As part of the ERDF/JTF Research InfraProNet 2021-2027 tender, the Free State of Saxony (Sächsische Aufbaubank SAB) is investing around EUR 2 million in the expansion and improvement of the research infrastructure at the IOM with co-financing from the European Union, thus ensuring the further strengthening of the IOM's innovative power and improving its national and international visibility.
With the new ion beam research facility, it will be possible for the first time to process optical components with lateral dimensions of 1 m x 1 m in such a way that functional surfaces can be produced with shape and structural accuracies in the sub-nanometre range. In particular, novel processes are being investigated and developed at the facility in which chemically reactive ion species are shot onto the surface with energies ≤2000 eV, thereby removing material from the surface with extremely high precision. The optical elements produced in this way are used, for example, in machines for the production of computer chips, in new types of earth- and space-based telescopes, in the production of diffractive optical elements or in the field of laser fusion research.
The aim is to install and successfully commission the system at the IOM at the end of the three-year project period. In the meantime, the corresponding ion beam sources and peripheral beam diagnostics will be further developed and prepared for use at the facility. This is being done in close collaboration between the "Ultra-precision Surfaces"/"Ion beam assisted patterning and smoothing" research area and the "Tools" cross-sectional unit at the IOM.
For more than 30 years, IOM scientists have been researching the scientific fundamentals of beam-based ultra-precision processing of optical surfaces and developing technological applications for the semiconductor industry, the optical industry and scientific instrumentation. In the last evaluation of the IOM by the Senate of the Leibniz Association, the Institute was recognised as a world leader in the field of ultra-precision processing of large surfaces and the results achieved were rated as excellent.
Contact:
Prof. Dr. Thomas Arnold
Head of the Field of research Ultra-precision Surfaces
E-Mail: thomas.arnold(at)iom-leipzig.de
Dr. Frank Frost
Group Leader Ion beam assisted patterning and smoothing
E-Mail: frank.frost(at)iom-leipzig.de
Dr. Daniel Spemann
Head of the Cross-section unit Tools
E-Mail: daniel.spemann(at)iom-leipzig.de