Group Leader "Ion beam assisted patterning and smoothing" / Field of Research "Ultra-precision Surfaces"
Leibniz Institute of Surface Engineering (IOM)
Permoserstr. 15 / 04318 Leipzig / Germany
+49 (0)341 235-3309
+49-(0)15174214577
frank.frost(at)iom-leipzig.de
Fields of Expertise
- Fundamentals of ion - surface interactionIon
- Iom beam assisted patterning and smoothing of surfaces
- Technology development for the implementation of R&D results in industrial applications
- Analytics on micro- and nanostructured surfaces
Scientific Career
- 1995 Diploma in physics, Leipzig University
- 1995 - 2003 Research assistant, IOM
- 1998 Doctorate (Dr. rer. nat.), Leipzig University
- 2003 – 2012 Group leader thin film deposition and patterning, IOM
- Since 2013 Group leader Ion beam assisted patterning and smoothing, IOM
Selected Publications
- F. Frost, A. Schindler, F. Bigl, Roughness evolution of ion sputtered InP surfaces: Pattern formation and scaling laws, Physical Review Letters 85 (2000) 4116
- F. Frost, R. Fechner, B. Ziberi, J. Völlner, D. Flamm, A. Schindler (topical review), Large area smoothing of surfaces by ion bombardment: Fundamentals and applications, Journal of Phys-ics: Condensed Matter 21 (2009) 224026
- M. Teichmann, J. Lorbeer, B. Ziberi, F. Frost, B. Rauschenbach, Pattern formation on Ge by low energy ion beam erosion, New Journal of Physics 15 (2013) 103029
- Y. Li, H. Takino, F. Frost, Ion beam planarization of diamond turned surfaces with various roughness profiles, Opt. Express 25 (2017) 7828
- A. Finzel, G. Dornberg, S. Görsch, M. Mitzschke, J. Bauer, F. Frost, Realization of depth ref-erence samples with surfaces amplitudes between 0.1 nm and 5 nm, EPJ Web. Conf. EOS Optical Technologies 215 (2019) 03004
Conference Contributions
A. Finzel, G. Dornberg, S. Görsch, M. Mitzschke, J. Bauer, F. Frost, Realization of depth reference samples with surfaces amplitudes between 0.1 nm and 5 nm, EOS Optical Technologies: Optofluidics and Manufacturing, Tolerancing, and Testing of Optical Systems, München, Germany, 24.-27.06. 2019
M. Ulitschka, J. Bauer, F. Frost, T. Arnold, Reactive ion beam etching-based planarization of optical aluminium surfaces, SPIE Optics + Optoelectronics, EUV and X-ray Optics: Synergy between Laboratory and Space, Prague, Czech Republic, 01.-04.04. 2019
J. Bauer, F. Frost, Orientation-dependent nanostructuring of titanium surfaces by low-energy ion-beam treatment, 18th European Conf. on Applications of Surface and Interface Analysis, Dresden, Germany, 15.-20.09. 2019
F. Frost, Reactive Ion Beam Etching (RIBE) for the manufacturing of highly precise optical elements, 2nd NTG IBF Conf. on the occasion of the 50th company anniversary of NTG, Gelnhausen, Germany, 21.09. 2018
F. Frost, Ion beam assisted patterning and smoothing of optical surfaces with sub-nanometer precision, 4th Int. Summer School on Trends in Ultra-Precision Surface Engineering, Leipzig, Germany, 03.-07.09. 2018
Projects
- DFG Research unit FOR 845 „Self-organized nanostructures by low-energy ion beam erosion“, 2007 – 2015, DFG, Universität Münster, Forschungszentrum Dresden-Rossendorf, Universität zu Köln, Universität Kaiserslautern, Universität Siegen
- „SHAPION - Efficient production of ultra-precise innovatively structured functional surfaces using adaptive plasma technology“, 05/2012-10/2015, BMBF, Carl Zeiss Jena GmbH, Laser Zentrum Hannover e. V., NTG Neue Technologien GmbH & Co. KG, Metro Lux Gesellschaft für optische Meßtechnik mbH
- „Universal diagnostic platform for reactive ion beam processes (RISQ-DIAP)“, 10/2019 – 07/2021, SAB/EFRE
- „SME-innovative: Exploring an ion beam planarization technology for roughness improvement of diamond-turned or milled NiP surfaces with roughness in the Ångström-rms range (IONENPLAN)“, 05/2020 – 04/2022, BMBF, NTG Neue Technologien GmbH & Co. KG, Carl Zeiss SMT GmbH
- “IC Technology for the 2nm Node”, 06/2020 – 05/2023, EU/ECSEL, 31 Partners
Teaching and Lectures
Postgraduate course "Analytics & Spectroscopy“, Faculty of Chemistry and Mineralogy, Leipzig University
Further Activities
- 2001 – 2008 (re)elected member of the Scientific and Technical Council of the IOM (member and chairman)
- Co-Organizer MRS 2013 Fall Meeting: Symposium WW - Self-Organization and Nanoscale Pattern Formation
- Programme committee EOS Conference on Manufacturing and Testing of Optical Components
- Reviewer National Science Foundation (NSF, USA), Deutsche Forschungsgemeinschaft (DFG), U.S. Department of Justice, USA
- Referee for i. a. Phys. Rev. Lett., Phys. Rev. B, New J. Phys., Surf. Sci., Appl. Phys. Lett., Nanotechnology, Eur. Phys. Lett.
- 2017 Co-founder and co-shareholder of Trionplas GmbH