Modular research platform for plasma-based thin film deposition techniques

IOM provides a new and unique tool to modify surfaces and synthesize new functional materials and thin films by applying different physical and chemical non-equilibrium processes. The platform is flexible and modular in design in order to be applicable to different material systems in the long term and to be able to react to research needs that emerge through new developments in fundamentals and applications. First tests with the platform will be carried out on material systems from the fields of switchable layers at low temperatures (controllable surface physics) and energy conversion and storage (electrochemically active surfaces).

Duration: 2019-2020
Funding: 988.248,00 Euro
Project sponsor: Sächsische Aufbaubank (SAB)

Prof. Dr. André Anders
Leibniz Institute of Surface Engineering (IOM)
CEO and Department leader Precision Surfaces IOM
Phone: 49 (0)341 235-2308
E-Mail: andre.anders(at)

This measure is co-financed by tax revenue on the basis of the budget adopted by the Saxon Landtag.