Ultra-precision shaping with plasmas and ions

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Ion beam figuring of aluminium surface

Basics of ion beam assisted ultra-precision shaping and correction of optical surfaces and metal surfaces

Investigations on ion beam-assisted ultra-precision machining aim at the machining of materials such as metals which have not been easily accessible by ion beam technology up to now. In particular, the ion beam processing of aluminium as a material for the production of optical mirrors is investigated and methods for shape correction and smoothing of complex shaped surfaces are developed.

  • Direct ion beam processing of metal surfaces for shape correction (Al, Cu, ...)
  • Planarization/smoothing with scanning sub-aperture ion beams



Selected publications

  • J. Bauer, M. Ulitschka, F. Pietag, T. Arnold
    Improved ion beam tools for ultraprecision figure correction of curved aluminum mirror surfaces
    J. Astron. Telesc. Instrum. Syst. 4 (2018) 046003
    DOI: 10.1117/1.JATIS.4.4.046003
  • J. Bauer, F. Frost, T. Arnold
    Reactive ion beam figuring of optical aluminium surfaces
    J. Phys. D Appl. Phys. 50 (2017) 085101
    DOI: 10.1088/1361-6463/50/8/085101