Ultra precision machining
using atomic particle beams (UAT)

For two decades highly deterministic precision machining methods based on low energy ion irradiation have been developed in IOM. For ten years precision processes based on chemically reactive plasma jets have been developed and investigated.
An appropriate combination of both methods could be capable to meet the requirements with respect to surface shape accuracy. By including technological oriented small and medium enterprises located in the region of Leipzig into the project it is ensured that scientific and technological results can be transferred to industrial products and solutions.
The project will strengthen the position of the regional centre of science and research, especially in the field of ultra precision machining, with respect to the global competitions for the future.

plasma jet machining on SiC

• BMBF-Initative Innoprofile "Entrepreneurial Regions"
• Project term 5 years
• Start: 01.01.2008    Finish: 31.12.2012
• 9 employees (2 positions financed by internal funds of IOM)
• Division in 4 subprojects
• Cooperation with industrial partners
• Annual Workshop

ion beam figuring