Ultra-precision shaping with plasmas and ions

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FEM-based process simulation for Plasma Jet Machining
Plasmajet shape correction on silicon surface

Fundamentals of plasma-based machining processes

The research focus investigates plasma-based processes for the modification of solid surfaces. The focus is on gaining fundamental knowledge about the interaction processes taking place on the surface. Different approaches to surface machining such as local plasma dry etching for material removal, preferably of optical materials (e.g. Si, SiC, glasses, glass ceramics), local deposition of thin layers for the purpose of shaping as well as the chemical modification and functionalization of surfaces (cleaning, sterilization, chemical functionalization) are investigated. The research results will be evaluated regarding potential applications.

Selected publications

  • P. Piechulla, J. Bauer, G. Boehm, H. Paetzelt, Th. Arnold
    Etch Mechanism and Temperature Regimes of an Atmospheric Pressure Chlorine-Based Plasma Jet Process
    Plasma Process. Polym. 13 (2016) 1128-1135
    DOI: 10.1002/ppap.201600071

  • H. Paetzelt, G. Böhm, Th. Arnold
    Etching of silicon surfaces using atmospheric plasma jets
    Plasma Sources Sci. Technol. 24 (2015) 025002.