Plasma jets at atmospheric pressure

Miniaturized atmospheric plasma jet source
High-power plasma jet source

Reactive atmospheric pressure plasma jet sources

In this research focus, atmospheric pressure plasma jet sources as well as associated control electronics and high-frequency generators are developed, which are primarily specified for the application field of ultra-precision surface treatment. As a rule, these plasma sources are excited with high frequency (MHz-GHz) and can be operated with reactive gases. The aim of the work is to develop sources for the generation of temporally and spatially highly stable plasma jets for specific applications such as local etching and deposition processes as well as for surface cleaning, decontamination and chemical functionalization. Simulation tools for modelling energy and mass flows at the sources for development will also be used. Plasma jet sources and their necessary peripherals are integrated into systems and transferred into industrial practice together with business partners.


Selected publications

  • G. Böhm, Th. Arnold, H. Paetzelt
    Vorrichtung zur Erzeugung eines Plasma- oder Radikalstrahles
    Gebrauchsmuster DE 202017103165 (2017)

  • A. Lehmann, F. Pietag, Th. Arnold
    Human health risk evaluation of a microwave-driven atmospheric plasma jet as medical device
    Clin. Plasma Med. 7-8 (2017) 16-23

  • Th. Arnold, A. Schindler
    Mass spectrometry at a Ar/SF6/O2 chemically reactive plasma jet
    Physica Status Solidi A 4 (2008) 957 - 960

  • Th. Arnold, S. Grabovski, A. Schindler, H.-E. Wagner
    Spatially resolved mass spectrometry of reactive Ar/SF6/N2 plasma jets
    Surf. Coat. Tech. 200/1-4 (2005) 818-821