Since April 2026, a team of researchers from the “Ultra-Precision Surfaces” research area and the cross-section unit “Tools” at IOM has been working on the ECRION research project. The aim is to develop a novel microwave-excited ion beam source capable of using not only inert gases but also chemically reactive gases.

Beam-based ultra-precision surface machining is essential in the manufacturing of lenses, sensors and advanced optical systems, as well as in microtechnology and semiconductor manufacturing. However, existing ion beam sources reach their limits in areas such as long-term operational stability, energy efficiency and precise control of the beam shape and intensity.

With ECRION, the research team aims to overcome these challenges. The project focuses on:

• longer operating times without loss of performance,
• the use of reactive gases, for example for tailored surface chemistry,
• fine-tuned control of beam current and shape, and
• lower energy consumption.

The team has already developed initial concepts, simulated the electric and magnetic fields inside the source and conducted the first measurements. The results obtained so far are promising.

By the end of the project in late 2027, the researchers aim to have developed a functional laboratory prototype of the ion beam source as well as a digital twin. This virtual representation will precisely simulate the source’s behaviour and support its further development and optimisation.

The project is funded under the “InfraProNet” funding guideline with resources from the European Regional Development Fund (ERDF) and was approved by the Sächsische Aufbaubank (SAB).