Die Forschungs- und Querschnittsbereiche bieten nach Möglichkeit jedes Semester ein wissenschaftliches Einführungs- und Überblicksmodul für die Promovierenden an. Die Anmeldung erfolgt derzeit direkt bei den Modulverantwortlichen selbst.


Modern optical surfaces for high-end applications such as semiconductor lithography, laser, X-ray radiation, telescopes or space-based optical systems require utmost accuracy of surface form, waviness and roughness. At the same time, the large variety of complex surface forms demand for highly deterministic machining processes.

Particle and energy beam-based technologies like ion beam, plasma and laser machining methods as well as shape cutting technologies like diamond turning provide unique features for ultra-precision surface engineering on the atomic height scale.

The application of these emerging technologies for optical surface fabrication allows to target surface features on the nanometer scale. An interdisciplinary approach to the ultra-precision technologies makes this module a valuable component of the IOM Graduate School for PhD students of engineering and natural sciences.

The module will cover the following topics:

  • Modern trends in optical manufacturing
  • Ion beam based technologies for ultra-precision optics manufacturing
  • Plasma based technologies for ultra-precision surface machining
  • Laser ultra-precision optical surface processing
  • Methods of ultra-precision surface measurement

Please register directly with Prof. Thomas Arnold before July 1st.

Lehrende:Thomas Arnold, Frank Frost, Klaus Zimmer


Day 1: Tuesday, 09 July 2024   


9:00 – 10:30

Ion beam figuring and plasma jet machining – principles and applications
(Prof. Thomas Arnold; lecture)

11:00 – 12:30Surface measurement: Interferometry, Profilometry, Microscopy
(Prof. Thomas Arnold; lecture)
12:30 – 14:00lunch break
14:00 – 15:30

Lab1: Surface measurement systems: Interferometer, Profilometer
(Prof. Thomas Arnold)

Day 2: Wednesday, 10 July 2024

9:00 – 10:30Reactive ion beam etching – principles and applications
(Dr. Frank Frost; lecture)
11:00 – 12:30Laser-based micro- and nanomachining (Dr. Klaus Zimmer; lecture)
12:30 – 14:00lunch break
14:00 – 15:30Lab2: IBF, RIBE, Laser-Labs
(Thomas Arnold, Frank Frost, Klaus Zimmer)

The module provides insights into the synthesis and the surface nanophysics of functional, electrically responsive polyoxometalate-based materials. These molecular metal-oxide clusters can be widely chemically modified, e.g. for specific surface adsorption properties or biocompatibility via DNA-functionalization. Both classical solution-based deposition methods and highly advanced techniques such as ion-beam based ion soft-landing, 3D bio-printing, and photon-based UV-light curing for the controlled deposition and structuring of polyoxometalate compounds on different surface-types will be introduced, as well as important analytical surface methods such as scanning tunneling microscopy and spectroscopy. Besides the pure surface characterization, the latter technique also allows the electron-induced redox switching and the surface modification of the deposited components on the nanoscale. Further, the actual and potential application of these molecular materials in the fields of computing, sensor technology, and medicine will be discussed.

3 days, June 11th to 13th

"Please make a binding registration directly with Kirill Monakhov by 25.04.2024."



1st day: Lectures (5 acad. h)

  • Polyoxometalates and their chemical synthesis (45 min)
  • Ion-soft landing of polyoxometalates on surfaces (45 min)
  • Bio-functionalization of polyoxometalates (45 min)
  • Scanning probe microscopy studies of polyoxometalates (45 min)
  • Application of polyoxometalates (45 min)

2nd day: Experimental lab tour (3 acad. h)

  • Lab tour to ion soft-landing, scanning tunnelling microscope, and 3D bio-printer with UV light curing system

3rd day: Seminar with theoretical exercises (4 acad. h.)