Micro- and nano structuring by means of laser radiation

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Mechanisms of laser-assisted thin-film patterning processes and examples of scratch morphology for CIGS solar absorber layers

Laser-based scribing of thin films

The microstructuring of thin layers aims to the production of application-specific structures or patterns to increase the functionality of the films. The current work is mainly focused on layers that address optical, optoelectronic and / or electronic applications, whereby important properties of the structures that are produced by laser micromachining are to guarantee. In the focus of the quality requirements are:

  • Precision in dimension, overlay, roughness and registration
  • Structuring with low-damage of the film as well as the substrate
  • Selectivity of the film ablation to the substrate or other films 

Depending on the structuring task, material system and structure / pattern, different laser material processing techniques can be used for this, in order to utilize suitable layer removal mechanisms to realize the target properties.

Main topics are:

  • Scribing of TCO layers
  • Scribing of thin PV films for the integrated interconnection of solar cells for modules
  • Removal and scribing of materials for organic (opto) electronics
  • Microstructuring of functional layers on (transparent) barrier layers


Selected publications

  • L. Bayer, X. Ye, P. Lorenz and K. Zimmer
    Studies on perovskite film ablation and scribing with ns-, ps- and fs-laser pulses

    Applied Physics A 123 (10) (2017) 619
    doi: 10.1007/s00339-017-1234-5
  • L. Bayer, M. Ehrhardt, P. Lorenz, S. Pisoni, S. Buecheler, A. N. Tiwari and K. Zimmer
    Morphology and topography of perovskite solar cell films ablated and scribed with short and ultrashort laser pulses

    Applied Surface Science 416 (2017) 112-117
  • M. Ehrhardt, A. Wehrmann, P. Lorenz, K. Zimmer
    Patterning of CIGS thin films induced by rear-side laser ablation of polyimide carrier foil

    Applied Physics A 113(2) (2013) 309-313
    DOI: 10.1007/s00339-013-7962-2
  • A. Wehrmann, S. Puttnins, L. Hartmann, M. Ehrhardt, P. Lorenz, K. Zimmer
    Analysis of laser scribes at CIGS thin-film solar cells by localized electrical and optical measurements

    Optics & Laser Technology 44 (2012) 1753-1757
  • A. Wehrmann, H. Schulte-Huxel, M. Ehrhardt, D. Ruthe, K. Zimmer, A. Braun and S. Ragnow
    Change of electrical properties of CIGS thin-film solar cells after structuring with ultrashort laser pulses

    Proc. of SPIE 7921 (2011) 79210T-14
    doi: 10.1117/12.874999