Ion beam-based ablation processes using inert ions for shaping, structuring and smoothing surfaces have experienced an enormous upswing in recent years and are now established key technologies, e.g. in high-end optics manufacturing. Reactive ion beam etching (RIBE) processes in particular are becoming increasingly important. Here, in addition to the purely physical process of atomization, chemical reactions between the surface and the reactive ion (or radical) are also exploited, creating additional degrees of freedom for defined material removal. However, the basic prerequisite is that the constantly increasing accuracy requirements in this high-tech sector (shape accuracy, roughness, process stability and control) can be met. Of central importance here are highly developed and process-adapted ion sources suitable for reactive gas, which must meet certain requirements in terms of stability, process-adapted beam composition, maintenance times, etc. Due to the application-specific necessity, the development and optimization of process-adapted broad-beam ion sources will be increasingly pursued in the future.

A prerequisite for such technological developments is a sophisticated diagnostic platform for the characterization of reactive ion beam processes. With the establishment of the new universal diagnostics platform, the R&D infrastructure in the field of development and application of broad beam ion sources is to be sustainably strengthened and secured, process fundamentals and new applications are to be developed and a basis for the transfer of the expected technological results into industrial use is to be created.

Duration: 2019 – 2021 
Funding: 1.189.584,00 Euro
Funding programme: Sächsische Aufbaubank (SAB)

Contact:
Dr. Frank Frost
Field of Research Ultra-precision Surfaces
Phone: 49 (0)341 235-3309
E-Mail: frank.frost(at)iom-leipzig.de

Dr. Daniel Spemann
Cross-section Unit Tool Development
Phone: 49 (0)341 235-2681
E-Mail: daniel.spemann(at)iom-leipzig.de

The microstructure and properties of films are determined by the film material, the conditions of the substrate surface, and the deposition process parameters. When using plasma-based processes, crystalline films can be obtained at relatively low substrate temperature. Commonly the kinetic energy of ions is used to obtain desired structural effects, and this is accomplished by applying bias to the substrate. However, high energetic particles (>100 eV) cause the formation of defects which are often detrimental for film properties and therefore impede applicability. In this project, we will explore, theoretically and experimentally, an alternative approach for the growth of novel metastable materials, namely the utilization of the potential energy of ions while utilizing moderate kinetic energies for subplantation.

Duration:                    2019-2022
Funding:                    966.260,00 Euro
Funding programme: Leibniz-Kooperative Exzellenz
Cooperation Partner: RWTH Aachen

Contact:
Prof. Dr. André Anders
Leibniz Institute of Surface Engineering (IOM)
Phone: 49 (0)341 235-2308
E-Mail: andre.anders(at)iom-leipzig.de

In a joint project funded by the BMBF and the GRAVOmer network, researchers from the IOM research area "Reactive Ion Beam Assisted Structuring and Smoothing", together with Carl ZEISS Jena GmbH and scia Systems GmbH, want to establish novel ion beam-based manufacturing processes with which inclined surface profiles (blaze profiles) for diffractive optical elements (DOE) can be realised that are not accessible with previous technologies. To this end, a new ion beam etching technology for the production of monolithic, blazed silicon diffraction gratings for beamline applications in the VUV, EUV and X-ray range is to be developed on the basis of lithographic structure definition. In particular, if successful, enormous performance increases can be realised through more sharply defined blaze edges, especially against the background of constantly decreasing blaze angles.
Link

Duration: 01/24 - 12/25
Funding (total): 1,47 Mio Euro
Funding IOM: 352.325,30 Euro
Funding programme: BMBF, Joint project in the alliance GRAVOmer
Cooperation partner: Carl Zeiss Jena GmbH, scia Systems GmbH

Contact IOM:
Dr. Frank Frost
Field of Research Ultra-precision Surfaces / Ion beam assisted patterning and smoothing
Phone: 49 (0)341 235-3309
E-Mail: frank.frost(at)iom-leipzig.de

Point-of-care (POC) technologies, which enable decentralised, rapid, sensitive and cost-effective diagnosis of clinically relevant biomarkers, will play an even greater role in the field of clinical diagnostics in the future due to increasing globalisation and the demographic structure of the population. A key prerequisite for the development of cost-effective and mass-produced POC systems is the defined design of film surfaces so that the reproducibility and accuracy of the resulting microfluidic POC systems are increased. The novel production process of UV replication for the manufacture of polymer films represents a promising alternative to the hot stamping process for structuring polymer films.
The aim of the GRAVOmer project "UVimprint4POC" is to further develop new production processes and systems for POC systems using the example of 1) single/two-stage UV replication for the functionalisation of microfluidic films for the development of a POC system for the detection of glycated albumin and 2) roll-to-roll UV replication of microstructures for the cultivation of single cells for next generation sequencing. The project will cover the entire value chain from the design of the tool system and the precise manufacture and functionalisation of the microfluidic structures to the moulding with UV-curable moulding materials optimised for the application and the demonstration of automated production by the individual project partners.

Duration: 11/2023-10/2025
Funding IOM: 212.377,62 Euro
Funding programme: BMBF, Joint project in the alliance GRAVOmer
Cooperation partner: SensLab GmbH, ibidi GmbH, WESKO GmbH, Fraunhofer-Institut für Werkzeugmaschinen und Umformtechnik (IWU)

Contact IOM:
Claudia Hackl
Forschungsbereich Biokompatible und bioaktive Oberflächen / Mikrosystemtechnik für biomedizinische Anwendungen
Tel.: 49 (0)341 235-2931
E-Mail: claudia.hackl(at)iom-leipzig.de

In the “nanoAR” project, the project partners are combining their expertise in manufacturing and processing methods to effectively reduce SSD (subsurface damage) by means of technology-open process development for nanostructure generation, including the use of simulation and modeling, high-resolution material characterization and the development of new methods for quality assurance.

Duration: 12/2024 – 11/2027
Funding (total): 6 Mio Euro
Funding IOM: 814.450,00 Euro
Funding programme: »Basistechnologien für die Fusion – auf dem Weg zu einem Fusionskraftwerk« vom Bundesministerium für Bildung und Forschung (BMBF)
Coordination: Glatt Ingenieurtechnik GmbH (Weimar)
Cooperation partner: Glatt Ingenieurtechnik GmbH (Weimar), POG Präzisionsoptik Gera GmbH (Löbichau), FLP Microfinishing GmbH (Zörbig), Trionplas Technologies GmbH (Leipzig), Fraunhofer IOF (Jena), Fraunhofer IMWS (Halle/Saale), Fraunhofer-Institut für Werkstoffmechanik IWM (Freiburg), Leibniz-Institut für Oberflächenmodifizierung IOM (Leipzig), Ernst-Abbe Hochschule (Jena)

Link

Contact IOM:
Dr. Frank Frost
Field of Research Ultra-precision Surfaces / Ion beam assisted patterning and smoothing
Phone: 49 (0)341 235-3309
E-Mail: frank.frost(at)iom-leipzig.de

Das Ziel ist, ein Bündnis für Innovationen zu mikrostrukturierten Funktionsoberflächen gemeinsam mit 42 mitteldeutschen Unternehmen, Bildungs- und Forschungseinrichtungen aufzubauen und damit eine stärkere regionale Vernetzung von Unternehmen, Forschenden und Ausbildenden der Bereiche Material-, Oberflächen-, Laser- und Werkzeugtechnik bei Innovationsprozessen zu erreichen. Weiterhin ist geplant, Kompetenzen gemeinsam zu entwickeln und auch für innovationsfernere Partner zugänglich zu machen. Aus- und Weiterbildung sollen flexibler gestaltet werden und so mitteldeutschen Unternehmen die Suche nach Fachkräften erleichtern.
Das mitteldeutsche Bündnis "GRAVOmer" wird im Rahmen des Förderprogrammes "WIR! - Wandel durch Innovation in der Region“ durch das Bundesministeriums für Bildung und Forschung (BMBF) gefördert.

www.gravomer.de

Duration: 2019-2021
Funding: ca. 8 Millionen Euro
Funding programme: WIR! – Wandel durch Innovation in der Region des BMBF
Koordination: Leibniz-Institut für Oberflächenmodifizierung e.V. gemeinsam mit Herlac Coswig GmbH und Sächsische Walzengravur GmbH

Contact:
Dr. U. Helmstedt
Head of the Field of Research Barrier and Precision Coatings
Phone: +49 (0)341 235-3240
E-Mail: ulrike.helmstedt(at)iom-leipzig.de

Metal mirrors with extremely smooth surfaces are used, for example, as optical elements in computer chip manufacturing, laser projectors and space mirrors. The surfaces are usually made of nickel-phosphorus (NiP) and are produced with an ultra-precise diamond tool on a lathe with a surface texture (roughness) in the range of 5 nm (for comparison, the diameter of a fine hair: 40,000 nm). However, for the development of high-performance optical metal mirrors, an improvement of the surface smoothness to below 1 nm is needed. The established ion beam planarization is in principle suitable to achieve this improved surface smoothness for flat workpieces up to 100 mm diameter. For larger and complex surfaces, however, the established methods are too slow and inaccurate.
The objective of the KMU-innovativ project IONENPLAN is the development of a production line for mechanical-chemical polishing by means of an improved, innovative ion beam planarization. The aim is to achieve a surface smoothness of less than 1 nm even on larger, non-planar metal surfaces up to a diameter of 200 mm.
The innovation of the solution approach results from the combination of a new plastic coating for surface pretreatment and the adjustment of the planarization material by varying the required ion gas mixture. The ion beam is generated from a gas mixture to be developed ("reactive gas") and scrapes over the coated metal mirrors until the plastic is completely removed and a very smooth metal surface is created. As part of the project, all process-relevant parameters, including the possible plastic materials and gas mixtures, will be researched on an industrial scale and tested in a demonstrator plant.
In the next few years, a technological leap in the semiconductor industry for the production of electronic chips with EUV (extreme ultraviolet) radiation is expected with a significant demand for metal optics and the equipment to manufacture them. The development of the innovative ion beam planarization system offers excellent market prospects in this area. In addition, increasing demand is expected in the laser technology, X-ray telescope and space mirror sectors, for example. The modular design of the process, consisting of plastic coating and ion beam system, also makes it possible to adapt the individual process steps to further applications, for example in medical technology.

Duration: 05/2020 – 10/2022
Funding: 232.798,72 Euro
Funding programme: KMU-innovativ: Produktionsforschung (ab 2016)
Project partner: NTG Neue Technologien GmbH & Co. KG

Contact:
Dr. Frank Frost
Ultra-precision Surfaces / Ion beam assisted patterning and smoothing
Tel.: +49 (0)341 235-3309
E-Mail: frank.frost(a)iom-leipzig.de

The use of free-form optical surfaces, i.e. optics without rotationally symmetrical surfaces, has become increasingly important in recent years, as this technology allows optical assemblies to be built much more compactly and easily. However, the flexible and efficient production of high-precision free-form optics poses a major challenge. Currently, manufacturing is carried out in highly complex, error-prone, cost- and time-intensive machining processes. In a study, the Leibniz Institute of Surface Engineering (IOM) and the Ernst Abbe University of Applied Sciences in Jena were able to show that ultrasonic grinding processes, combined with an ultrafine grinding process and subsequent plasma jet polishing, are very well suited for the production of free-form optics and have a high technical and economic potential. The intended innovative process combination opens up a new way to produce precise free-form optics for imaging systems in the infrared, visible and UV range with outstanding properties such as excellent micro-roughness and high laser damage resistance both flexibly and in large quantities in an efficient manner. If validation is successful, exploitation via cooperations with companies and the granting of licenses is planned.

Duration: 04/2021 – 09/2023
Funding: 810.000 Euro
Funding programme: VIP+ Programm des BMBF (ProFreiform, Funding reference number 03VP08632)
Project partner: Ernst-Abbe-Hochschule Jena

Contact:
Prof. Dr. Thomas Arnold
Head Ultra-precision Surfaces / Ion beam and plasma jet based ultra-precision surface figuring
Tel.: +49 (0)341 235-3120
E-Mail: thomas.arnold(a)iom-leipzig.de

Ultrafiltration membranes have proven to be highly effective in the purification of wastewater. The nanometer-scale pores are meticulously stabilized and maintained through the use of impregnating agents like glycerol, sodium azide, or water-alcohol mixtures. Without the incorporation of these impregnating agents, the membranes are susceptible to rapid drying during storage, transportation, or incorrect handling. Drying leads to the collapse of the pores, resulting in a significant loss of membrane performance, particularly in terms of permeation capacity.
Together with our partner qCoat we will develop in this project a new type of multifunctional membrane coating that makes the need for additional and sometimes toxic impregnating agents completely obsolete. By modifying the membrane pores with a thin stabilizing layer, collapsing pores will be prevented. Using electron beam technology, these stabilizing layers can also be covalently bonded to the porous surface inside the membrane in a single step and entirely without the use of additional chemicals. Additionally, the stabilization layer shall exhibit a dual role by functioning synergistically as an antifouling coating.

Duration: 11/2023-10/2025
Funding: 207.366,23 Euro
Funding programme: Federal Ministry of Education and Research (BMBF), SME-innovative: Materials research
Project partner: qCoat GmbH

Contact:
Dr. Kristina Fischer
Group leader
Field of research "Surfaces of Porous Membrane Filters / innovative membrane materials"
Phone: +49 (0)341 235-2231
E-Mail: kristina.fischer(a)iom-leipzig.de

Electric propulsion systems are becoming increasingly important for all satellite classes, since they require considerably less fuel than chemical alternatives, thereby making a variety of missions of interplanetary and interstellar flights (DeepSpace, BepiColombo, LISA, Euclid, etc.) and complex satellite constellations or formations (OneWeb, Starlink, Kuiper, UN:IO etc.) feasible. In parallel, small satellites, especially micro- and nanosatellites, are gaining in importance and their demand is growing rapidly. Within the joint project IonJet-Evo, the Leibniz-Institute of Surface Engineering (IOM) and Aerospace Innovation GmbH (AI) intend to develop an Engineering Qualification Model (EQM) of a low-cost, compact and powerful ion electric propulsion system consisting of a coaxial thruster in conjunction with the space-proven components of the modular propulsion system MICROJET and to investigate it under application-relevant conditions in ground tests. The follow-up project IonJet-Evo continues the very promising technology developments made in the initial project IonJet, in which a first test model of a gridded ion propulsion system was developed and tested under laboratory conditions. In the follow-up project, among other things, a significant miniaturization of the propulsion system, compatible with the cubesat specifications of the 6U-16U-format, will be carried out. Furthermore, the propulsion system will be subjected to environmental tests and thus be qualified.

Duration: 2022 – 2024
Funding: 524,738.14 Euro (part of IOM)
Funding programme: Bundesministerium für Wirtschaft und Energie (BMWi)

Contact:
Dr. Daniel Spemann
Field of research Tools
Phone: +49 (0)341 235-2681
E-Mail: daniel.spemann(a)iom-leipzig.de

The aim of the project is to develop state-of-the-art instrumentation for the testing and qualification of electric propulsion (EP) systems in order to meet the rapidly evolving requirements of the space industry in the EP sector, to establish comparability between EP systems and to ensure the safe operation of EP systems in space. The transferability of the performance and operating parameters of EP systems determined in test facilities on Earth to operation under real conditions in space is of crucial importance. The aim of the joint project is to develop methods and structures to establish such standards at the national level. For this purpose, two reference diagnostics for beam analysis of EP systems will be developed within the framework of the project and compared with a reference ion source. The experimental validation of the developed ion source as well as the diagnostics is carried out at various space simulation facilities in the form of a interlaboratory comparison.
More informaton

Duration: 11/2023 – 04/2025
Funding: 667,925,00 Euro
Funding body: Deutsches Zentrum für Luft- und Raumfahrt (DLR)
Project partners: Justus-Liebig-Universität (JLU), Christian-Albrechts-Universität zu Kiel, Technische Hochschule Mittelhessen

Sub-project of IOM: Development and characterization of a reference gridded ion source for beam diagnostics
Funding of IOM: 187,133 Euro

Contact:
Dr. Daniel Spemann
Head of the cross-section unit "Tools"
Phone: +49 (0)341 235-2681
E-Mail: daniel.spemann(a)iom-leipzig.de

Grid erosion is a dominating factor limiting the lifetime of gridded ion thrusters. Erosion is mainly driven by charge exchange processes between ions and neutrals of the operating gas (propellant), resulting in a species of slow ions, which have trajectories that do not follow the ion optics design and lead to sputtering of the grid surface by ion impingement. Within this project, neutral densities of xenon and krypton, and of eroded species such as carbon or molybdenum are measured specifically within the inter-grid and near the exit plane of a gridded ion thruster using laserspectroscopic methods. The inter-grid area is identified with the main region from where charge exchange processes contribute to the ion thruster accelerator grid erosion. Besides ion thrusters, the data may be also important for numerical modeling of ion sources in terrestrial applications.

Duration: 2021 – 2024
Funding: 321.659,27 Euro
Funding programme: Bundesministerium für Wirtschaft und Energie (BMWi)

Contact:
Dr. Christoph Eichhorn
Field of Research Tools / Development of diagnostic tools and methods
Phone: +49 (0)341 235-4020
E-Mail: christoph.eichhorn(a)iom-leipzig.de

Flexible gas barrier films protect sensitive goods from decomposition due to environmental influences (e.g. oxygen or water vapour) and significantly extend their service life. They therefore contribute to sustainable management in terms of long product life cycles and reduced waste. The encapsulation of sensitive optoelectronic components in particular, such as lightweight and flexible photovoltaic modules, requires minimal oxygen and water vapour permeability combined with flexibility and transparency.

In a project funded by the German Federal Environmental Foundation (DBU), researchers from the Barrier and Precision Coatings research department at the IOM are working with the company Innovative Oberflächentechnologien GmbH (IOT) to develop technologies for refining recycled polyester films. Ultraviolet light is used to convert molecules into solid coatings that give the substrates an improved gas barrier effect. Demonstrators for barrier films based on rPET are produced for various fields of application and evaluated by users.

Duration: 01/2024 – 12/2025
Funding: 245.814,00 Euro
Funding body: Deutsche Bundesstiftung Umwelt (DBU)
Project partner: Innovative Oberflächentechnologien GmbH (IOT)

Contact:
Dr. Patrick With
Field of Research "Barrier and Precision Coatings"/ "Photochemically initiated coating technologies"
Phone: +49 (0)341 235-2850
E-Mail: patrick.with(a)iom-leipzig.de

Dr. Ulrike Helmstedt
Head of the Field of Research "Barrier and Precision Coatings"
Tel.: +49 (0)341 235-3240
E-Mail: ulrike.helmstedt(at)iom-leipzig.de

The global space community is increasingly interested in planetary exploration of the Moon and Mars, near-Earth asteroid avoidance, mining and in-orbit service missions. In the CHEOPS-VHP-BB project, an international consortium consisting of seven partners – leading representatives of the space industry, research centres, universities and SMEs – is developing innovative technologies to enable future Mars, Moon and near-Earth asteroid avoidance missions. The main objective of this project is to design, develop and qualify future propulsion systems and simulation tools for this purpose, thus complementing ongoing development activities with research and development for the future use of very powerful hall thruster propulsion systems. The project takes a robust and cost-effective approach to qualification, the production of key components subject to wear and the possibility of using alternative propellants and energy sources. The cost-effective approach to qualification envisaged in this project requires the modelling of life-limiting wear processes for selected thruster components. In order to correlate wear with thruster operation, a comprehensive characterization of the thrusters in ground tests is required. For this task, the Advanced Electric Propulsion Diagnostic Platform developed at IOM in two previous ESA projects is used. To do this, beam diagnostic tools must first be adapted to the high thermal load under beam exposure from these very powerful Hall thrusters.

Link: www.cheops-vhp-bb.eu
 

Duration: 2023 – 2025
Funding (whole consortium): 1,499,853.00 Euro
Funding (IOM): 142,333.75 Euro
Funding programme: HORIZON-CL4-2022-SPACE-01
Coordination: Safran Spacecraft Propulsion, Frankreich

Consortium partners: 7

Contact:
Dr. Daniel Spemann
Field of research Tools
Phone: +49 (0)341 235-2681
E-Mail: daniel.spemann(a)iom-leipzig.de

The objective of the 10ÅCe pThe objective of the 10ÅCe project is to explore and realize solutions for the 10Å CMOS chip technology. The project consortium covers the entire value chain for manufacturing of the CMOS chips in the 10A node, that is, from chip design to lithography to process technology and finally chip metrology. Essential parts of hardware, software and processing technology are developed pushing the boundaries of semiconductor design and manufacture to enable the new node and keep Moore’s law alive.
Link: https://cordis.europa.eu/project/id/101139972

National co-financing of 50% each by the BMBF and SMWA in the joint project "Technologies for 10 Ångstrom lithography in chip production - 10ÅCe" within the European microelectronics funding programme CHIPS.
Link: https://www.elektronikforschung.de/projekte/10ace

Duration: 5/2024 – 4/2027
Funding (total): 98.128.492,75 Euro
H2020 Funding IOM: 999.481,25 Euro
Funding programme: HORIZON.2.4 - Digital, Industry and Space, HORIZON.2.4.2 - Key Digital Technologies
Coordination: ASML NETHERLANDS B.V.

Cooperation partner: 30

Contact IOM:
Dr. Frank Frost
Field of Research Ultra-precision Surfaces / Ion beam assisted patterning and smoothing
Phone: 49 (0)341 235-3309
E-Mail: frank.frost(at)iom-leipzig.de

Semiconductor research and development continuously focuses on surpassing present state-of-the-art Micro-Chips manufacturing technology to accommodate the exponential increase in demand for more processing power. To increase the number of transistors per chip, the EU-funded IT2 project develops next generation extreme UV lithography and explores novel 3D structures. Much like building an apartment complex rather than a single-family home on the same real estate. The project will enable future chips that will be at the core of AI, Big Data, Mobile/5G communication and other elements of Europe's digitisation. In this way, the project develops knowledge and infrastructure to give Europe’s semiconductor manufacturing equipment industry global leadership in 2nm CMOS technology and supports Europe to obtain a sovereign position in the electronics value-chain.

Link: https://cordis.europa.eu/project/id/875999

Duration: 2020 – 2023 
H2020 Funding (total): 91.638.509,26 Euro
H2020 Funding IOM: 990.562,50 Euro
Funding programme: H2020-EU.2.1.1.7. - ECSEL
Coordination: ASML NETHERLANDS B.V.

Cooperation partner: 31

Contact IOM:
Dr. Frank Frost
Field of Research Ultra-precision Surfaces / Ion beam assisted patterning and smoothing
Phone: 49 (0)341 235-3309
E-Mail: frank.frost(at)iom-leipzig.de

This project has received funding from the ECSEL (Electronic Components and Systems for European Leadership) Joint Undertaking (JU) under grant agreement No 875999. The JU receives support from the European Union’s Horizon 2020 research and innovation programme and Netherlands, Belgium, Germany, France, Austria, Hungary, United Kingdom, Romania, Israel.