 Young Researchers Group
Ultra precision machining using atomic particle beams
funded by the German Ministry of Education and Science
R&D topics
- Plasma jet and ion beam precision machining and shaping of surfaces
- Development of new fields in technology and material classes
- Bounding and Development of process chains for industrial needs
- Transfer of technology into regional small/medium enterprises
- Qualification of young researchers and technicians
Project
Ultra precision machining of surfaces using atomic particle beams is a section of nanotechnology. In order to fabricate exact surfaces shapes and structures with depth accuracies in the range of Ångströms we utilize reactive plasma jets and ion beams. The surface area to be machined might be extended from square millimeters up to a few square meters. Surfaces can be planar, convex, or concave in shape.
The properties of modern products are more and more determined by shape accuracy, structure, as well as functionality of its surfaces. Thus, the surface quality requirements are being tightened steadily. Surface machining technologies with accuracies on the atomic scale are strongly demanded from different branches of industry.
Left: Chemically reactive plasma jet with Gaussian tool function.
Right: Schematic of a plasma jet source and cross section of a removal profile
For two decades highly deterministic precision machining methods based on low energy ion irradiation have been developed in IOM. For ten years precision processes based on chemically reactive plasma jets have been developed and investigated. An appropriate combination of both methods could be capable to meet the requirements with respect to surface shape accuracy.
By including technological oriented small and medium enterprises located in the region of Leipzig into the project it is ensured that scientific and technological results can be transferred to industrial products and solutions.
The project will strengthen the position of the regional centre of science and research, especially in the field of ultra precision machining, with respect to the global competitions for the future.
Selection of microwave excited plasma jet sources
Objectives
The young researchers group works on new aspects of the plasma jet and ion beam technology for ultra precision machining of surfaces and develops new applications.
Technologies and the necessary tools are optimized and improved for the application in industrial processes. They are scaled up from laboratory scale to production requirements.
This will be achieved by a close co-operation between IOM and industrial companies that will use potential applications, regarding the regional high-tech enterprises which directly benefit from transfer of technology.
FEM calculated surface topology after plasma jet surface machining
Research topics
The R&D-Project comprises two main topics: plasma jet technology und ion beam technology. Both topics are connected with each other.
(1) Plasma jet technology
- Generation and application of chemically reactive plasma jets on surfaces of different material classes (Si, SiO2, SiC, Si3N4, W, Cr, …)
- Development and optimization of methods and process chains
(2) Ion beam technology
- Development of machining methods for materials that cannot be machined by existing ion beam methods – metals and ceramics
- Optimization of methods for ultra precision sub-aperture machining of surfaces
(3) Plasma jet/ion beam hybride process
- Development of a new process for deterministic machining of materials that cannot be directly machined by plasma jets
(4) Mathematical algorithms
- Development and optimization of enhanced mathematical methods for ultra-precision machining
(5) Development of components
- Development and optimization of plasma jet and ion beam sources
Key data
Term: 1.1.2008 - 31.12.2012
Group member :
Partners
Contakt
Dr. Thomas Arnold
Leibniz-Institut für Oberflächenmodifizierung e.V.
Permoserstr. 15
04318 Leipzig
Germany
Email:
Tel. +49 341 235 3120
|
