Research Scientist "Ion beam assisted patterning and smoothing" / Field of Research "Ultra-precision Surfaces" and Deputy Chairwoman of the Works Council
Leibniz Institute of Surface Engineering (IOM)
Permoserstr. 15 / 04318 Leipzig / Germany
+49 (0)341 235-3313
annemarie.finzel(at)iom-leipzig.de
Fields of Expertise
- Reactive ion beam etching
- Ion beam assisted patterning and smoothing of surfaces
- Atomic force microscopy
Scientific Career
2007-2010 Bachelor studies in physics, Faculty of Physics and Earth Sciences, University of Leipzig, degree: Bachelor of Science
2010-2012 Master studies in physics, Faculty of Physics and Earth Sciences, University of Leipzig, degree: Master of Science
2012-2015 research scientist / PhD student at Leibniz Institute of Surface Engineering (IOM), University of Leipzig, degree: Dr. rer. nat.
since 2016 research scientist at Leibniz Institute of Surface Engineering (IOM)
Selected Publications
- A. Finzel, F. Koch, G. Dornberg, D. Lehr, F. Frost, T. Glaser, Reactive ion beam etching of highly dispersive, high-efficiency transmission gratings for the VIS range, Opt. Eng. 58 (9) (2019) 092614
- A. Finzel, G. Dornberg, S. Görsch, M. Mitzschke, J. Bauer, F. Frost, Realization of depth reference samples with surfaces amplitudes between 0.1 nm and 5 nm, EPJ Web. Conf. EOS Optical Technologies 215 (2019) 03004
- C. Bundesmann, T. Lautenschläger, D. Spemann, A. Finzel, E. Thelander, M. Mensing, F. Frost, Systematic investigation of the properties of TiO2 films grown by reactive ion beam sputter deposition, Appl. Surf. Sci. 421 (2017) 33
- A. Finzel, J. W. Gerlach, J. Lorbeer, F. Frost, B. Rauschenbach, High-fluence hyperthermal ion irradiation of gallium nitride surfaces at elevated temperatures, Appl. Surf. Sci. 317 (2014) 811