Dipl.-Phys. Hendrik Paetzelt

Wissenschaftlicher Mitarbeiter / Nichtkonventionelle Ultrapräzisions-Oberflächenbearbeitung / Physikalische Abteilung

Leibniz-Institut für Oberflächenmodifizierung e. V.
Permoserstr. 15 / D-04318 / Leipzig /


Telefon: +49 (0)341 235 - 2234
Fax: +49 (0)341 235 - 2313

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Liste der Publikationen >>

  1. Th. Arnold, G. Böhm, H. Paetzelt, F. Frost,
    Alternative technologies for asphere and freeform manufacturing
    EOS Optical Technologies Conferences 2017 (ISBN 978-952-68553-3-2), Munich, Germany, 26.-29.06. (2017)

  2. P. Piechulla, J. Bauer, G. Boehm, H. Paetzelt, Th. Arnold,
    Etch Mechanism and Temperature Regimes of an Atmospheric Pressure Chlorine-Based Plasma Jet Process
    Plasma Process. Polym. 13 (2016) 1128-1135

  3. Th. Arnold, G. Böhm, H. Paetzelt,
    Non-conventional ultra-precision manufacturing of ULE® mirrorsurfaces using atmospheric reactive plasma jets
    Paper Nr. 99123N, SPIE Telescopes + Instrumentation, Edinburgh, 26.06.-01.07. (2016)

  4. F. Siewert, T. Zeschke, T. Arnold, H. Paetzelt, V. V. Yashchuk,
    Linear chirped slope profile for spatial calibration in slopemeasuring deflectometry
    Rev. Sci. Instrum. 87 (2016) 051907

  5. Th. Arnold, G. Boehm, H. Paetzelt,
    New Freeform Manufacturing Chains based on atmospheric Plasma Jet Machining
    J. Eur. Opt. Soc.-Rapid 11 (2016) 16002

  6. H. Paetzelt, G. Boehm, Th. Arnold,
    Surface error correction with fine focused plasma jets
    Paper Nr. EOSMTOC Poster_16, EOSMTOC 2015, München, 22.-25.06. (2015)

  7. Th. Arnold, G. Boehm, H. Paetzelt,
    Free Form Manufacturing based on Plasma Jet Machining
    Paper Nr. EOSMTOC III_3 , EOSMTOC 2015, München, 22.-27.06. (2015)

  8. Th. Arnold, G. Boehm, H. Paetzelt,
    New Freeform Manufacturing Chain based on atmosphericPlasma Jet Machining
    Paper Nr. FTh1B.3 Freeform Optics, Proceedings Imaging and Applied Optics 2015, Arlington, USA, 07.-11.06. (2015)

  9. Th. Arnold, G. Boehm, H. Paetzelt, F. Pietag,
    Ion beam and plasma jet based methods in ultra-precision optics manufacturing
    Proc. SPIE, Optics and Measurement Conference 2014 9442 (2015) 944204

  10. H. Paetzelt, G. Böhm, Th. Arnold,
    Etching of silicon surfaces using atmospheric plasma jets
    Plasma Sources Sci. Technol. 24 (2015) 025002

  11. Th. Arnold, G. Böhm, H. Paetzelt,
    Comparison of ultra-precision tactile and optical profilometry free form measurement systems
    Paper Nr. P4.35, EUSPEN 14th International Conference, Dubrovnik, 2.-6.6. (2014) 297V1

  12. H. Paetzelt, G. Böhm, Th. Arnold,
    Ultra precision waviness and figure error correction of silicon crystals by local plasma jet machining
    Paper Nr. P6.25, EUSPEN 14th International Conference, Dubrovnik, 2.-6.6. (2014) 140V2

  13. Th. Arnold, G. Boehm, H. Paetzelt,
    Ultra-Precision Surface Machining with Reactive Plasma Jets
    CONTRIB PLASM PHYS 54 (2014) 145-154

  14. Th. Arnold, G. Böhm, H. Paetzelt,
    Plasma jet polishing of rough fused silica surfaces
    Conference proceedings of the 13th International Conference of the EUSPEN V2 (2013) 19-22

  15. H. Paetzelt, Th. Arnold, G. Böhm, F. Pietag, A. Schindler,
    Surface Patterning by Local Plasma Jet Sacrificial Oxidation of Silicon
    Plasma Process. Polym. 10 (2013) 416-421

  16. Th. Arnold, G. Boehm, H. Paetzelt,
    Plasma jet machining based process chain for the manufacturing of complex shaped synchrotron mirrors
    Paper Nr. P6.05, 12th euspen International Conference, Stockholm, 04.-08.6. (2012) 71V2


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