• Plasma based precision surface machining processes
• Ion beam based ultra-precision shaping and correctio of optical and metal surfaces
• Development of process chains for ultra-precision surface machining
• Development of reactive gas plasma jet sources
• Optical surface measurement methods

1. M. Ulitschka, J. Bauer, G. Dornberg, F. Frost, T. Arnold, Local smoothing of optical aluminum surfaces by reactive ion beam etching, Opt. Eng. 59 (2020) 035108, 10.1117/1.OE.59.3.035108
2. F. Kazemi, G. Boehm, T. Arnold, An investigation on effectiveness of temperature treat-ment for fluorine-based reactive plasma jet machining of N-BK7®, Plasma Process Polym. 17 (2020) e2000016, 10.1002/ppap.202000016
3. M. Ulitschka, J. Bauer, F. Frost, T. Arnold, Ion beam planarization of optical aluminum sur-faces, J. Astron. Telesc. Instrum. Syst. 6 (2020) 014001, 10.1117/1.JATIS.6.1.014001
4. T. Arnold, G. Boehm, F. Kazemi, Advances in precision freeform manufacturing by plasma jet machining, EPJ Web Conf. 238 (2020) 03001, /10.1051/epjconf/202023803001.
5. J. Bauer, F. Frost, A. Lehmann, M. Ulitschka, Y. Li, T. Arnold, Finishing of metal optics by ion beam technologies, Opt. Eng. 58 (2019) 092612, 10.1117/1.OE.58.9.092612.
6. F. Kazemi, G. Boehm, T. Arnold, Development of a model for ultra-precise surface machin-ing of N-BK7® using microwave-driven reactive plasma jet machining, Plasma Process Polym. 16 (2019) 1900119, 10.1002/ppap.201900119.
7. J. Bauer, M. Ulitschka, F. Pietag, T. Arnold, Improved ion beam tools for ultraprecision fig-ure correction of curved aluminum mirror surfaces, J. Astron. Telesc. Instrum. Syst. 4 (2018) 046003, 10.1117/1.JATIS.4.4.046003
8. Th. Arnold, G. Boehm, H. Paetzelt, New Freeform Manufacturing Chains based on atmos-pheric Plasma Jet Machining,J. Eur. Opt. Soc.-Rapid 11 (2016) 16002, 10.2971/jeos.2016.16002.
9. H. Paetzelt, G. Böhm, Th. Arnold, Etching of silicon surfaces using atmospheric plasma jets, Plasma Sources Sci. Technol. 24 (2015) 025002
10. P. Piechulla, J. Bauer, G. Boehm, H. Paetzelt, Th. Arnold, Etch Mechanism and Temperature Regimes of an Atmospheric Pressure Chlorine-Based Plasma Jet Process, Plasma Process. Polym. 13 (2016) 1128-1135, 10.1002/ppap.201600071

• F. Kazemi, G. Boehm, T. Arnold, Optical freeform generation of N-BK7 by fluorine-based plasma jet machining Proc. SPIE 11478, Seventh European Seminar on Precision Optics Manufacturing (2020) 1147805, DOI: 10.1117/12.2564913,
• T. Arnold*, G. Boehm, F. Kazemi, Advances in precision freeform manufacturing by plasma jet machining, European Optical Society Annual Meeting 2020, Porto, Portugal, 07.-11.09. 2020
• T. Arnold*, G. Boehm, F. Kazemi, H. Mueller, H. Paetzelt, Precision freeform surface manufacturing and surface structuring using atmospheric plasma jets, EUSPEN Virtual Special Interest Group Meeting: Structured & Freeform Surfaces, 06.-08.10. 2020
• J. Bauer*, M. Ulitschka, F. Frost, T. Arnold, Figuring Of Optical Aluminium Devices By Reactive Ion Beam Etching, EOS Optical Technologies: Optofluidics and Manufacturing, Tolerancing, and Testing of Optical Systems, München, Germany, 24.-27.06. 2019
• Th. Arnold*, J. Bauer, F. Pietag, Advancements in Ion Beam Figuring, OSA Optical Design and Fabrication Congress, Washington, DC, USA, 10.-12.06. 2019

• Optimization diamant-turned RSA-Al501 surfaces for optical applications, 2021-2022, DFG, TU Berlin
• InnoProfile-Transfer „Ultra-precision surface machining with atomic particle beams“, 2014-2019, BMBF
• Development of plasma based methods for decontamination of slicer knives, 2017-2019, FEI/AiF, Leipzig University
• Realization of PWM controlled ion beam machining – PulsION, 2016-2019, ZIM
• InnoProfile „Ultra-precision surface machining with atomic particle beams“, 2008-2012, BMBF

• „Micro and Ultra-precision machining“, Mechanical Engineering, Faculty of Mechanical Science and Engineering, TU Dresden
• International Summer School „Trends in energy and particle beam ultra-precision optical surface manufacturing” SS 2015, 2016, 2017, 2018, Mechanical Engineering, Faculty of Mechanical Science and Engineering, TU Dresden

• CC-UPOB e.V., Member
• DGaO, Member
• Optical Society of America (OSA)

• Science and Technology Award of IOM, 2010

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