger, B. Rauschenbach ,
    Influence of the Ion Irradiation during Low-Energy Nitrogen Ion Assisted Deposition of Wurtzitic Gallium Nitride Films on Sapphire
    IPAP Conf. Series 1 (2001) 202-205

  285. S. Mändl, R. Günzel, C. Hammerl, E. Richter, B. Rauschenbach, W. Möller ,
    PIII-nitriding of boron implantated stainless steel
    Surf. Coat. Tech. 136 (2001) 176-180

  286. G. Thorwarth, S. Mändl, B. Rauschenbach ,
    Rutile formation and oxygen diffusion in oxygen PIII-treated titanium
    Surface and Coatings Technology 136 (2001) 236-240

  287. G. Keller, S. Mändl, U. Rüde, B. Rauschenbach ,
    Ion mass and scaling effects in PIII simulation
    Surf. Coat. Tech. 136 (2001) 117-121

  288. J.W. Gerlach, G. Thorwarth, D. Manova, S. Six, S. Mändl, B. Rauschenbach, W. Assmann, F. Grüner ,
    Element distributions in aluminium nitride thin films
    LMU und TU München - Jahresbericht 2001 (2001)

  289. J.W. Gerlach, G. Thorwarth, S. Mändl, B. Rauschenbach, W. Assmann, F. Grüner, M. Schubert ,
    Diffusion mechanisms in biocompatible titania surface layers
    Beschleunigerlabor Garching - Jahresbericht 2001 (2001)

  290. J.W. Gerlach, G. Thorwarth, S. Mändl, B. Rauschenbach, W. Assmann, F. Grüner, M. Schubert ,
    Diffusion mechanisms in biocompatible titania surface layers
    Beschleunigerlabor Garching - Jahresbericht 2001 (2001)

  291. A. Krtschil, A. Kielburg, H. Witte, A. Krost, J. Christen, A. Wenzel, B. Rauschenbach ,
    Implantation induced defect states in gallium nitride and their annealing behavior
    Phys. Stat. Sol. 228 (2001) 325-329

  292. A. Wenzel, H. Karl, C. Liu, B. Rauschenbach ,
    Distribution of ion implanted dopants in gallium nitride
    Proceed. Intern. Conf. On Ion Implantation, IEEE-Proceed. XXVI (2001) 99-102

  293. P. Huber, D. Manova, S. Mändl, W. Assmann, B. Rauschenbach ,
    Formation of textured TiN-layers on Si by metal plasma immersion ion implantation and deposition
    Proceed. Intern. Conf. on Ion Implantation, IEEE Proceed. XXVI (2001) 508-511

  294. B. Rauschenbach, S. Mändl, J.K. Gregory, R. Sader, D. Krause, W. Assmann, E. Steinhauser ,
    Oberflächenbehandlungen von Titanwerkstoffen
    Biomaterialien 2 (2001) 215-222

  295. S. Mändl, D. Krause, G. Thorwarth, R. Sader, F. Zeilhofer, H.H. Horch, B. Rauschenbach ,
    Plasma immersion ion implantation treatment of medical implants
    Surf. Coat. Tech. 142-144 (2001) 1046-1050

  296. S. Six, J.W. Gerlach, B. Rauschenbach ,
    Ion beam assisted pulsed laser deposition of epitaxial aluminium nitride thin films on sapphire substrates
    Surface and Coatings Technology 142-144 (2001) 397-401

  297. B. Rauschenbach, S. Sienz, S. Six, J.W. Gerlach ,
    Synthesis of metal nitrides by low-energy ion assisted film growth
    Surface and Coatings Technology 142-144 (2001) 371-375

  298. B. Rauschenbach ,
    Ion implantation, isolation and thermal processing of GaN and related materials
    III-Nitride Semiconductors: Electrical, Structural and Deffects Properties (2000) 193-249

  299. S. Mändl, G. Thorwarth, B. Rauschenbach ,
    Textured titanium oxide thin films produced by vacuum arc deposition
    Surf. Coat. Tech. 133-134 (2000) 283-288

  300. B. Rauschenbach, J. W. Gerlach ,
    Texture Development in Titanium Nitride Films Grown by Low-Energy Ion Assisted Deposition
    Cryst. Res. Technol. 35 (2000) 675-688

  301. S. Mändl, B. Rauschenbach ,
    Anisotropic strain in nitrided austenitic stainless steel
    J. Appl. Phys. 88 (2000) 3323-3329

  302. B. Rauschenbach ,
    Ion assisted deposition of thin layers
    Advances in Solid State Physics, Ed. B. Kramer, Vieweg & Sohn Braunschweig 40 (2000) 439

  303. J. Keckes, J. W. Gerlach, B. Rauschenbach ,
    Residual stresses in cubic and hexagonal GaN grown on sapphire using ion beam-assisted deposition
    Journal of Crystal Growth 219 (2000) 1-9

  304. S. Mändl, B. Rauschenbach ,
    Plasma-Immersions-Ionenimplantation: Ein neues Verfahren zur homogenen Oberflächenmodifizierung komplex geformter medizinischer Implantate
    Biomedizinische Technik 45 (2000) 193-216

  305. S. Mändl, B. Rauschenbach ,
    Plasma-Immersions-Ionenimplantation: Ein neues Verfahren zur homogenen Oberflächenmodifizierung komplex geformter medizinischer Implantate
    Biomedizinische Technik 45 (2000) 193-216

  306. S. Mändl, R. Günzel, E. Richter, W. Möller, B. Rauschenbach ,
    Annealing behaviour of nitrogen implanted stainless steel
    Surf. Coat. Tech. 128-129 (2000) 423-428

  307. S. Mändl, R. Günzel, E. Richter, W. Möller, B. Rauschenbach ,
    Annealing behaviour of nitrogen implanted stainless steel
    Surf. Coat. Tech. 128-129 (2000) 423-428

  308. D. Manova, P. Huber, S. Mändl, B. Rauschenbach ,
    Surface modification of aluminium by plasma immersion ion implantation
    Surf. Coat. Tech. 128-129 (2000) 249-255

  309. G. Thorwarth, S. Mändl, B. Rauschenbach ,
    Plasma immersion ion implantation using titanium and oxygen ions
    Surface and Coatings Technology 128-129 (2000) 116-120

  310. G. Thorwarth, S. Mändl, B. Rauschenbach ,
    Plasma immersion ion implantation using titanium and oxygen ions
    Surface and Coatings Technology 128-129 (2000) 116-120

  311. J. W. Gerlach, R. Schwertberger, D. Schrupp, B. Rauschenbach, H. Neumann, M. Zeuner ,
    Texture and epitaxy by ion beam assisted deposition of gallium nitride
    Surf. Coat. Tech. 128-129 (2000) 286-291

  312. J. W. Gerlach, R. Schwertberger, D. Schrupp, B. Rauschenbach, H. Neumann, M. Zeuner ,
    Texture and epitaxy by ion beam assisted deposition of gallium nitride
    Surf. Coat. Tech. 128-129 (2000) 286-291

  313. G. Keller, U. Rüde, L. Stals, S. Mändl, B. Rauschenbach ,
    Simulation of trench homogeneity in plasma immersion ion implantation
    J. Appl. Phys. 88 (2000) 1111-1117

  314. S. Six, C. Hammerl, S. Mändl B. Rauschenbach ,
    Characterisation of oxygen and nitrogen implanted metals
    HASYLAB - Report (1999) 935

  315. C. Hammerl, T. Pohl, B. Rauschenbach, G. Goerigk ,
    SAXS investigation of high fluence oxygen implanted thin metal films
    HASYLAB - Report (1999) 597

  316. M. Zeitler, S. Sienz, H. Neumann, M. Zeuner, J.W. Gerlach, B. Rauschenbach ,
    In situ stress analysis of boron nitride films prepared by ion beam assisted deposition
    Nucl. Instr. Meth. Phys. Res. B139 (1998) 327-331


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