Reviewing progress, strengthening collaboration: IOM at the 10ÅCe Year 2 Review Meeting in Austria

Participants at the 10ÅCe Year 2 Review Meeting in St. Florian am Inn Austria. Photo: © EV Group

How can Europe enable the next steps in semiconductor technology? This question shaped the Year 2 Review Meeting of the 10 Ångstrom CMOS Exploration (10ÅCe) project, held on 18 and 19 June 2026 at EV Group in St. Florian am Inn, Austria.

The meeting brought together European partners from research and industry to present the progress achieved during the second project year. Deliverables, milestones and publications were at the centre of the review, offering a clear picture of how the consortium is moving forward. The reviewers will now evaluate the project progress over the coming weeks.

For the Leibniz Institute of Surface Engineering (IOM), represented by Dr. Erik Rohkamm and Peter Birtel, the meeting was an important opportunity to share progress and exchange with partners across the semiconductor value chain. Within 10ÅCe, IOM contributes with its long-standing expertise in ion beam assisted etching, patterning and smoothing.

The key aspect of the project is the improvement of machines, tools and processes that can enable future advances in chip technology. By developing and refining technologies for manufacturing and metrology, 10ÅCe supports the long-term goal of making future 10 Å CMOS chip technologies possible. IOM’s contribution helps address the demanding surface and patterning requirements needed for such next-generation approaches.

The progress presented at the review meeting reflects a strong collaborative effort. Achieving the ambitious goals of 10ÅCe requires close coordination, scientific openness and shared commitment across institutional and disciplinary boundaries. The meeting showed how European partners are working together to strengthen key capabilities in microelectronics.

Beyond the review sessions, participants gained valuable insights into EV Group’s cleanroom and test infrastructure. A guided window tour offered an impressive look at the technological environment in which advanced semiconductor equipment is developed and tested.

IOM warmly thanks EV Group for providing an excellent setting for this productive and inspiring meeting. As a Horizon Europe project within the Chips Joint Undertaking (Chips JU), 10ÅCe contributes to European collaboration, technological sovereignty and future competitiveness in microelectronics.